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21. 发明授权

US08437065B2 Scanning platform having asymmetric flexures 有权
标题翻译：具有不对称弯曲的扫描平台
公开(公告)号：US08437065B2
公开(公告)日：2013-05-07
申请号：US12906864
申请日：2010-10-18
申请人： Dean R. Brown , Wyatt O. Davis
发明人： Dean R. Brown , Wyatt O. Davis
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/0833 , G02B26/0841
摘要： Briefly, in accordance with one or more embodiments, a scanning platform to scan a beam as a projected image comprises a frame and a scanning mirror supported by a flexure coupled to the frame of the scanning platform. The flexure has an asymmetric structure comprising a longer flexure arm and a shorter flexure arm to locate the scanning mirror at a position offset from a center of the frame. The resonant frequency of oscillation of the scanning mirror may be maintained or otherwise determined by selecting an appropriate cross-sectional area of the longer flexure arm or the shorter flexure arm, or combinations thereof.
摘要翻译：简而言之，根据一个或多个实施例，用于将射束扫描为投影图像的扫描平台包括由耦合到扫描平台的框架的挠曲件支撑的框架和扫描镜。挠曲具有包括较长弯曲臂和较短弯曲臂的不对称结构，以将扫描镜定位在偏离框架中心的位置处。扫描镜的振荡的谐振频率可以通过选择较长的弯曲臂或较短的弯曲臂的适当的横截面积或其组合来保持或以其它方式确定。

22. 发明申请

US20130033732A1 Rotating MEMS Scanner 审中-公开
标题翻译：旋转MEMS扫描仪
公开(公告)号：US20130033732A1
公开(公告)日：2013-02-07
申请号：US13198585
申请日：2011-08-04
申请人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
发明人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
IPC分类号： G02B26/10
CPC分类号： G02B26/085 , G02B26/101 , H04M1/21 , H04M2250/54 , H04N9/3129 , H04N9/3173
摘要： Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.
摘要翻译：简而言之，根据一个或多个实施例，旋转扫描平台包括旋转体和两个或更多个悬架挠曲件，以在相应悬架挠曲件的第一端处支撑旋转体，其中悬架弯曲部的长度大于旋转体的半径和悬架弯曲部设置在与旋转体的旋转中心偏移的位置。悬架弯曲部分别在第二端处固定到位于相对于相应悬架挠曲件的第一端更靠近旋转中心的位置处的基板，以允许旋转体围绕旋转中心旋转，大体上响应于驱动信号的线性旋转。

23. 发明申请

US20120092741A1 Two-Mirror Scanning System 审中-公开
标题翻译：双镜扫描系统
公开(公告)号：US20120092741A1
公开(公告)日：2012-04-19
申请号：US13333291
申请日：2011-12-21
申请人： Joshua M. Hudman , Wyatt O. Davis , Dean R. Brown
发明人： Joshua M. Hudman , Wyatt O. Davis , Dean R. Brown
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , G02B26/0833 , H04N9/3129 , H04N9/3173
摘要： A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.
摘要翻译：扫描光束投影系统包括双镜像扫描系统。一个镜像沿一个方向扫描，第二个镜像沿第二个方向扫描。快速扫描镜接收来自折叠镜的调制光束并且将调制的光束引导到慢镜子。折叠镜可以形成在输出光学器件上，或者可以在具有慢扫描镜的公共衬底上形成。

24. 发明申请

US20110199284A1 Piezoresistive Sensors for MEMS Device Having Rejection of Undesired Motion 有权
标题翻译：具有不希望的运动的MEMS器件的压阻式传感器
公开(公告)号：US20110199284A1
公开(公告)日：2011-08-18
申请号：US12706980
申请日：2010-02-17
申请人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
发明人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
IPC分类号： G09G3/00 , G01L1/18
CPC分类号： G01L5/0042 , G02B26/0833 , G02B26/105 , G09G3/3466
摘要： Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.
摘要翻译：简而言之，根据一个或多个实施例，压阻应力传感器包括多个压阻元件，该多个压阻元件耦合在桥接电路中，桥接电路设置在挠曲件上，附近或邻近挠曲件以检测围绕挠曲件的轴的扭转弯曲。桥接电路具有至少两个沿着挠曲轴设置的节点，以及至少两个节点，其布置在挠曲件的轴线之外，以响应于挠曲件的扭曲弯曲使桥接电路的输出最大化或接近最大化。桥接电路的输出信号的扭曲分量相对于由挠曲的非扭转应力产生的输出信号的分量相对增加，或由挠曲的非扭转应力产生的输出信号的分量相对于输出信号的扭转弯曲分量或其组合而减小。

25. 发明授权

US07679804B2 Non-resonant drive for adaptive trajectory of a scanner system having a MEMS device 有权
标题翻译：具有MEMS装置的扫描器系统的自适应轨迹的非谐振驱动
公开(公告)号：US07679804B2
公开(公告)日：2010-03-16
申请号：US11796230
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Gregory T. Gibson , Richard A. James
发明人： Dean R. Brown , Wyatt O. Davis , Gregory T. Gibson , Richard A. James
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B7/1821
摘要： Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.
摘要翻译：简而言之，根据一个或多个实施例，可以以非谐振工作模式驱动用于扫描器系统的MEMS装置。可以调整提供给MEMS器件的驱动信号，以防止MEMS器件表现出谐振特性，并使MEMS器件非谐振地工作。在一个或多个实施例中，可以使用滤波器来定制驱动信号的频率分量，例如以充分衰减在驱动信号的谐振频率处或附近的频率分量。可以向MEMS器件提供直流信号以提供扫描光束的偏移，例如以提供光束转向，并且可以调整扫描范围和/或扫描频率以例如将扫描视场偏离轴线用户指向轴。

26. 发明申请

US20140313558A1 MEMS Device with Asymmetric Flexures 审中-公开
标题翻译：具有不对称挠度的MEMS器件
公开(公告)号：US20140313558A1
公开(公告)日：2014-10-23
申请号：US13866343
申请日：2013-04-19
申请人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
发明人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
IPC分类号： G02B26/10
CPC分类号： G02B26/0833 , B81B3/0078 , B81B2201/042 , G02B27/0101 , G02B27/0172
摘要： A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
摘要翻译：微机电系统（MEMS）装置包括通过形成枢转轴线的两个挠曲件从固定平台悬挂的扫描平台。两个弯曲部可以围绕扫描平台的中心线对称或不对称。至少一个弯曲部包括彼此不平行的两个部分。第二挠曲可以包括具有一个部分比另一个部分宽的两个部分。当MEMS装置作为组件的一部分安装时，挠曲设计减少了安装和热应力的影响。

27. 发明授权

US08218218B2 Fatigue resistant MEMS apparatus and system 有权
标题翻译：耐疲劳MEMS仪器和系统
公开(公告)号：US08218218B2
公开(公告)日：2012-07-10
申请号：US12420426
申请日：2009-04-08
申请人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
发明人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/085 , H04M1/0272 , H04M1/7253
摘要： A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
摘要翻译：微机电系统（MEMS）包括具有改进的可靠性的导体。导体在MEMS装置中与移动构件弯曲，并且通过提供增加的抗疲劳性，减小的裂纹扩展的材料选择和/或在给定应变水平下改善活体的机制来实现改进的可靠性。导体可以包括单一材料，或者可以包括不同材料的层。

28. 发明申请

US20110026549A1 Electromagnetic Scanner Having Variable Coil Width 有权
标题翻译：具有可变线圈宽度的电磁扫描仪
公开(公告)号：US20110026549A1
公开(公告)日：2011-02-03
申请号：US12512261
申请日：2009-07-30
申请人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
发明人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
IPC分类号： H01S3/10
CPC分类号： G06K7/10633 , G06K7/10653
摘要： Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描光束显示器的扫描器可以包括扫描平台，其具有设置在其上的反射镜以反射入射在反射镜上的光束，设置在扫描平台上的驱动线圈以扫描反射的光束响应于施加到驱动线圈的驱动电流。驱动线圈具有在驱动线圈的一个或多个区域中具有较窄宽度的线圈绕组段，并且具有在驱动线圈的一个或多个其它区域中具有较大宽度的线圈绕组段，从而为驱动线圈提供减小的电抵抗性。

29. 发明申请

US20080266630A1 Suspension for maintaining mirror flatness of a MEMS device in a scanner systenm or the like 有权
标题翻译：用于维持扫描器系统等中的MEMS器件的镜面平坦度的悬架
公开(公告)号：US20080266630A1
公开(公告)日：2008-10-30
申请号：US11796533
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher , David R. Bowman
发明人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher , David R. Bowman
IPC分类号： G02B7/192 , G02B26/10
CPC分类号： G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.
摘要翻译：简而言之，根据一个或多个实施例，MEMS装置可以包括线圈框架，其具有设置在其上的驱动线圈并且由沿着线圈框架的轴线设置的一个或多个悬架臂支撑，以及具有布置的反射镜平台上。镜平台可以在通常沿着轴线设置的连接点处耦合到线圈框架，以便减少镜台的偏转，以减小反射镜上的应力，以便保持镜面的相对平坦度。此外，反射镜平台可以包括大致沿着轴线设置在反射镜平台的边缘附近的柔性部件，以隔离反射镜平台和反射镜以避免线圈框架翘曲和悬挂臂的扭转，以进一步保持镜子的相对平坦度。

30. 发明申请

US20080266629A1 MEMS device of a scanner system having magnetic components disposed opposite to reflectance path 审中-公开
标题翻译：具有与反射路径相对设置的磁性部件的扫描器系统的MEMS装置
公开(公告)号：US20080266629A1
公开(公告)日：2008-10-30
申请号：US11796532
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis
发明人： Dean R. Brown , Wyatt O. Davis
IPC分类号： G02B26/10
CPC分类号： G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may include one or more magnets disposed on the side of the MEMS die opposite to the reflectance path of the scanning mirror without requiring magnets to be disposed on the side of the die that is the same side of the reflectance path of the scanning mirror. As a result of such an arrangement of the one or more magnets, there is no optical obstruction of the incoming and/or outgoing light beams. Likewise, fewer parts may be required for MEMS device and/or the scanning module, and the assembly process of scanning module may be substantially simplified.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描仪系统的MEMS装置可以包括设置在MEMS管芯的与扫描反射镜的反射路径相反的一侧上的一个或多个磁体，而不需要将磁体设置在扫描镜的一侧该模具是扫描反射镜的反射路径的相同侧面。作为一个或多个磁体的这种布置的结果，入射光束和/或出射光束没有光学障碍。同样，MEMS器件和/或扫描模块可能需要更少的部件，并且扫描模块的组装过程可以被大大简化。

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