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    • 24. 发明授权
    • Solid-state microrefrigerator
    • 固态微型制冷机
    • US06581387B1
    • 2003-06-24
    • US10075789
    • 2002-02-12
    • Joel N. Ullom
    • Joel N. Ullom
    • F25B2100
    • H01L39/22F25B21/00F25B2321/003F25B2400/15Y02B30/66
    • A normal-insulator-superconductor (NIS) microrefrigerator in which a superconducting single crystal is both the substrate and the superconducting electrode of the NIS junction. The refrigerator consists of a large ultra-pure superconducting single crystal and a normal metal layer on top of the superconducting crystal, separated by a thin insulating layer. The superconducting crystal can be either cut from bulk material or grown as a thick epitaxial film. The large single superconducting crystal allows quasiparticles created in the superconducting crystal to easily diffuse away from the NIS junction through the lattice structure of the crystal to normal metal traps to prevent the quasiparticles from returning across the NIS junction. In comparison to thin film NIS refrigerators, the invention provides orders of magnitude larger cooling power than thin film microrefrigerators. The superconducting crystal can serve as the superconducting electrode for multiple NIS junctions to provide an array of microrefrigerators. The normal electrode can be extended and supported by microsupports to provide support and cooling of sensors or arrays of sensors.
    • 正常绝缘体超导体(NIS)微制冷机,其中超导单晶既是衬底又是NIS结的超导电极。 冰箱由超大型超纯晶体和超导晶体顶部的正常金属层组成,由绝缘层隔开。 超导晶体可以从块状材料切割或者作为厚的外延膜生长。 大的单超导晶体允许在超导晶体中产生的准粒子容易地从NIS结通过晶体的晶格结构扩散到正常的金属阱,以防止准粒子返回穿过NIS结。 与薄膜NIS冰箱相比,本发明比薄膜微型制冷机提供了比数量级更大的冷却功率。 超导晶体可以用作多个NIS结的超导电极,以提供微阵列阵列。 正常电极可以由微型支架延伸和支撑,以提供传感器或传感器阵列的支撑和冷却。