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21. 发明授权

US08997335B2 Method of manufacturing a magnetic head for perpendicular magnetic recording 有权
标题翻译：制造用于垂直磁记录的磁头的方法
公开(公告)号：US08997335B2
公开(公告)日：2015-04-07
申请号：US13440467
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/31 , H01L21/67 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.
摘要翻译：一种制造磁头的方法包括以下步骤：形成具有极层包围部分的极层包裹层; 以及在极层封装部中形成极层。极层包括第一层和形成在其上的第二层。形成极层的步骤包括以下步骤：通过物理气相沉积形成初始第一层; 通过干蚀刻蚀刻初始第一层的表面，使得初始第一层成为第一层; 以及在所述第一层上形成所述第二层。

22. 发明授权

US07924528B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US07924528B2
公开(公告)日：2011-04-12
申请号：US11896705
申请日：2007-09-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49046
摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.
摘要翻译：磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。在第一边缘处采取的倾斜角大于零度。第二部分在基本上垂直于介质面向表面的方向上延伸。

23. 发明授权

US07916425B2 Magnetic head having angled pole portions 有权
标题翻译：磁头具有倾斜的极部
公开(公告)号：US07916425B2
公开(公告)日：2011-03-29
申请号：US11812757
申请日：2007-06-21
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Lijie Guan , Takehiro Horinaka
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278
摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.
摘要翻译：磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

24. 发明授权

US07910011B2 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US07910011B2
公开(公告)日：2011-03-22
申请号：US12153987
申请日：2008-05-28
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an encasing layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes: the step of etching a nonmagnetic layer that will become the encasing layer later, such that an initial groove including the first portion is formed in the nonmagnetic layer; the step of forming an initial groove mask covering the first portion; and a second etching step for etching the nonmagnetic layer so as to complete the groove. When the second etching step starts, a portion of the top surface of the bottom forming layer located in a region in which the second portion is to be formed is covered with the nonmagnetic layer or the initial groove mask.
摘要翻译：磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及设置在底部形成层上并具有容纳极层的槽的封装层。凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。磁头的制造方法包括以下步骤：在非磁性层中形成包含第一部分的初始槽，从而蚀刻将成为封装层的非磁性层; 形成覆盖所述第一部分的初始槽掩模的步骤; 以及用于蚀刻非磁性层以完成凹槽的第二蚀刻步骤。当第二蚀刻步骤开始时，位于要形成第二部分的区域中的底部形成层的顶表面的一部分被非磁性层或初始凹槽掩模覆盖。

25. 发明申请

US20090277870A1 Method of manufacturing magnetic head for perpendicular magnetic recording 有权
标题翻译：用于垂直磁记录的磁头制造方法
公开(公告)号：US20090277870A1
公开(公告)日：2009-11-12
申请号：US12149987
申请日：2008-05-12
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.
摘要翻译：磁头包括极层和具有容纳极层的凹槽的封装层。磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。非磁性层由Al2O3形成。在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

26. 发明申请

US20120212855A1 MAGNETIC HEAD FOR PERPENDICULAR MAGNETIC RECORDING HAVING A POLE LAYER INCLUDING A PLURALITY OF STACKED MAGNETIC FILMS 有权
标题翻译：用于具有包括多层堆叠磁片的圆形磁层的磁性磁记录磁头
公开(公告)号：US20120212855A1
公开(公告)日：2012-08-23
申请号：US13440554
申请日：2012-04-05
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Shigeki Tanemura , Hironori Araki , Kazuo Ishizaki , Takehiro Horinaka
IPC分类号： G11B5/17 , G11B5/255
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3123 , G11B5/313 , G11B5/3163 , H01L21/67069 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/4906 , Y10T29/49066 , Y10T428/115
摘要： A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.
摘要翻译：磁头包括容纳在凹槽中的极层。极层具有轨道宽度限定部分和宽部分。极层包括堆叠的多个磁性膜。多个磁性膜中的至少一个包括包括在轨道宽度限定部分中的第一部分，包括在宽部分中的第二部分和将第一部分和第二部分彼此联接的第三部分。在通过沿着磁道宽度方向取得的磁极层的中心的横截面中，第二部分的厚度小于第一部分，并且第三部分的顶表面相对于垂直于面向介质的介质的方向倾斜表面。

27. 发明申请

US20060268456A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US20060268456A1
公开(公告)日：2006-11-30
申请号：US11138968
申请日：2005-05-27
申请人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Itoh , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3169
摘要： A pole layer incorporates: a first portion having an end face located in a medium facing surface; and a second portion having a thickness greater than that of the first portion. A surface of the first portion closer to a substrate is located farther from the substrate than a surface of the second portion closer to the substrate. A surface of the first portion farther from the substrate is located closer to the substrate than a surface of the second portion farther from the substrate. At least a portion of the pole layer is placed in an encasing groove formed in a region extending from a first encasing layer through a second encasing layer to a nonmagnetic metal layer.
摘要翻译：极层包括：具有位于介质面对表面中的端面的第一部分; 以及第二部分，其厚度大于第一部分的厚度。靠近基板的第一部分的表面比距离基板的第二部分的表面更靠近基板。距离基板更远的第一部分的表面比离开基板的第二部分的表面更靠近基板。极层的至少一部分被放置在形成在从第一包层穿过第二包装层延伸到非磁性金属层的区域中的包围槽中。

28. 发明授权

US08184398B2 Magnetic head that suppresses protrusion of medium facing surface caused by heat of coil 有权
标题翻译：磁头可抑制由线圈热引起的介质面对面的突出
公开(公告)号：US08184398B2
公开(公告)日：2012-05-22
申请号：US12314565
申请日：2008-12-12
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Kazuo Ishizaki , Shigeki Tanemura
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Horinaka , Kazuo Ishizaki , Shigeki Tanemura
IPC分类号： G11B5/127 , C25F3/02
CPC分类号： G11B5/3106 , G11B5/17 , G11B5/3136 , Y10T428/1171
摘要： A magnetic head includes a coil, a pole layer, and a coil adjacent layer. The coil includes a winding portion having two side surfaces. The coil adjacent layer is adjacent to at least part of the whole of the two side surfaces of the winding portion. The coil adjacent layer is formed of a nonmagnetic material having a linear thermal expansion coefficient of 5×10−6/° C. or smaller at a temperature of 25° C. to 100° C. and having a thermal conductivity of 40 W/m·K or higher at a temperature of 25° C.
摘要翻译：磁头包括线圈，极层和线圈相邻层。线圈包括具有两个侧表面的绕组部分。线圈相邻层与绕组部分的两个侧表面的整体的至少一部分相邻。线圈相邻层由25℃〜100℃的线性热膨胀系数为5×10 -6 /℃以下的非磁性材料形成，导热率为40W / m·K以上的温度

29. 发明授权

US08056214B2 Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields 失效
标题翻译：制造包括两个侧面屏蔽的垂直磁记录磁头的方法
公开(公告)号：US08056214B2
公开(公告)日：2011-11-15
申请号：US12461644
申请日：2009-08-19
申请人： Yoshitaka Sasaki , Kazuo Ishizaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Atsushi Iljima
发明人： Yoshitaka Sasaki , Kazuo Ishizaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Atsushi Iljima
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having a pole groove that accommodates the pole layer and first and second side shield grooves that accommodate the first and second side shields. In a manufacturing method for the magnetic head, the pole groove and first and second initial side shield grooves are formed in a nonmagnetic layer using an etching mask layer having first to third openings. In the manufacturing method, a wall face of the first initial side shield groove that is closer to the pole groove and a wall face of the second initial side shield groove that is closer to the pole groove are etched by dry etching to thereby complete the first and second side shield grooves.
摘要翻译：磁头包括极层，第一和第二侧面屏蔽以及具有容纳磁极层的磁极槽和容纳第一和第二侧面屏蔽件的第一和第二侧面屏蔽槽的封装层。在磁头的制造方法中，使用具有第一至第三开口的蚀刻掩模层，将磁极槽和第一和第二初始侧屏蔽槽形成为非磁性层。在制造方法中，通过干蚀刻来蚀刻靠近极槽的第一初始侧屏蔽槽的壁面和靠近极槽的第二初始侧屏蔽槽的壁面，从而完成第一和第二侧屏蔽槽。

30. 发明申请

US20100301007A1 Method of manufacturing magnetic head for perpendicular magnetic recording including two side shields 有权
标题翻译：制造包括两个侧面屏蔽的垂直磁记录磁头的方法
公开(公告)号：US20100301007A1
公开(公告)日：2010-12-02
申请号：US12457090
申请日：2009-06-01
申请人： Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
发明人： Kazuo Ishizaki , Yoshitaka Sasaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Cherng-Chyi Han
IPC分类号： B44C1/22
CPC分类号： G11B5/3146 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.
摘要翻译：磁头包括极层，第一和第二侧屏蔽以及包含第一至第三沟槽的封装层，其容纳极层和第一和第二侧屏蔽。磁头的制造方法包括通过使用具有第一至第三开口的蚀刻掩模层在非磁性层中形成第一至第三沟槽的步骤。该步骤包括通过使用第一开口蚀刻非磁性层来形成第一凹槽的步骤，其中第二和第三开口被第一掩模覆盖; 以及通过使用所述第二和第三开口蚀刻所述非磁性层来形成所述第二和第三凹槽，其中所述第一开口被第二掩模覆盖。

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