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    • 24. 发明申请
    • PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
    • 投影光学系统,曝光装置和曝光方法
    • US20160252825A1
    • 2016-09-01
    • US15151123
    • 2016-05-10
    • NIKON CORPORATION
    • Yasuhiro OMURATakaya OKADAHiroyuki NAGASAKA
    • G03F7/20
    • G03F7/70725G02B1/06G02B17/08G02B17/0892G02B21/33G03F7/702G03F7/70225G03F7/70341
    • An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y˜axis) from an optical axis (AX).
    • 具有例如反射折射和离轴结构的浸没投影光学系统减少了充满液体(浸没液体)的图像空间的部分。投影光学系统将第一平面的缩小图像投影到 通过液体的第二平面包括最靠近第二平面布置的折射光学元件(Lp)。 折射光学元件包括成形为在第二平面上相对于彼此垂直的两个轴向(XY轴)大致对称的发光表面(Lpb)。 发光表面具有与对应于折射光学元件的光入射表面(Lpa)的圆周的圆(40)的中心轴线(40a)基本重合的中心轴线(Lpba)。 发光面的中心轴线从光轴(AX)的两个轴向(Y轴)的一方偏心。
    • 26. 发明授权
    • Dispersing immersion liquid for high resolution imaging and lithography
    • 分散浸没液体用于高分辨率成像和光刻
    • US09366851B2
    • 2016-06-14
    • US13623239
    • 2012-09-20
    • GE HEALTHCARE BIO-SCIENCES CORP.
    • William M. DoughertyPaul C. GoodwinSteven A. ReeseDavid A. Stewart
    • G02B21/33G03F7/20
    • G02B21/33G02B21/002G02B21/02G03F7/70341
    • Methods and apparatus are described for delivering index-matching immersion liquid in high numerical-aperture optical microscopy and lithography. An array of immersion liquid droplets is delivered to a specimen substrate or specimen substrate cover by an immersion liquid printing apparatus. An immersion liquid reservoir provides immersion liquid to the printer by a precision pump. The printer delivers immersion liquid to the substrate or substrate cover in arrays of immersion liquid droplets of defined volumes and array patterns. The volumes and patterns of array droplets delivered to the substrate or substrate cover are optimized to maintain adequate immersion liquid between the substrate or substrate cover and an immersion objective while avoiding the formation of air bubbles in the immersion liquid and the accumulation of excess volumes of immersion liquid.
    • 描述了用于在高数值孔径光学显微镜和光刻中输送折射率匹配浸液的方法和装置。 浸没液体液滴的阵列通过浸没液体印刷装置输送到样品基片或样品基片盖。 浸没液体储存器通过精密泵向打印机提供浸液。 打印机将浸没液体以定义的体积和阵列图案的浸没液滴的阵列传送到基底或基底盖。 优化输送到衬底或衬底盖的阵列液滴的体积和图案,以在衬底或衬底盖和浸没物体之间保持足够的浸没液体,同时避免在浸液中形成气泡和积累过量的浸液 液体。