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    • 29. 发明授权
    • Electronic component package and method of manufacturing same
    • 电子元件封装及其制造方法
    • US07166497B2
    • 2007-01-23
    • US10989675
    • 2004-11-16
    • Kazuhiro ShiomiMasaaki IshioMinoru IizukaYoshikiyo Ogasawara
    • Kazuhiro ShiomiMasaaki IshioMinoru IizukaYoshikiyo Ogasawara
    • H01L21/44H01L21/48H01L21/50
    • H01L23/04H01L23/10H01L2924/01079H01L2924/16195
    • An electronic component package includes a case having a cavity portion including an electronic component therein, and a lid member which is fusion-welded to the case via a fusion-welding layer to hermetically seal the cavity portion. The case has a first metal layer laminated on the case so as to be exposed on the open side at the cavity portion. The lid member has a core portion, and a second metal layer laminated on a side of the core portion facing the case. The fusion-welding layer has a soldering material layer formed of a soldering material, and first and second intermetallic compound layers disposed on opposite sides of the soldering material layer as a result of diffusion of a major component of the soldering material into the first metal layer and the second metal layer. The ratio of the area of the first and second intermetallic compound layers in a longitudinal section of the fusion-welding layer relative to the area of the longitudinal section of the fusion-welding layer is in a range of from about 25% to about 98%. This package maintains superior airtightness even when exposed to a high-temperature atmosphere, which is higher than the melting point of the soldering material.
    • 电子部件封装包括具有其中包括电子部件的空腔部分的壳体和通过熔融焊接层熔合到壳体上以密封空腔部分的盖部件。 壳体具有层叠在壳体上的第一金属层,以便在空腔部分的开放侧露出。 盖部件具有芯部,层叠在芯部的面向壳体的一侧的第二金属层。 熔焊层具有由焊料形成的焊接材料层,以及由于焊接材料的主要成分扩散到第一金属层中而设置在焊料层的相对侧上的第一和第二金属间化合物层 和第二金属层。 熔融层的纵截面中的第一和第二金属间化合物的面积相对于熔融层的纵截面的面积的比例为约25%〜98% 。 即使暴露在高于焊接材料的熔点的高温气氛下,该包装也保持优异的气密性。