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21. 发明授权

US08324593B2 Method and apparatus for a porous metal electrospray emitter 有权
标题翻译：多孔金属电喷雾发射器的方法和装置
公开(公告)号：US08324593B2
公开(公告)日：2012-12-04
申请号：US12990923
申请日：2009-05-06
申请人： Paulo Lozano , Robert Scott Legge, Jr.
发明人： Paulo Lozano , Robert Scott Legge, Jr.
IPC分类号： B05B5/00 , B05B5/03 , H01J49/00 , H01J27/26
CPC分类号： C25F3/02 , F03H1/0012 , H01J9/025 , H01J27/26 , Y10T29/494
摘要： An ionic liquid ion source can include a microfabricated body including a base and a tip. The microfabricated body can be formed of a porous metal compatible (e.g., does not react or result in electrochemical decaying or corrosion) with an ionic liquid or a room-temperature molten salt. The microfabricated body can have a pore size gradient that decreases from the base of the body to the tip of the body, so that the ionic liquid can be transported through capillarity from the base to the tip.
摘要翻译：离子液体离子源可以包括包含基底和尖端的微加工体。微制造体可以由与离子液体或室温熔融盐相容的多孔金属（例如，不反应或导致电化学腐蚀或腐蚀）形成。微加工体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体可以通过从基部到尖端的毛细作用传输。

22. 发明申请

US20120241640A1 ION SOURCES, SYSTEMS AND METHODS 有权
标题翻译：离子源，系统和方法
公开(公告)号：US20120241640A1
公开(公告)日：2012-09-27
申请号：US12999731
申请日：2008-06-20
申请人： Billy W. Ward , Colin A. Sanford , John Notte, VI , Alexander Groholski , Mark D. DiManna
发明人： Billy W. Ward , Colin A. Sanford , John Notte, VI , Alexander Groholski , Mark D. DiManna
IPC分类号： H01J27/02 , H01J3/26 , G21K5/04
CPC分类号： H01J27/26 , F25D19/006 , H01J37/067 , H01J37/08 , H01J37/265 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/061 , H01J2237/0805 , H01J2237/0807 , H01J2237/244 , H01J2237/2487 , H01J2237/2826
摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).
摘要翻译：公开了离子源，系统和方法。在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。这可以提高性能（例如，增加可靠性，稳定性等）。

23. 发明申请

US20120126684A1 LIQUID METAL ION GUN 失效
标题翻译：液体金属离子枪
公开(公告)号：US20120126684A1
公开(公告)日：2012-05-24
申请号：US13375147
申请日：2010-05-14
申请人： Hiroyasu Kaga , Kanehiro Nagao , Motohide Ukiana
发明人： Hiroyasu Kaga , Kanehiro Nagao , Motohide Ukiana
IPC分类号： H01J27/02
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/061 , H01J2237/0805 , H01J2237/31749
摘要： A liquid metal ion gun 3 includes a liquid metal ion source 31 and a beam limiting aperture 33. The liquid metal ion source 31 includes a reservoir 36 and an emitter 35. The reservoir 36 is made of tungsten (W) and holds liquid metal gallium (Ga). The emitter 35 is made of W. The beam limiting aperture 33 is formed with a liquid metal member 44 made of Ga placed on a base 46 made of W, has an opening 41 that enables an ion beam 2 extracted from the liquid metal ion source 31 to pass therethrough, and limits the diameter of the ion beam 2. The beam limiting aperture 33 has a groove structure 45 that causes the liquid metal 44 to gather into a region located around the opening 41. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.
摘要翻译：液体金属离子枪3包括液体金属离子源31和束限制孔33.液体金属离子源31包括储存器36和发射器35.储存器36由钨（W）制成并保持液态金属镓（Ga）。发射器35由W制成。限流孔33由放置在由W制成的基座46上的由Ga制成的液态金属构件44形成，具有能够从液态金属离子源中提取离子束2的开口41 31限制了离子束2的直径。光束限制孔33具有凹槽结构45，其使液体金属44聚集到位于开口41周围的区域中。光束限制孔径的寿命并且可以长时间保持稳定的发射并且可再现地恢复到稳定状态。

24. 发明授权

US08101922B2 Modular gas ion source 有权
标题翻译：模块化气体离子源
公开(公告)号：US08101922B2
公开(公告)日：2012-01-24
申请号：US12167734
申请日：2008-07-03
申请人： Dieter Winkler , Thomas Jasinski , Udo Weigel
发明人： Dieter Winkler , Thomas Jasinski , Udo Weigel
IPC分类号： H01T23/00
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/006 , H01J2237/03 , H01J2237/0807
摘要： A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.
摘要翻译：描述了气体场离子源。气体离子源包括发射器模块。发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件，供电模块的可连接气体供应连接组件。发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

25. 发明授权

US08044370B2 Gas ion source with high mechanical stability 有权
标题翻译：气体离子源具有较高的机械稳定性
公开(公告)号：US08044370B2
公开(公告)日：2011-10-25
申请号：US12199574
申请日：2008-08-27
申请人： Dieter Winkler , Thomas Jasinski
发明人： Dieter Winkler , Thomas Jasinski
IPC分类号： H01T23/00
CPC分类号： F25D19/006 , F25B2500/13 , H01J27/26 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807 , Y10T29/49826
摘要： A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.
摘要翻译：对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递单元。

26. 发明授权

US08030621B2 Focused ion beam field source 有权
标题翻译：聚焦离子束场源
公开(公告)号：US08030621B2
公开(公告)日：2011-10-04
申请号：US12251917
申请日：2008-10-15
申请人： Paulo Lozano , Manuel Martinez-Sanchez
发明人： Paulo Lozano , Manuel Martinez-Sanchez
IPC分类号： H01T23/00
CPC分类号： H01J3/04 , H01J27/26 , H01J37/08 , H01J2237/0048 , H01J2237/08 , H01J2237/0815 , H01J2237/0822 , H01J2237/31749
摘要： An apparatus for producing ions can include an emitter having a first end and a second end. The emitter can be coated with an ionic liquid room-temperature molten salt. The apparatus can also include a power supply and a first electrode disposed downstream relative to the first end of the emitter and electrically connected to a first lead of the power supply. The apparatus can also include a second electrode disposed downstream relative to the second end of the emitter and electrically connected to a second lead of the power supply.
摘要翻译：用于产生离子的装置可以包括具有第一端和第二端的发射体。发射体可以用离子液体室温熔融盐涂覆。该装置还可以包括电源和设置在发射器的第一端的下游并电连接到电源的第一引线的第一电极。该装置还可以包括设置在发射器的第二端的下游并电连接到电源的第二引线的第二电极。

27. 发明申请

US20110012024A1 Method for Preparing Ion Source From Nanoparticles 有权
标题翻译：从纳米颗粒制备离子源的方法
公开(公告)号：US20110012024A1
公开(公告)日：2011-01-20
申请号：US12560451
申请日：2009-09-16
申请人： Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
发明人： Gou-Chung Chi , Ping-Jung Huang , Chung-Wei Chen , Ching-Jen Pan , Yu-Lun Liu , Fu-Chun Tsao
IPC分类号： H01J27/02
CPC分类号： H01J27/26 , H01J37/08 , H01J37/3171
摘要： A method for preparing an ion source from nanoparticles is provided. The method includes the steps of: providing nanoparticles, vaporizing the nanoparticles from a solid state to a gaseous state, and ionizing the gas to form the ion source. The ion source is prepared by placing solid nanoparticles in a stainless tube, heating and vaporizing the solid nanoparticles into a gaseous state, and ionizing the gas. The gas can be formed at a lower heating temperature than when solid lumps are used because solid nanoparticles have a lower melting point than solid lumps. Thus, the heating temperature is lowered, and the preparing time of the ion source is shortened. Besides, under the same temperature, an ion source prepared from nanoparticles provides higher vapor pressure and allows a higher implantation dose than when the ion source is prepared from solid lumps, thus expanding the applicability of ion implantation technology.
摘要翻译：提供了一种从纳米颗粒制备离子源的方法。该方法包括以下步骤：提供纳米颗粒，将纳米颗粒从固体状态汽化成气态，并使气体离子化形成离子源。离子源通过将固体纳米颗粒置于不锈钢管中，将固体纳米颗粒加热并汽化成气态并使气体离子化来制备。气体可以在比使用固体块时低的加热温度下形成，因为固体纳米颗粒具有比固体块更低的熔点。因此，加热温度降低，离子源的制备时间缩短。此外，在相同温度下，从纳米颗粒制备的离子源提供更高的蒸气压力，并且允许比从固体块制备离子源时更高的注入剂量，从而扩大了离子注入技术的适用性。

28. 发明授权

US07863581B2 Focused negative ion beam field source 有权
标题翻译：聚焦负离子束场源
公开(公告)号：US07863581B2
公开(公告)日：2011-01-04
申请号：US12135464
申请日：2008-06-09
申请人： Paulo Lozano , Manuel Martinez-Sanchez
发明人： Paulo Lozano , Manuel Martinez-Sanchez
IPC分类号： H01J27/00
CPC分类号： H01J37/08 , H01J27/028 , H01J27/26 , H01J2237/0048 , H01J2237/08 , H01J2237/0815 , H01J2237/0827 , H01J2237/31749
摘要： An apparatus for producing negative ions including an emitter coated with an ionic liquid room-temperature molten salt, an electrode positioned downstream relative to the emitter, a power supply that applies a voltage to the emitter with respect to the electrode. The power supply is sufficient to generate a stable high brightness beam of negative ions having minimal chromatic and spherical aberrations in the beam. An electrostatic lens and deflector is used to focus and direct the beam to a target.
摘要翻译：一种用于产生负离子的装置，包括涂覆有离子液体室温熔融盐的发射体，位于发射极下游的电极，相对于电极向发射极施加电压的电源。电源足以产生稳定的高亮度的负离子束，该束具有在光束中最小的色差和球面像差。静电透镜和偏转器用于聚焦并将光束引导到目标。

29. 发明申请

US20100060207A1 COMPACT ACCELERATOR FOR MEDICAL THERAPY 有权
标题翻译：紧急加速器用于医疗
公开(公告)号：US20100060207A1
公开(公告)日：2010-03-11
申请号：US11586378
申请日：2006-10-24
申请人： George J. Caporaso , Yu-Jiuan Chen , Steven A. Hawkins , Stephen E. Sampayan
发明人： George J. Caporaso , Yu-Jiuan Chen , Steven A. Hawkins , Stephen E. Sampayan
IPC分类号： H05H9/00 , H01J27/00
CPC分类号： H05H9/02 , H01J27/26 , H05H7/02
摘要： A compact accelerator system having an integrated particle generator-linear accelerator with a compact, small-scale construction capable of producing an energetic (˜70-250 MeV) proton beam or other nuclei and transporting the beam direction to a medical therapy patient without the need for bending magnets or other hardware often required for remote beam transport. The integrated particle generator-accelerator is actuable as a unitary body on a support structure to enable scanning of a particle beam by direction actuation of the particle generator-accelerator.
摘要翻译：一种紧凑的加速器系统，其具有集成的粒子发生器 - 线性加速器，其具有紧凑的小尺寸结构，能够产生能量（〜70-250MeV）质子束或其他核并将束方向传送到医疗治疗患者而不需要用于弯曲磁铁或远程光束传输所需的其他硬件。集成的颗粒发生器 - 加速器可以作为支撑结构上的整体进行致动，以便能够通过颗粒发生器 - 加速器的方向驱动扫描粒子束。

30. 发明申请

US20090200484A1 DUAL MODE GAS FIELD ION SOURCE 有权
标题翻译：双模气体场源
公开(公告)号：US20090200484A1
公开(公告)日：2009-08-13
申请号：US12366390
申请日：2009-02-05
申请人： Juergen FROSIEN
发明人： Juergen FROSIEN
IPC分类号： H01J3/14
CPC分类号： H01J37/08 , H01J27/26 , H01J37/241 , H01J37/243 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/0827 , H01J2237/28 , H01J2237/317
摘要： A focused ion beam device is described. The focused ion beam device includes an ion beam column including an enclosure for housing a gas field ion source emitter with an emitter area for generating ions, an electrode for extracting ions from the gas field ion source emitter, one or more gas inlets adapted to introduce a first gas and a second gas to the emitter area, an objective lens for focusing the ion beam generated from the first gas or the second gas, a voltage supply for providing a voltage between the electrode and the gas field ion source emitter, and a controller for switching between a first voltage and a second voltage of the voltage supply for generating an ion beam of ions of the first gas or an ion beam of ions of the second gas.
摘要翻译：描述了聚焦离子束装置。聚焦离子束装置包括离子束柱，其包括用于容纳具有用于产生离子的发射极区域的气体场离子源发射器的外壳，用于从气体离子源发射器提取离子的电极，适于引入离子源的一个或多个气体入口将第一气体和第二气体输送到发射器区域，用于聚焦由第一气体或第二气体产生的离子束的物镜，用于在电极和气体离子源发射器之间提供电压的电压源，以及控制器，用于在电压源的第一电压和第二电压之间切换，用于产生第一气体的离子离子束或第二气体的离子离子束。

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