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21. 发明申请

US20110223354A1 HIGH PRESSURE PRE-OXIDATION FOR DEPOSITION OF THERMAL BARRIER COATING 审中-公开
标题翻译：用于沉积热障涂层的高压预氧化
公开(公告)号：US20110223354A1
公开(公告)日：2011-09-15
申请号：US12723427
申请日：2010-03-12
申请人： Peter F. Gero , Kevin W. Schlichting , James W. Neal
发明人： Peter F. Gero , Kevin W. Schlichting , James W. Neal
IPC分类号： C23C16/46
CPC分类号： C23C14/02 , C23C14/541
摘要： An apparatus for coating a work piece includes a process chamber, a coating material supply apparatus located at least partially within the process chamber for delivering a coating material to the work piece, a pre-heater assembly adjoining the process chamber, and a support for holding the work piece. The pre-heater assembly includes a housing that opens to the process chamber, a susceptor comprising a ceramic material positioned at least partially within the housing, and a pre-heater electron gun configured to configured to direct an electron beam at the susceptor such that the susceptor radiates heat toward the work piece. The support is movable to selectively move the work piece between a first position within the housing of the pre-heater assembly and a second position within the process chamber and outside the housing of the pre-heater assembly.
摘要翻译：一种用于涂覆工件的设备包括处理室，至少部分地位于处理室内的用于将涂料输送到工件的涂料供给装置，邻接处理室的预热器组件和用于保持工件。预热器组件包括通向处理室的壳体，包括至少部分地定位在壳体内的陶瓷材料的基座以及被配置为在基座处引导电子束的预加热器电子枪，使得感受器向工件辐射热量。支撑件可移动以选择性地将工件移动到预热器组件的壳体内的第一位置和处理室内的第二位置和预热器组件的壳体外部。

22. 发明申请

US20110189390A1 PHYSICAL VAPOR DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION METHOD 有权
标题翻译：物理蒸气沉积装置和物理蒸气沉积方法
公开(公告)号：US20110189390A1
公开(公告)日：2011-08-04
申请号：US13056385
申请日：2008-07-28
申请人： Atsushi Yumoto , Naotake Niwa , Fujio Hiroki , Takahisa Yamamoto
发明人： Atsushi Yumoto , Naotake Niwa , Fujio Hiroki , Takahisa Yamamoto
IPC分类号： B05D1/12
CPC分类号： C23C14/228 , C23C14/02 , C23C14/0688 , C23C14/22 , C23C24/04
摘要： A physical vapor deposition apparatus and a physical vapor deposition method for forming a film of a substance which is hard to be made fine particles even when it is heated by plasma, arc discharge, or the like are provided. It has an evaporation chamber 10 provided inside it with an evaporation source material 15 and a heating part 16 for heating the evaporation source material 15, a powder supply source 20 provided inside it with a powder, and a film forming chamber 30, wherein the evaporation source material 15 is heated by the heating part 16 to produce fine particles (nanoparticles), the fine particles and powder are sprayed out of a supersonic nozzle 35, are placed on a supersonic gas stream, and are deposited on a substrate for film formation 33 by physical vapor deposition.
摘要翻译：提供了用于形成即使通过等离子体，电弧放电等加热也难以制成微粒的物质的膜的物理气相沉积装置和物理气相沉积方法。在其内部设置有蒸发源材料15和用于加热蒸发源材料15的加热部分16，在其内部设置有粉末的粉末供应源20和成膜室30，其中蒸发源源材料15被加热部分16加热以产生细颗粒（纳米颗粒），将细颗粒和粉末从超音速喷嘴35喷出，放置在超音速气流上，并沉积在用于成膜的基板33上通过物理气相沉积。

23. 发明申请

US20110168546A1 MATERIAL OF ELECTRODE FOR ELECTROLYSIS, ELECTRODE FOR ELECTROLYSIS AND MANUFACTURING METHOD OF THE ELECTRODE 审中-公开
标题翻译：用于电解电极的电极，电极的电极和制造方法
公开(公告)号：US20110168546A1
公开(公告)日：2011-07-14
申请号：US12989280
申请日：2010-03-08
申请人： Masaaki Nemoto
发明人： Masaaki Nemoto
IPC分类号： C25B11/04 , C23C14/14
CPC分类号： C25B11/0494 , C23C14/02 , C23C14/165 , C25B1/13
摘要： There are disclosed a material of an electrode for electrolysis which can highly efficiently generate an ozone water by the electrolysis of water, an electrode for electrolysis, and a manufacturing method of the electrode for electrolysis. The material of the electrode for electrolysis which is an alloy comprising platinum and silver and having a concentration of silver from 1 wt % or more to 50 wt % or less is used as a surface layer formed on the surface of a base member, whereby in the electrolysis by the electrode for electrolysis, active oxygen species such as ozone and OH radicals can efficiently be generated with a low current density.
摘要翻译：公开了电解电极的材料，其可以通过电解水，电解电极和电解电极的制造方法高效地产生臭氧水。作为形成在基材表面上的表面层，使用作为包含铂和银并且具有1重量％以上至50重量％以下的银浓度的电解用电极的材料，通过电解电极进行电解，可以以低电流密度有效地产生臭氧和OH自由基等活性氧。

24. 发明申请

US20110117738A1 METHOD TO ALTER SILICIDE PROPERTIES USING GCIB TREATMENT 有权
标题翻译：使用GCIB处理改善硅胶性能的方法
公开(公告)号：US20110117738A1
公开(公告)日：2011-05-19
申请号：US12873573
申请日：2010-09-01
申请人： Noel Russell , John J. Hautala , John Gumpher
发明人： Noel Russell , John J. Hautala , John Gumpher
IPC分类号： H01L21/3205
CPC分类号： H01L21/28506 , C23C14/02 , C23C14/024 , C23C14/16 , C23C14/5833 , H01J37/08 , H01J37/317 , H01J2237/0812 , H01J2237/3165 , H01L21/02063 , H01L21/28518 , H01L21/3205
摘要： A method of manufacturing a semiconductor device is described. The method comprises performing a gas cluster ion beam (GCIB) pre-treatment and/or post-treatment of at least a portion of a silicon-containing substrate during formation of a silicide region.
摘要翻译：对半导体装置的制造方法进行说明。该方法包括在形成硅化物区域期间对含硅衬底的至少一部分进行气体簇离子束（GCIB）的预处理和/或后处理。

25. 发明授权

US07799399B2 High barrier laminate and process 有权
标题翻译：高阻隔层压板和工艺
公开(公告)号：US07799399B2
公开(公告)日：2010-09-21
申请号：US11651103
申请日：2007-01-09
申请人： Steven Sargeant , Gianfranco Chicarella , John Medeiros , Joseph Anthony Bourgeault , Todd Richard Sarnstrom , Paul Andrew Ansolabehere , Todd Fayne
发明人： Steven Sargeant , Gianfranco Chicarella , John Medeiros , Joseph Anthony Bourgeault , Todd Richard Sarnstrom , Paul Andrew Ansolabehere , Todd Fayne
IPC分类号： B32B15/08 , B32B15/09 , B32B27/08 , B32B27/32 , B32B27/36
CPC分类号： B05D5/067 , B05D1/265 , B05D3/144 , B05D2201/00 , B05D2252/00 , B32B15/08 , B32B27/36 , C23C14/02 , C23C14/20 , Y10T428/1352 , Y10T428/1355 , Y10T428/1359 , Y10T428/1379 , Y10T428/1383 , Y10T428/24802 , Y10T428/24843 , Y10T428/24917 , Y10T428/24942 , Y10T428/28 , Y10T428/2817 , Y10T428/2826 , Y10T428/2878 , Y10T428/31678 , Y10T428/31681 , Y10T428/31786 , Y10T428/31797 , Y10T428/31938
摘要： A process for fabricating a high barrier lamination suitable for the construction of lighter than air materials including providing a thin, two layer thermoplastic film consisting of an amorphous copolyester skin and a high crystalline polyester core; plasma treating the high crystalline polyester core layer to a surface energy of about 50 to about 68 dyne; depositing a metal barrier layer to an optical density of about 2.2 to about 3.2; and extrusion coating a linear low density polyethylene sealant layer on the amorphous copolyester skin layer.
摘要翻译：一种用于制造适合于比空气材料轻的结构的高阻隔层压方法，包括提供由无定形共聚酯皮肤和高结晶聚酯芯构成的薄的双层热塑性薄膜; 等离子体处理高结晶聚酯芯层至约50至约68达因的表面能; 将金属阻挡层沉积到约2.2至约3.2的光密度; 并在无定形共聚酯表皮层上挤出涂覆线性低密度聚乙烯密封剂层。

26. 发明申请

US20100075036A1 DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING FILM BY USING DEPOSITION APPARATUS 失效
标题翻译：沉积装置和使用沉积装置制造薄膜的方法
公开(公告)号：US20100075036A1
公开(公告)日：2010-03-25
申请号：US12516328
申请日：2008-03-10
申请人： Sadayuki OKAZAKI , Kazuyoshi HONDA , Tomofumi YANAGI , Shoichi IMASHIKU
发明人： Sadayuki OKAZAKI , Kazuyoshi HONDA , Tomofumi YANAGI , Shoichi IMASHIKU
IPC分类号： C23C16/00
CPC分类号： C23C14/562 , C23C14/02 , C23C14/226 , H01M4/0421 , H01M4/1395 , H01M10/052
摘要： A vapor deposition device 100 for moving a sheet-like substrate 4 in a roll-to-roll system in a chamber 2 to continuously form a vapor deposition film on the substrate 4. The vapor deposition device 100 comprises an evaporation source 9 for evaporating a vapor-depositing material; a transportation section including first and second rolls 3 and 8 for holding the substrate 4 in the state of being wound therearound and a guide section for guiding the substrate 4; and a shielding section, located in a vapor deposition possible zone, for forming a shielded zone which is not reachable by the vapor-depositing material from the evaporation source 9. Vapor deposition zones 60a through 60d include a planar transportation zone for transporting the substrate 4 such that the surface of the substrate 4 to be subjected to the vapor-depositing material is planar; and the transportation section is located with respect to the evaporation source 9 such that the vapor-depositing material is not incident on the substrate 4 in a direction of the normal to the substrate in the vapor deposition possible zone excluding the shielded zone.
摘要翻译：一种气相沉积装置100，用于在室2中的辊对辊系统中移动片状基底4，以在基底4上连续地形成气相沉积膜。气相沉积装置100包括蒸发源9 气相沉积材料; 一个传送部分，包括用于将基片4保持在其周围的状态的第一和第二辊子3和8;以及用于引导衬底4的引导部分; 以及位于气相沉积可能区域中的屏蔽部分，用于形成从蒸发源9不能通过气相沉积材料到达的屏蔽区域。蒸镀区域60a至60d包括用于输送基板4的平面输送区域使得要经历气相沉积材料的基板4的表面是平面的; 并且运送部分相对于蒸发源9定位，使得气相沉积材料在除了屏蔽区域之外的气相沉积可能区域中不与基板的法线方向入射到基板4上。

27. 发明申请

US20080003358A1 Power loading substrates to reduce particle contamination 有权
标题翻译：功率负载基板以减少颗粒污染
公开(公告)号：US20080003358A1
公开(公告)日：2008-01-03
申请号：US11478279
申请日：2006-06-29
申请人： Dong-Kil Yim , John M. White , Soo Young Choi , Han Byoul Kim , Beom Soo Park , Jin Man Ha
发明人： Dong-Kil Yim , John M. White , Soo Young Choi , Han Byoul Kim , Beom Soo Park , Jin Man Ha
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： C23C16/4401 , C23C14/02 , C23C14/564 , C23C16/0209 , H01J2237/2001
摘要： A method for preventing particle contamination within a processing chamber is disclosed. Preheating the substrate within the processing chamber may cause a thermophoresis effect so that particles within the chamber that are not adhered to a surface may not come to rest on the substrate. One method to increase the substrate temperature is to plasma load the substrate. Plasma loading comprises providing an inert gas plasma to the substrate to heat the substrate. Another method to increase the substrate temperature is high pressure loading the substrate. High pressure loading comprises heating the substrate while increasing the chamber pressure to between about 1 Torr and about 10 Torr. By rapidly increasing the substrate temperature within the processing chamber prior to substrate processing, particle contamination is less likely to occur.
摘要翻译：公开了一种防止处理室内的颗粒污染的方法。预处理室内的衬底可能引起热泳效应，使得室内未附着于表面的颗粒可能不会停留在衬底上。增加衬底温度的一种方法是等离子体加载衬底。等离子体负载包括向衬底提供惰性气体等离子体以加热衬底。提高衬底温度的另一种方法是加载衬底的高压。高压负载包括加热衬底，同时将腔室压力提高到约1托和约10托之间。通过在基板处理之前快速增加处理室内的基板温度，不太可能发生颗粒污染。

28. 发明申请

US20060222922A1 Solid oxide fuel cell electrolyte and method 有权
标题翻译：固体氧化物燃料电池电解液及方法
公开(公告)号：US20060222922A1
公开(公告)日：2006-10-05
申请号：US11099416
申请日：2005-04-05
申请人： Kenneth Murphy
发明人： Kenneth Murphy
IPC分类号： H01M8/12 , H01M2/08 , B05D5/12
CPC分类号： H01M8/1246 , C23C14/02 , C23C14/083 , H01M8/0258 , H01M8/0271 , H01M2008/1293 , Y02E60/525 , Y02P70/56
摘要： A method of making a solid oxide fuel cell electrolyte includes preheating a substrate on which an oxide electrolyte layer is to be deposited to a substrate temperature of about 1100° C. and above, impinging a surface of a source comprising the oxide with an electron beam in an evacuated chamber at a pressure of about 10−3 or less mm of Hg devoid of process gas, such as oxygen, to evaporate the oxide in the chamber, and placing the preheated substrate in the chamber where the oxide deposits on the preheated substrate. The oxide fuel cell electrolyte is deposited having a columnar oxide microstructure.
摘要翻译：制备固体氧化物燃料电池电解质的方法包括将其上沉积有氧化物电解质层的基板预热到约1100℃及更高的基板温度，用电子束撞击包含氧化物的源的表面在真空室中，在大约10 -3 -3mm或更小mm的没有工艺气体（例如氧）的Hg的压力下蒸发室中的氧化物，并将预热的衬底放置在室中，氧化物沉积在预热的基底上。沉积具有柱状氧化物微结构的氧化物燃料电池电解质。

29. 发明申请

US20050000444A1 Method and apparatus application of metallic alloy coatings 有权
标题翻译：金属合金涂层的方法和装置应用
公开(公告)号：US20050000444A1
公开(公告)日：2005-01-06
申请号：US10489090
申请日：2002-09-10
申请人： Derek Hass , Haydn Wadley , Kumar Dharmasena , Yosef Marciano
发明人： Derek Hass , Haydn Wadley , Kumar Dharmasena , Yosef Marciano
IPC分类号： C23C14/00 , C23C14/02 , C23C14/30 , C23C14/32 , C23C14/54 , C23C28/00 , C23C16/00
CPC分类号： C23C14/228 , C23C14/0021 , C23C14/02 , C23C14/30 , C23C14/32 , C23C14/548 , C23C28/321 , C23C28/3215 , C23C28/345 , C23C28/3455
摘要： A directed vapor deposition (DVD) method and system for applying at least one bond coating on at least one substrate for thermal barrier coating systems. To overcome the limitations incurred by conventional methods, the DVD system uses an electron beam directed vapor deposition (DVD) technique to evaporate and deposit compositionally and morphologically controlled bond coats at high rate. The present DVD system uses the combination of an electron beam and a combined inert gas/reactive gas carrier jet of controlled composition to create engineering films. In this system, the vaporized material can be entrained in the carrier gas jet and deposited onto the substrate at a high rate and with high materials utilization efficiency. The velocity and flux of the gas atoms entering the chamber, the nozzle parameters, and the operating chamber pressure can all be significantly varied, facilitating wide processing condition variation and allowing for improved control over the properties of the deposited layer.
摘要翻译：一种用于在至少一个用于热障涂层系统的基底上施加至少一个粘结涂层的定向气相沉积（DVD）方法和系统。为了克服常规方法引起的限制，DVD系统使用电子束定向气相沉积（DVD）技术以高速蒸发和沉积组成和形态控制的粘合涂层。本DVD系统使用电子束和受控组合物的组合的惰性气体/反应气体载体喷射器的组合来产生工程薄膜。在该系统中，蒸发的材料可以夹带在载气流中并以高速率和高的材料利用效率沉积到基底上。进入腔室的气体原子的速度和通量，喷嘴参数和操作室压力都可以显着变化，有助于宽的加工条件变化，并允许改进对沉积层的性能的控制。

30. 发明授权

US06811656B2 Method for creating a material library 失效
标题翻译：创建材料库的方法
公开(公告)号：US06811656B2
公开(公告)日：2004-11-02
申请号：US10176431
申请日：2002-06-20
申请人： Thomas Brinz , Ilona Ullmann
发明人： Thomas Brinz , Ilona Ullmann
IPC分类号： C23C1434
CPC分类号： C23C14/04 , B01J19/0046 , C23C14/02
摘要： A method for creating a material library of surface areas having different properties in which a substrate is coated. The substrate is subjected to a combined pretreatment procedure.
摘要翻译：一种用于产生具有不同性质的表面区域的材料库的方法，其中涂覆基底。对基材进行组合预处理。

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