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    • 22. 发明授权
    • Visual ARS service system and method enabled by mobile terminal's call control function
    • 可视ARS服务系统和方法由移动终端的呼叫控制功能启用
    • US08437747B2
    • 2013-05-07
    • US12682502
    • 2008-10-08
    • Yong-Jin Kim
    • Yong-Jin Kim
    • H04M3/00
    • H04W4/16H04L67/36H04M3/42382H04M3/42391H04M3/51H04M3/5183H04M2201/38H04M2203/2011H04M2207/18
    • Disclosed is a system and a method for providing a Visual ARS (VARS) service by using a call control function of a mobile communication terminal. In the system and the method, a user of a terminal can select an existing voice guidance service or an available visual guidance service when trying a call connection to a telephone number of an existing call center. When selecting a visual guidance service, an originator receives an ARS service on a screen of the terminal of the originator. Accordingly, the user can receive and use the VARS service according to the user's selection by using a mobile communication network, so that the user can handle a task requested on a screen of the terminal. Hence, it is possible to overcome the disadvantage of a limited voice guidance-centered ARS service that a call center currently provides in a stereotyped manner regardless of the generation development of terminals. Also, it is possible to provide various VARS services with the development of mobile communication terminals.
    • 公开了一种通过使用移动通信终端的呼叫控制功能来提供视觉ARS(VARS)服务的系统和方法。 在系统和方法中,当尝试与现有呼叫中心的电话号码的呼叫连接时,终端的用户可以选择现有的语音指导服务或可用的视觉指导服务。 当选择视觉指导服务时,发起者在发起者的终端的屏幕上接收ARS服务。 因此,用户可以通过使用移动通信网络根据用户的选择来接收和使用VARS服务,使得用户可以处理终端屏幕上请求的任务。 因此,可以克服呼叫中心目前以定型方式提供的有限的以语音指导为中心的ARS服务的缺点,而不管终端的发展。 此外,可以提供各种VARS服务与移动通信终端的发展。
    • 27. 发明申请
    • Apparatus and Method for Processing Substrate Using Neutralized Beams Including Applying a Voltage to a Substrate Support
    • 使用包括对基板支撑施加电压的中和束来处理基板的装置和方法
    • US20120068058A1
    • 2012-03-22
    • US13306364
    • 2011-11-29
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • Do-Haing LeeHa-Na KimYong-Jin Kim
    • H05H3/02
    • H01J37/30H01J2237/0041H01J2237/04756H01J2237/20H01J2237/31
    • An apparatus and method for processing a substrate using neutralized beams are provided. A substrate processing apparatus includes an ion source generating device configured to form an ion source. An ion extraction device is configured to extract and accelerate ions from the ion source. An ion neutralizing device is configured to convert the ions extracted and accelerated from the ion extraction device into neutralized beams. A remaining portion of the ions extracted and accelerated from the ion extraction device is not converted into the neutralized beams. A substrate support is configured to support a substrate such that the neutralized beams are directed towards the substrate support. A substrate power supply is configured to apply a voltage to the substrate support such that the remaining portion of the ions that is not converted into the neutralized beams is directed away from the substrate support by the applied voltage of the substrate.
    • 提供了一种使用中和束来处理衬底的设备和方法。 衬底处理装置包括被配置为形成离子源的离子源生成装置。 离子提取装置被配置为从离子源提取和加速离子。 离子中和装置被配置为将从离子提取装置提取和加速的离子转化成中和的束。 从离子提取装置提取和加速的离子的剩余部分不被转换成中和的束。 衬底支撑件被配置为支撑衬底,使得中和的光束被引向衬底支撑件。 衬底电源被配置为向衬底支撑件施加电压,使得未转换成中和束的离子的剩余部分通过衬底的施加电压被引导离开衬底支撑。
    • 30. 发明申请
    • APPARATUS AND METHOD FOR MONITORING CHAMBER STATUS IN SEMICONDUCTOR FABRICATION PROCESS
    • 用于监测半导体制造工艺中的室状态的装置和方法
    • US20110063128A1
    • 2011-03-17
    • US12858691
    • 2010-08-18
    • Sang-Wuk ParkWoo-Seok KimYong-Jin Kim
    • Sang-Wuk ParkWoo-Seok KimYong-Jin Kim
    • H04J14/08
    • H04J14/08H01L21/67069H01L21/67253
    • A chamber-status monitoring apparatus includes a plurality of chambers, a time-division multiplexer configured to receive, via optical fiber probes, optical signals from each chamber, to divide each optical signal into first time slots having a predetermined duration, and to multiplex the first time slots to generate an OTDM signal, a multi-input optical emission spectroscope configured to receive and disperse the OTDM signal according to wavelengths to measure spectrum information, and a controller configured to divide the spectrum information of the dispersed OTDM signal into second time slots with a predetermined time interval therebetween, to classify the second time slots according to the chambers to obtain spectrum information of the optical signals of the individual chambers, and to control endpoint detection in each of the chambers in accordance with the spectrum information of the optical signal of the corresponding chamber.
    • 室状态监视装置包括多个室,时分多路复用器,被配置为经由光纤探针从每个室接收光信号,以将每个光信号划分成具有预定持续时间的第一时隙,并将多路复用 用于产生OTDM信号的第一时隙;被配置为根据波长接收和分散OTDM信号以测量频谱信息的多输入光发射分光器;以及控制器,被配置为将分散的OTDM信号的频谱信息划分为第二时隙 以其间的预定时间间隔,根据室对第二时隙进行分类,以获得各个室的光信号的频谱信息,并且根据光信号的频谱信息来控制每个室中的端点检测 相应的房间。