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    • 22. 发明授权
    • Immersion microscope objective and microscope using the same
    • 浸液显微镜物镜和显微镜使用相同
    • US09323036B2
    • 2016-04-26
    • US13845041
    • 2013-03-17
    • OLYMPUS CORPORATION
    • Takashi Kasahara
    • G02B21/02G02B21/06G02B21/33G02B27/00G01N21/64
    • G02B21/02G01N21/6458G01N21/648G02B21/06G02B21/33G02B27/0068
    • A microscope objective comprises in order from an object side, a first lens group, a second lens group, and a third lens group. The first lens group includes a first cemented lens, and at least one positive single lens, the second lens group includes a second cemented lens, and the third lens group includes a first lens component and a second lens component. A positive lens and a meniscus lens are cemented in the first cemented lens. A surface nearest to an image side of the first lens component is a concave surface, and a surface nearest to the object side of the second lens component is a concave surface. The first lens component and the second lens component are disposed such that the both concave surfaces are face-to-face, and the following conditional expression (1) is satisfied. 0.5
    • 显微镜物镜从物体侧依次包括第一透镜组,第二透镜组和第三透镜组。 第一透镜组包括第一胶合透镜和至少一个正单透镜,第二透镜组包括第二胶合透镜,并且第三透镜组包括第一透镜部件和第二透镜部件。 在第一胶合透镜中胶合正透镜和弯月透镜。 最靠近第一透镜部件的像侧的表面是凹面,并且最靠近第二透镜部件的物体侧的表面是凹面。 第一透镜部件和第二透镜部件被布置成使得两个凹面是面对面的,并且满足以下条件表达式(1)。 0.5 <(n0 / n1o)/ NAob <0.65(1)
    • 23. 发明授权
    • Observed portion fixing apparatus and microscope
    • 观察部分定影装置和显微镜
    • US09291546B2
    • 2016-03-22
    • US13893084
    • 2013-05-13
    • OLYMPUS CORPORATION
    • Eiji Nakasho
    • G02B21/26G01N21/01G02B21/33
    • G01N21/01G02B21/33
    • An immersion liquid retainer is an immersion liquid retainer used for an observation made with a microscope including an immersion objective. The immersion liquid retainer includes a fixing part in which a first penetration hole for viewing an observed portion of a specimen is formed and which is fixed to the specimen, and an immersion liquid retaining part where a concave part that has a bottom surface configured with a transparent flat plate and is intended to retain an immersion liquid is formed. The immersion liquid retaining part is joined to the fixing part or formed integrally with the fixing part so that the transparent flat plate covers the first penetration hole.
    • 浸没液体保持器是用于使用具有浸没物镜的显微镜进行的观察的浸液保持器。 浸渍液保持器包括:固定部,在该固定部中形成有用于观察被检体的观察部的第一贯通孔,并固定在试样上;浸渍液保持部,其中,具有底面的凹部 透明平板,旨在保持形成浸液。 浸渍液保持部与固定部接合或与固定部一体形成,透明平板覆盖第一贯通孔。
    • 26. 发明申请
    • IMMERSION MICROSCOPE OBJECTIVE AND MICROSCOPE USING THE SAME
    • 使用相同的显微镜目标和显微镜
    • US20150146304A1
    • 2015-05-28
    • US14504112
    • 2014-10-01
    • OLYMPUS CORPORATION
    • Yasuhiro YAMAWAKI
    • G02B21/33G02B21/00G02B21/02
    • G02B21/33G02B21/0076G02B21/02G02B21/32G02B27/0068
    • An immersion microscope objective includes, a first lens group having a positive refractive power, a second lens group having a positive refractive power, and a third lens group having a negative refractive power, wherein the first lens group includes a first lens surface and a second lens surface, the first lens surface is positioned nearest to the object side and the second lens surface is positioned on an image side of the first lens surface and nearest to the first lens surface, and the following conditional expression (1) is satisfied: −3≦(rG12/f)×(NAob/ndimm)2−1.7  (1) where rG12 denotes a radius of curvature at the second lens surface, f denotes a focal length of an entire system of the immersion microscope objective, NAob denotes an object-side numerical aperture of the immersion microscope objective, and ndimm denotes a refractive index of an immersion liquid for a d-line.
    • 浸没式显微镜物镜包括具有正折光力的第一透镜组,具有正折光力的第二透镜组和具有负屈光力的第三透镜组,其中第一透镜组包括第一透镜表面和第二透镜组 第一透镜表面最靠近物体侧定位,第二透镜表面位于第一透镜表面的最靠近第一透镜表面的像侧,并满足以下条件表达式(1): - 3&nlE;(rG12 / f)×(NAob / ndimm)2-1.7(1)其中rG12表示第二透镜表面的曲率半径,f表示浸没显微镜物镜的整个系统的焦距,NAob表示 浸渍显微镜物镜的物体侧数值孔径,ndimm表示d线浸渍液体的折射率。
    • 27. 发明授权
    • Projection optical system, exposure apparatus, and exposure method
    • 投影光学系统,曝光装置和曝光方法
    • US08854601B2
    • 2014-10-07
    • US13229589
    • 2011-09-09
    • Yasuhiro OmuraTakaya OkadaHiroyuki Nagasaka
    • Yasuhiro OmuraTakaya OkadaHiroyuki Nagasaka
    • G03B27/42G03F7/20G02B17/08G02B1/06G02B21/33
    • G03F7/70725G02B1/06G02B17/08G02B17/0892G02B21/33G03F7/702G03F7/70225G03F7/70341
    • An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion liquid). The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY-axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y-axis) from an optical axis (AX).
    • 具有例如反射折射和离轴结构的浸没投影光学系统减少了填充有液体(浸没液体)的图像空间的部分。 通过液体将第一平面的缩小图像投影到第二平面上的投影光学系统包括最靠近第二平面布置的折射光学元件(Lp)。 折射光学元件包括成形为在第二平面上相对于彼此垂直的两个轴向(XY轴)基本对称的发光表面(Lpb)。 发光表面具有与对应于折射光学元件的光入射表面(Lpa)的圆周的圆(40)的中心轴线(40a)基本重合的中心轴线(Lpba)。 发光面的中心轴线从光轴(AX)的两个轴向(Y轴)的一方偏心。
    • 29. 发明授权
    • Observing device and method
    • 观察装置和方法
    • US08582202B2
    • 2013-11-12
    • US12665588
    • 2008-06-13
    • Hirotoshi TeradaHiroshi Tanabe
    • Hirotoshi TeradaHiroshi Tanabe
    • G02B21/00
    • G02B21/0016G01N21/9501G02B7/022G02B21/248G02B21/33
    • When it is detected that a solid immersion lens comes into contact with the semiconductor device, the lens is caused to vibrate by a vibration generator unit. Next, a reflected light image from the lens is input to calculate a reflected light quantity of the reflected light image, and it is judged whether a ratio of the reflected light quantity to an incident light quantity is not greater than a threshold value. When the ratio is greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is not achieved, and the lens is again caused to vibrate. When the ratio is not greater than the threshold value, it is judged that optical close contact between the lens and the semiconductor device is achieved, and an observed image of the semiconductor device is acquired.
    • 当检测到固体浸没透镜与半导体器件接触时,透镜被振动发生器单元振动。 接下来,输入来自透镜的反射光图像以计算反射光图像的反射光量,并且判断反射光量与入射光量的比率是否不大于阈值。 当比率大于阈值时,判断透镜和半导体器件之间的光学紧密接触没有实现,并且再次使透镜振动。 当比率不大于阈值时,判断透镜和半导体器件之间的光学紧密接触是实现的,并且获得了半导体器件的观察图像。