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21. 发明申请

US20030201530A1 Composite material member for semiconductor device and insulated and non-insulated semiconductor devices using composite material member 审中-公开
公开(公告)号：US20030201530A1
公开(公告)日：2003-10-30
申请号：US10428787
申请日：2003-05-05
申请人： Hitachi, Ltd.
发明人： Yasutoshi Kurihara , Yasuo Kondo , Takumi Ueno , Toshiaki Morita , Kenji Koyama , Takashi Suzumura , Kazuhiko Nakagawa , Kunihiro Fukuda
IPC分类号： B32B015/00
CPC分类号： H01L23/142 , H01L23/3736 , H01L24/73 , H01L2224/32225 , H01L2224/32245 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48472 , H01L2224/49109 , H01L2224/49111 , H01L2224/49175 , H01L2224/73265 , H01L2924/01327 , H01L2924/09701 , H01L2924/10253 , H01L2924/1301 , H01L2924/13055 , H01L2924/13091 , H01L2924/14 , H01L2924/15322 , H01L2924/16195 , H01L2924/181 , H01L2924/19107 , H01L2924/3011 , H01L2924/30111 , H01L2924/3025 , H05K1/05 , Y10T428/12083 , Y10T428/12535 , Y10T428/12611 , Y10T428/12889 , Y10T428/12903 , Y10T428/1291 , Y10T428/25 , H01L2924/00 , H01L2924/00012 , H01L2924/00014
摘要： To provide a composite material member for semiconductor device, an insulated semiconductor device and non-insulated semiconductor device using the composite material member, which are effective for obtaining a semiconductor device that alleviates thermal stress or thermal strain occurring during production or operation, has no possibilities of deformation, degeneration and rupture of each member, and is highly reliably and inexpensive. The composite material member for semiconductor device is characterized by being a composite metal plate with particles composed of cuprous oxide dispersed in a copper matrix, in which a surface of the composite metal plate is covered with a metal layer, and a copper layer with thickness of 0.5 nullm or larger exists in an interface formed by the composite metal plate and the metal layer.

22. 发明申请

US20030194620A1 Mask blank and method of fabricating phase shift mask from the same 审中-公开
标题翻译：掩模毛坯和从其制造相移掩模的方法
公开(公告)号：US20030194620A1
公开(公告)日：2003-10-16
申请号：US10422956
申请日：2003-04-25
发明人： Yong-Hoon Kim
IPC分类号： G03F001/08 , B32B015/00 , B32B017/06
CPC分类号： G03F1/30 , G03F7/09
摘要： A mask blank and a method of fabricating a phase shift mask from the same. The mask blank includes a transparent substrate, a light shield layer formed on the entire upper surface of the transparent substrate, and a multifunctional protective layer formed on the entire surface of the light shield layer. To make the phase shift mask from the blank, the protective layer is patterned, and the exposed portions of the light shield layer are etched using the protective layer pattern as an etch mask to in turn expose first and second regions of the substrate. The phase shift region is formed by etching a groove in the second region of the substrate while the protective layer pattern protects the light shield layer from the etchant. Therefore, undesirable residue is prevented from forming as a result of a reaction between the etchant and the light shield layer and hence, from accumulating at the bottom of a groove constituting the phase shift region. The method also entails forming a photosensitive layer over the protective layer, patterning the photosensitive layer, and patterning the protective layer by using the photosensitive layer pattern as a mask. In this case, the patterned photosensitive layer is removed, and then the resultant structure is cleaned so that no residue remains on the exposed portions of the light shield layer.
摘要翻译：掩模坯料和从其制造相移掩模的方法。掩模坯料包括透明基板，形成在透明基板的整个上表面上的遮光层和形成在遮光层的整个表面上的多功能保护层。为了从空白形成相移掩模，图案化保护层，并且使用保护层图案作为蚀刻掩模来蚀刻遮光层的暴露部分，从而暴露衬底的第一和第二区域。通过在衬底的第二区域中蚀刻凹槽来形成相移区域，同时保护层图案保护遮光层免受蚀刻剂的影响。因此，由于蚀刻剂和遮光层之间的反应而不能形成不期望的残留物，因此不会积累在构成相移区域的槽的底部。该方法还需要在保护层上形成感光层，图案化感光层，并通过使用感光层图案作为掩模来图案化保护层。在这种情况下，去除图案化感光层，然后清洁所得结构，使得在遮光层的露出部分上不残留残留物。

23. 发明申请

US20030194568A1 Attenuated embedded phase shift photomask blanks 有权
标题翻译：嵌入式相移光掩模空白
公开(公告)号：US20030194568A1
公开(公告)日：2003-10-16
申请号：US10122876
申请日：2002-04-12
申请人： International Business Machines Corporation
发明人： Marie Angelopoulos , Katherina Babich , S. Jay Chey , Michael Straight Hibbs , Robert N. Lang , Arpan Pravin Mahorowala , Kenneth Christopher Racette
IPC分类号： B32B015/00 , B32B017/06 , G03F001/00 , C23C014/06 , C23C014/34
CPC分类号： G03F1/32 , C23C14/0676 , C23C14/08
摘要： An attenuating embedded phase shift photomask blank that produces a phase shift of the transmitted light is formed with an optically translucent film made of metal, silicon, nitrogen and oxygen. An etch stop layer is added to improve the etch selectivity of the phase shifting layer. A wide range of optical transmission (0.001% up to 15% at 157 nm) is obtained by this process.
摘要翻译：通过由金属，硅，氮和氧制成的光学半透明的膜形成产生透射光的相移的衰减的嵌入式相移光掩模坯料。加入蚀刻停止层以改善相移层的蚀刻选择性。通过该方法获得宽范围的光学透射（0.001nm至15％，157nm）。

24. 发明申请

US20030186076A1 Layered heat-resistant alloy plate and method of producing the same 有权
标题翻译：层状耐热合金板及其制造方法
公开(公告)号：US20030186076A1
公开(公告)日：2003-10-02
申请号：US10343746
申请日：2003-02-06
发明人： Norihide Hirota , Yusaku Sugimoto , Kazuhiko Hasegawa
IPC分类号： B32B015/00
CPC分类号： F28F3/048 , B23K1/0012 , B23K1/19 , B23K20/023 , B23K35/0233 , B23K35/3033 , B23K35/304 , B23K2101/14 , B23K2103/18 , B23K2103/26 , B32B15/01 , C22C1/02 , F28D2021/0078 , F28F3/12 , F28F21/087 , F28F21/089 , H01M4/383 , H01M4/46 , Y10T428/12389 , Y10T428/12451 , Y10T428/12944
摘要： Objects of the present invention are to provide a laminated heat resistant alloy plate has a large area, and to provide a manufacturing method therefor. The laminated heat resistant alloy plate according to the present invention is obtained by brazing a Ni alloy plate having plural striae formed thereon at a predetermined interval and a plate which is made of a material the same as or different from that of the Ni alloy plate with a sheet of Ni solder which is amorphous and does not contain organic binder.
摘要翻译：本发明的目的是提供一种面积大的叠层耐热合金板，并提供其制造方法。本发明的层叠耐热合金板是以规定的间隔钎焊形成有多个条纹的Ni合金板，以及由与Ni合金板相同或不同的材料制成的板，一块Ni焊料，它是非晶态的，不含有机粘合剂。

25. 发明申请

US20030175543A1 Hybrid metal matrix composites 审中-公开
标题翻译：混合金属基复合材料
公开(公告)号：US20030175543A1
公开(公告)日：2003-09-18
申请号：US10375257
申请日：2003-02-28
发明人： Jason Sin Hin Lo
IPC分类号： B32B015/00
CPC分类号： C22C32/00 , B22F2998/00 , B22F2998/10 , C22C47/06 , C22C49/06 , Y10T428/12486 , Y10T428/249927 , C22C49/04 , C22C47/12
摘要： A hybrid composite reinforced metal matrix in which the metal is aluminum, aluminum alloy, or a magnesium alloy containing a relatively high percentage of aluminum. In addition to the reinforcement, which is typically alumina, the metal matrix also includes a hardening agent which is at least one intermetallic compound of aluminum with at least one second metal chosen from iron, nickel, titanium, zirconium, cobalt and niobium. The intermetallic compound(s) can be added as a powder to the metal matrix during formation of the composite, or can be created in the composite by adding the at least one second metal as a powder to the molten metal matrix during composite preparation. When the intermetallic compound(s) are created in the composite, during the addition step the second metal powder should be protected from oxidation. If the intermetallic compound is created in the composite, the composite when made initially can be readily machined and is self hardening through repeated heating cycles. The composite finds use in brake parts, such as brake rotors and brake drums as a replacement for the commonly used grey cast iron and exhibits adequate strength and compression properties up to a working temperature of at least about 450null C.
摘要翻译：一种混合复合增强金属基体，其中金属是铝，铝合金或含有相对高百分比的铝的镁合金。除了通常是氧化铝的增强材料之外，金属基体还包括硬化剂，其是至少一种铝的金属间化合物和至少一种选自铁，镍，钛，锆，钴和铌的第二金属。金属间化合物可以在形成复合材料期间作为粉末加入到金属基质中，或者可以通过在复合制备过程中将至少一种第二金属作为粉末添加到熔融金属基质中而在复合材料中形成。当在复合材料中产生金属间化合物时，在添加步骤期间，应该保护第二金属粉末免于氧化。如果在复合材料中产生金属间化合物，则最初制成的复合材料可以容易地加工，并且通过反复加热循环自身硬化。该复合材料可用于制动器部件，例如制动转子和制动鼓，作为常用灰铸铁的替代品，并具有足够的强度和压缩性能，直至至少约450℃的工作温度。

26. 发明申请

US20030170505A1 High-temperature strength member 失效
标题翻译：高温强度件
公开(公告)号：US20030170505A1
公开(公告)日：2003-09-11
申请号：US10279917
申请日：2002-10-25
申请人： Tocalo Co., Ltd.
发明人： Masakazu Okazaki , Yoshio Harada , Tatsuo Suidzu
IPC分类号： B32B015/00
CPC分类号： C23C28/321 , C23C4/02 , C23C4/04 , C23C4/073 , C23C14/16 , C23C28/3215 , C23C28/3455 , C23C30/00 , Y02T50/67 , Y10T428/12611 , Y10T428/12736 , Y10T428/12771 , Y10T428/12806 , Y10T428/12931 , Y10T428/12937 , Y10T428/12944 , Y10T428/12993
摘要： A high-temperature strength member comprises a substrate of Ni-based single crystal alloy or a Ni-based unidirectional solidified alloy and a coating of a B-containing alloy having a specified B content formed on the surface thereof by a spraying process or a vapor deposition process.
摘要翻译：高温强度构件包括Ni基单晶合金的基板或Ni基单向凝固合金以及通过喷涂方法或蒸气在其表面上形成的具有特定B含量的含B合金的涂层沉积工艺。

27. 发明申请

US20030170487A1 Exterior component for portable timepiece and portable timepiece 审中-公开
标题翻译：便携式钟表和便携式钟表的外部组件
公开(公告)号：US20030170487A1
公开(公告)日：2003-09-11
申请号：US10385184
申请日：2003-03-10
发明人： Shigeru Miyama
IPC分类号： B32B015/00
CPC分类号： B32B15/012 , B32B15/017 , C23C8/02 , C23C26/00 , G04B37/22 , Y10T428/12743 , Y10T428/12806 , Y10T428/12979
摘要： An exterior component for a portable timepiece having decorativeness and corrosion resistance and the portable timepiece are to be provided. In a double-layer clad material, the inside of a timepiece case is made of a titanium material and the outside is made of a pure aluminum material. In the pure aluminum material, alumite treatment is carried out from a surface to a given depth. A step portion is provided in the upper portion of the timepiece case, a glass fixing packing is fitted in the step portion, and glass is press-fitted here. A backside cover is fixed to an upper face of a movement. The movement with the backside cover is arranged so that a step portion for a face provided in the timepiece case is in contact with a part of the face. The backside cover is screwed into the timepiece case until the backside cover is in contact with a contact face of backside cover of the timepiece case, to be fixed to the timepiece case. A crown is partially inserted in a through hole provided in the timepiece case, and the backside cover is engaged with the movement arranged in the timepiece case.
摘要翻译：提供具有装饰性和耐腐蚀性的便携式钟表的外部部件和便携式钟表。在双层包覆材料中，钟表壳体的内部由钛材料制成，外部由纯铝材料制成。在纯铝材料中，从表面到给定深度进行耐氧化铝处理。在钟表壳体的上部设有台阶部，玻璃固定用垫片装配在台阶部，玻璃被压配于此。后盖被固定在运动的上表面。具有后盖的运动被布置成使得设置在钟表壳体中的面的台阶部分与面部的一部分接触。后盖被拧入钟表外壳中，直到后盖与手表外壳的后盖的接触面接触，固定在钟表外壳上。冠部部分地插入设置在钟表壳体中的通孔中，并且后盖与配置在钟表壳体中的移动体接合。

28. 发明申请

US20030170482A1 Optical film, polarizing plate and display device utilizing the film, and production method of optical film 审中-公开
标题翻译：光学膜，偏光板和利用该膜的显示装置，以及光学膜的制造方法
公开(公告)号：US20030170482A1
公开(公告)日：2003-09-11
申请号：US10371119
申请日：2003-02-21
发明人： Takashi Murakami
IPC分类号： B29D007/00 , B32B015/00
CPC分类号： B29C41/26 , B29D7/01 , B29K2001/00 , B29K2001/12 , Y10T428/1041 , Y10T428/12493
摘要： An optical film obtained by a process comprising the steps of: (a) casting a dope comprising a cellulose ester and a non-chlorinated solvent on a metal support, the cellulose ester having a total acyl substitution degree of 2.6 to 2.85 and having a ratio of a weight-average molecular weight to a number-average molecular weight of 1:1 to 3:1; (b) drying the cast dope on the metal support so as to obtain a cellulose ester film; (c) pealing the cellulose ester film from the metal support; (d) further drying the cellulose ester film while providing a longitudinal stretch or a lateral stretch to the cellulose ester film; and (e) providing a metal oxide layer on the cellulose ester film.
摘要翻译：一种通过包括以下步骤的方法获得的光学膜：（a）将包含纤维素酯和非氯化溶剂的涂料浇铸在金属载体上，所述纤维素酯的总酰基取代度为2.6至2.85，并且具有比例重均分子量为1：1至3：1的数均分子量; （b）在金属载体上干燥浇注液，得到纤维素酯膜; （c）从金属载体剥离纤维素酯膜; （d）进一步干燥纤维素酯膜，同时向纤维素酯膜提供纵向拉伸或横向拉伸; 和（e）在纤维素酯膜上提供金属氧化物层。

29. 发明申请

US20030138656A1 Method of forming a reactive material and article formed thereby 有权
标题翻译：形成反应性材料的方法和由此形成的制品
公开(公告)号：US20030138656A1
公开(公告)日：2003-07-24
申请号：US10338351
申请日：2003-01-07
发明人： Douglas Ray Sparks
IPC分类号： B32B015/00
CPC分类号： B81C1/00285 , B32B9/00 , Y10T428/12493 , Y10T428/12806 , Y10T428/12847 , Y10T428/12889 , Y10T428/12993
摘要： A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that the second layer protects the first layer from a surrounding atmosphere. For example, the first and second layers may be deposited to form a film on a surface within a chamber that is desired to be maintained in a vacuum during use of the article. The second layer is sufficiently thin such that appropriately heating the first and second layers causes the reactive material of the first layer to become interdiffused with the nonreactive material of the second layer, to the extent that at least a portion of the reactive material is able to react and getter gases from the surrounding atmosphere.
摘要翻译：一种防止反应性物质的污染，氧化和气体吸收的方法以及由此形成的制品。该方法通常需要沉积反应性材料的第一层和基本上非反应性材料的第二层，使得第二层保护第一层免受周围环境的影响。例如，可以将第一层和第二层沉积成在室内的表面上形成薄膜，期望在制品的使用期间保持在真空中。第二层足够薄，使得适当加热第一层和第二层导致第一层的反应性材料与第二层的非反应性材料相互扩散，至少一部分反应性材料能够反应和吸收来自周围大气的气体。

30. 发明申请

US20030113576A1 Electroless plating bath composition and method of using 失效
标题翻译：化学镀浴组成及使用方法
公开(公告)号：US20030113576A1
公开(公告)日：2003-06-19
申请号：US10025033
申请日：2001-12-19
申请人： Intel Corporation
发明人： Ramanan V. Chebiam , Valery M. Dubin
IPC分类号： B32B015/00 , C23C018/34 , C23C018/40 , C23C018/52
CPC分类号： C23C18/50 , C23C18/34 , C23C18/40 , C23C18/44 , C23C18/48 , C23C18/52 , Y10T428/12861 , Y10T428/12875 , Y10T428/12889 , Y10T428/12896 , Y10T428/12903 , Y10T428/1291 , Y10T428/12944
摘要： The present invention relates to a cobalt electroless plating bath composition and method of using it for microelectronic device fabrication. In one embodiment, the present invention relates to cobalt electroless plating in the fabrication of interconnect structures in semiconductor devices.
摘要翻译：本发明涉及一种钴化学镀浴组合物及其用于微电子器件制造的方法。在一个实施例中，本发明涉及在半导体器件中的互连结构的制造中的钴无电解电镀。

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