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    • 29. 发明授权
    • Substrate transport assembly for rapid thermal processing system
    • 用于快速热处理系统的基板运输组件
    • US06236021B1
    • 2001-05-22
    • US09344314
    • 1999-06-24
    • James E. FairFritz B. Harris
    • James E. FairFritz B. Harris
    • C03B524
    • C03B35/163C03B29/08C03B35/16F26B3/30F26B13/008F26B15/10F27B9/024F27D19/00F27D21/0014F27D99/0006F27D2099/0008G01K13/06
    • A rapid thermal processing system for large area substrates, such as glass panels for flat panel displays, includes a processing chamber having a loading/unloading zone and a processing zone, a heating assembly for heating a substrate in the processing zone, and a transport assembly for transporting the substrate through the processing chamber. The transport assembly includes a feed conveyor for transporting the substrate from the loading/unloading zone through the processing zone and a substrate return assembly for transporting the substrate from the feed conveyor to the loading/unloading zone after the substrate is transported through the processing zone. The substrate return assembly may include a return conveyor for transporting the substrate to the loading/unloading zone and a substrate reverser for transferring the substrate from the feed conveyor to the return conveyor.
    • 用于大面积基板的快速热处理系统,例如用于平板显示器的玻璃面板,包括具有加载/卸载区域和处理区域的处理室,用于加热处理区域中的基板的加热组件和传送组件 用于将衬底输送通过处理室。 运输组件包括用于从装载/卸载区域通过处理区域运送基材的进料输送机和用于在将基材输送通过处理区域之后将基材从进料输送器输送到加载/卸载区域的基板返回组件。 基板返回组件可以包括用于将基板输送到装载/卸载区域的返回输送器和用于将基板从进给输送器传送到返回输送器的基板反向器。
    • 30. 发明授权
    • Modular heat exchange apparatus
    • 模块化热交换装置
    • US4260371A
    • 1981-04-07
    • US59230
    • 1979-07-20
    • Joseph M. O'ffill
    • Joseph M. O'ffill
    • F27B9/00F27B9/02F27B9/10F27D7/04F27D13/00F27D15/02
    • F27B9/029F27B9/00F27B9/024F27B9/10F27D2007/045Y10S198/952
    • Modular, conveyor-type heat exchange apparatus is provided which is especially adapted for handling large volumes of shale rock and preheating incoming raw shale using hot, spent shale from a commercial processing operation. The apparatus includes an elongated heat exchange zone having a plurality of separate, interconnected, insulated modules; two superposed, oppositely moving sections of an endless conveyor pass through the zone and respectively support hot and raw shale material for heat exchange therebetween. The conveyor includes spaced, interconnected, shale-supporting triangular elements which facilitate gas flow between the conveyor sections in the heat exchange zone. In preferred forms, the modules present restricted inlet and outlet throats, and are provided with slow moving fans for circulation of air currents between the conveyor sections without creation of chimney-like drafts along the length of the modules.
    • 提供了模块化的传送式热交换装置,其特别适用于处理大量的页岩岩石,并且使用来自商业加工操作的热的,废页岩来预热进入的原始页岩。 该装置包括具有多个分离的互连绝缘模块的细长热交换区; 环形输送机的两个叠置的,相对移动的部分穿过该区域并且分别支撑热和原始页岩材料以在它们之间进行热交换。 输送机包括间隔开的互连的页岩支撑三角形元件,其促进气体在热交换区域中的输送段之间流动。 在优选形式中,模块呈现受限制的入口和出口喉部,并且设置有缓慢移动的风扇,用于在输送段之间循环气流,而不沿着模块的长度形成烟囱式通风。