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    • 21. 发明授权
    • Method of forming MOS transistor having fully silicided metal gate electrode
    • 形成具有完全硅化金属栅电极的MOS晶体管的方法
    • US07582535B2
    • 2009-09-01
    • US11158978
    • 2005-06-22
    • Seung-Hwan LeeDong-Suk ShinHwa-Sung RheeTetsuji UenoHo Lee
    • Seung-Hwan LeeDong-Suk ShinHwa-Sung RheeTetsuji UenoHo Lee
    • H01L21/336
    • H01L29/4975H01L21/28097H01L21/823835H01L21/823842H01L29/665H01L29/6653H01L29/66545H01L29/6656H01L29/66628H01L29/66636
    • Methods of fabricating a MOS transistor having a fully silicided metal gate electrode are provided. The method includes forming an isolation layer in a predetermined region of a semiconductor substrate to define an active region. An insulated gate pattern which crosses over the active region is formed. A spacer is formed on sidewalls of the gate pattern. A selective epitaxial growth process is applied to form semiconductor layers on the gate pattern and on the active region at both sides of the gate pattern. In this case, a poly-crystalline semiconductor layer is formed on the gate pattern while single-crystalline semiconductor layers are concurrently formed on the active region at both sides of the gate pattern. The semiconductor layers are selectively etched to form a gate-reduced pattern and elevated source and drain regions. Respective desired thicknesses of the gate-reduced pattern and the elevated source and drain regions may be obtained using an etch selectivity between the poly-crystalline semiconductor layer and the single-crystalline semiconductor layer. A silicidation process is applied to the semiconductor substrate where the gate-reduced pattern is formed to simultaneously form a fully silicided metal gate electrode and elevated source and drain silicide layers.
    • 提供制造具有完全硅化金属栅电极的MOS晶体管的方法。 该方法包括在半导体衬底的预定区域中形成隔离层以限定有源区。 形成了跨越有源区域的绝缘栅极图案。 在栅极图案的侧壁上形成间隔物。 施加选择性外延生长工艺以在栅极图案上形成半导体层,并且在栅极图案的两侧形成半导体层。 在这种情况下,在栅极图案上形成多晶半导体层,同时在栅极图案的两侧的有源区同时形成单晶半导体层。 选择性地蚀刻半导体层以形成栅极减小图案和升高的源极和漏极区域。 可以使用多晶半导体层和单晶半导体层之间的蚀刻选择性来获得栅极减小图案和升高的源极和漏极区域的各种期望厚度。 将硅化处理应用于形成栅极减少图案的半导体衬底,以同时形成完全硅化的金属栅电极和升高的源极和漏极硅化物层。
    • 22. 发明授权
    • Flash memory devices having multilayered inter-gate dielectric layers including metal oxide layers and methods of manufacturing the same
    • 具有包括金属氧化物层的多层栅极间电介质层的闪存器件及其制造方法
    • US07517750B2
    • 2009-04-14
    • US11383102
    • 2006-05-12
    • Han-Mei ChoiYoung-Geun ParkSeung-Hwan LeeYoung-Sun Kim
    • Han-Mei ChoiYoung-Geun ParkSeung-Hwan LeeYoung-Sun Kim
    • H01L21/8238
    • H01L27/115H01L27/11519H01L27/11521
    • Embodiments of the present invention provide methods of manufacturing memory devices including forming floating gate patterns on a semiconductor substrate having active regions thereon, wherein the floating gate patterns cover the active regions and are spaced apart from the active regions; forming an inter-gate dielectric layer on the semiconductor substrate having the floating gate patterns by alternately stacking a zirconium oxide layer and an aluminum oxide layer at least once, wherein the inter-gate dielectric layer is formed by a deposition process using O3 gas as a reactive gas; forming a control gate layer on the inter-gate dielectric layer; and forming a control gate, an inter-gate dielectric layer pattern and a floating gate by sequentially patterning the control gate layer, the inter-gate dielectric layer and the floating gate pattern, wherein the inter-gate dielectric layer pattern and the control gate are sequentially stacked across the active regions, and the floating gate is formed between the active regions and the inter-gate dielectric layer pattern Memory devices, such as flash memory devices are also provided.
    • 本发明的实施例提供了制造存储器件的方法,包括在其上具有有源区的半导体衬底上形成浮置栅极图案,其中浮置栅极图案覆盖有源区并与有源区间隔开; 通过将氧化锆层和氧化铝层交替层叠至少一次来形成具有浮置栅极图案的半导体衬底上的栅极间电介质层,其中栅极间电介质层通过使用O 3气体作为 反应气体 在所述栅极间电介质层上形成控制栅极层; 以及通过对控制栅极层,栅极间电介质层和浮置栅极图案顺序构图来形成控制栅极,栅极间电介质层图案和浮置栅极,其中栅极间电介质层图案和控制栅极是 顺序堆叠在有源区上,并且在有源区之间形成浮栅,并且还提供诸如闪存器件的栅极间电介质层图案存储器件。
    • 23. 发明授权
    • Adaptive frequency control apparatus and method thereof
    • 自适应频率控制装置及其方法
    • US07453962B2
    • 2008-11-18
    • US10856155
    • 2004-05-27
    • Seung-Hwan LeeJin-Up Kim
    • Seung-Hwan LeeJin-Up Kim
    • H04L27/06
    • H03J7/04
    • The adaptive frequency control apparatus includes: a frequency downstreamer for converting the frequency of the radio frequency signal to a frequency of a defined band according to a reference signal; a frequency error measurer for measuring a frequency error between a frequency of the output signal of the frequency downstreamer and a defined frequency; a loop filter for filtering the frequency error output from the frequency error measurer based on a plurality of operational parameters, the operational parameters being changeable; a differential amplifier for generating a control signal for a voltage control based on the output signal of the loop filter; and a voltage-controlled oscillator for changing the frequency of the reference signal according to the control signal of the differential amplifier.
    • 自适应频率控制装置包括:频率下行器,用于根据参考信号将射频信号的频率转换成定义频带的频率; 频率误差测量器,用于测量下游频率的输出信号的频率与定义的频率之间的频率误差; 环路滤波器,用于基于多个操作参数对来自频率误差测量器的频率误差进行滤波,所述操作参数是可变的; 差分放大器,用于基于所述环路滤波器的输出信号产生用于电压控制的控制信号; 以及用于根据差分放大器的控制信号改变参考信号的频率的压控振荡器。