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    • 27. 发明授权
    • Memory device with different memory film diameters in the same laminate level
    • 具有不同记忆膜直径的存储器件处于相同层压板级
    • US09425207B2
    • 2016-08-23
    • US14521577
    • 2014-10-23
    • Kabushiki Kaisha Toshiba
    • Naoki Yasuda
    • H01L27/115G11C16/14G11C11/56G11C8/14G11C16/04G11C29/50
    • H01L27/11582G11C8/14G11C11/5671G11C16/04G11C16/14G11C29/50016H01L27/11565
    • According to one embodiment, a non-volatile memory device includes first electrodes, at least one first semiconductor layer, a first memory film, second electrodes, at least one second semiconductor layer, and a second memory film. The first electrodes are stacked in a first direction. The one first semiconductor layer extends in the first direction through the first electrodes. The first memory film is provided between each of the first electrodes and the one first semiconductor layer. The second electrodes are stacked in the first direction and provided together with the first electrodes in a second direction orthogonal to the first direction. The one second semiconductor layer extends in the first direction through the second electrodes. The second memory film is provided between each of the second electrodes and the one second semiconductor layer. An outer diameter of the first memory film is larger than that of the second memory film.
    • 根据一个实施例,非易失性存储器件包括第一电极,至少一个第一半导体层,第一存储膜,第二电极,至少一个第二半导体层和第二存储膜。 第一电极沿第一方向堆叠。 一个第一半导体层沿第一方向延伸穿过第一电极。 第一记忆膜设置在每个第一电极和一个第一半导体层之间。 第二电极在第一方向上堆叠并且在与第一方向正交的第二方向上与第一电极一起设置。 第一半导体层沿第一方向延伸穿过第二电极。 第二记忆膜设置在每个第二电极和一个第二半导体层之间。 第一存储膜的外径大于第二存储膜的外径。