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21. 发明授权

US07432557B1 FinFET device with multiple channels 有权
标题翻译： FinFET器件具有多个通道
公开(公告)号：US07432557B1
公开(公告)日：2008-10-07
申请号：US10755344
申请日：2004-01-13
申请人： Matthew S. Buynoski , Judy Xilin An , Bin Yu
发明人： Matthew S. Buynoski , Judy Xilin An , Bin Yu
IPC分类号： H01L23/62
CPC分类号： H01L29/785 , H01L29/42384 , H01L29/66795 , H01L29/78603 , H01L2924/0002 , H01L2924/00
摘要： A method for forming one or more FinFET devices includes forming a source region and a drain region in an oxide layer, where the oxide layer is disposed on a substrate, and etching the oxide layer between the source region and the drain region to form a group of oxide walls and channels for a first device. The method further includes depositing a connector material over the oxide walls and channels for the first device, forming a gate mask for the first device, removing the connector material from the channels, depositing channel material in the channels for the first device, forming a gate dielectric for first device over the channels, depositing a gate material over the gate dielectric for the first device, and patterning and etching the gate material to form at least one gate electrode for the first device.
摘要翻译：半导体器件包括源极区域，漏极区域和形成在源极区域和漏极区域之间的沟道组。通道组中的至少一个通道通过氧化物结构与通道组中的另一个通道分离。半导体器件还包括至少一个形成在该组沟道的至少一部分上的栅极。

22. 发明申请

US20080197025A1 Ionic based sensing for identifying genomic sequence variations and detecting mismatch base pairs, such as single nucleotide polymorphisms 失效
标题翻译：用于鉴定基因组序列变异和检测错配碱基对（例如单核苷酸多态性）的基于离子的感测
公开(公告)号：US20080197025A1
公开(公告)日：2008-08-21
申请号：US11090944
申请日：2005-03-25
申请人： Yanxiu Zhou , Bin Yu , Kalle Levon
发明人： Yanxiu Zhou , Bin Yu , Kalle Levon
IPC分类号： G01N27/406
CPC分类号： C12Q1/6825 , C12Q2600/156 , G01N27/333 , C12Q2565/518
摘要： Ionic interactions are monitored to detect hybridization. The measurement may be done measuring the potential change in the solution with the ion sensitive electrode (which may be the conducting polymer (e.g., polyaniline) itself), without applying any external energy during the binding. The double helix formation during the complimentary hybridization makes this electrode act as an ion selective electrode—the nucleotide hydrogen bonding is specific and thus monitoring the ionic phosphate group addition becomes selective. Polyaniline on the surface of nylon film forms a positively charged polymer film. Thiol linkage can be utilized for polyaniline modification and thiol-modified single strand oligonucleotide chains can be added to polyaniline. The sensitivity is because the double helix formation during the complimentary hybridization makes this electrode act as an ion selective electrode as the nucleotide hydrogen bonding is specific and thus monitoring the ionic phosphate group addition becomes selective.
摘要翻译：监测离子相互作用以检测杂交。测量可以通过离子敏感电极（其可以是导电聚合物（例如聚苯胺）本身））测量溶液中的潜在变化，而在结合期间不施加任何外部能量。在互补杂交期间的双螺旋形成使得该电极用作离子选择性电极 - 核苷酸氢键是特异性的，因此监测离子性磷酸酯基添加成为选择性的。尼龙膜表面的聚苯胺形成带正电的聚合物膜。硫醇连接可用于聚苯胺改性，硫醇改性的单链寡核苷酸链可以加入到聚苯胺中。敏感性是因为互补杂交期间的双螺旋形成使得该电极作为离子选择性电极，因为核苷酸氢键是特异性的，因此监测离子性磷酸酯基添加成为选择性的。

23. 发明申请

US20080054431A1 Embedded package in package 审中-公开
标题翻译：嵌入式封装在封装中
公开(公告)号：US20080054431A1
公开(公告)日：2008-03-06
申请号：US11513765
申请日：2006-08-31
申请人： Tingqing Wang , Moon Wang , Bin Yu
发明人： Tingqing Wang , Moon Wang , Bin Yu
IPC分类号： H01L23/12 , H01L21/58
CPC分类号： H01L21/565 , H01L23/3128 , H01L24/45 , H01L24/48 , H01L24/83 , H01L24/85 , H01L25/03 , H01L25/50 , H01L2224/32145 , H01L2224/45144 , H01L2224/48225 , H01L2224/48227 , H01L2224/83 , H01L2224/85 , H01L2225/06568 , H01L2924/01079 , H01L2924/078 , H01L2924/14 , H01L2924/15311 , H01L2924/15331 , H01L2924/15787 , H01L2924/181 , H01L2924/19107 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A stacked chip semiconductor package may be formed in a “package in package” arrangement. The internal package may include two substrates. One substrate may have two dice stacked on each of two opposed sides and the other substrate may have two dice stacked on it as well. The two stacked substrates may be separated by molding compound and then electrically coupled to a third substrate. Thereafter, the entire assembly may be encapsulated.
摘要翻译：堆叠式芯片半导体封装可以形成为“封装封装”布置。内部封装可以包括两个基板。一个基底可以具有两个堆叠在两个相对侧中的每一个上的骰子，另一个基底也可以在其上堆叠两个骰子。两个堆叠的基板可以通过模制化合物分离，然后电耦合到第三基板。此后，整个组件可以被封装。

24. 发明授权

US07235436B1 Method for doping structures in FinFET devices 有权
标题翻译： FinFET器件掺杂结构的方法
公开(公告)号：US07235436B1
公开(公告)日：2007-06-26
申请号：US10614051
申请日：2003-07-08
申请人： Ming-Ren Lin , Zoran Krivokapic , Haihong Wang , Bin Yu
发明人： Ming-Ren Lin , Zoran Krivokapic , Haihong Wang , Bin Yu
IPC分类号： H01L21/84
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/66795 , H01L29/785
摘要： A method for doping fin structures in FinFET devices includes forming a first glass layer on the fin structure of a first area and a second area. The method further includes removing the first glass layer from the second area, forming a second glass layer on the fin structure of the first area and the second area, and annealing the first area and the second area to dope the fin structures.
摘要翻译：在FinFET器件中掺杂鳍结构的方法包括在第一区域和第二区域的鳍结构上形成第一玻璃层。该方法还包括从第二区域去除第一玻璃层，在第一区域和第二区域的翅片结构上形成第二玻璃层，并退火第一区域和第二区域以掺杂翅片结构。

25. 发明授权

US07211489B1 Localized halo implant region formed using tilt pre-amorphization implant and laser thermal anneal 有权
标题翻译：使用倾斜预非晶化植入和激光热退火形成的局部化的晕圈植入区
公开(公告)号：US07211489B1
公开(公告)日：2007-05-01
申请号：US10934378
申请日：2004-09-07
申请人： Qi Xiang , Robert B. Ogle , Eric N. Paton , Cyrus E. Tabery , Bin Yu
发明人： Qi Xiang , Robert B. Ogle , Eric N. Paton , Cyrus E. Tabery , Bin Yu
IPC分类号： H01L21/336
CPC分类号： H01L21/268 , H01L21/26506 , H01L21/26586 , H01L29/1083 , H01L29/665 , H01L29/6653 , H01L29/6659
摘要： The present invention enables the production of improved high-reliability, high-density semiconductor devices. The present invention provides the high-density semiconductor devices by decreasing the size of semiconductor device structures, such as gate channel lengths. Short-channel effects are prevented by the use of highly localized halo implant regions formed in the device channel. Highly localized halo implant regions are formed by a tilt pre-amorphization implant and a laser thermal anneal of the halo implant region.
摘要翻译：本发明能够制造改进的高可靠性，高密度的半导体器件。本发明通过减小诸如栅极沟道长度的半导体器件结构的尺寸来提供高密度半导体器件。通过使用在器件通道中形成的高度局部化的注入区来防止短沟道效应。通过倾斜预非晶化植入和晕圈植入区域的激光热退火形成高度局部化的注入区域。

26. 发明授权

US07196374B1 Doped structure for FinFET devices 有权
标题翻译： FinFET器件的掺杂结构
公开(公告)号：US07196374B1
公开(公告)日：2007-03-27
申请号：US10653274
申请日：2003-09-03
申请人： Ming-Ren Lin , Bin Yu
发明人： Ming-Ren Lin , Bin Yu
IPC分类号： H01L29/76
CPC分类号： H01L29/785 , H01L29/42384 , H01L29/4908 , H01L29/66795 , H01L29/78687
摘要： A semiconductor device includes a substrate and an insulating layer on the substrate. The semiconductor device also includes a fin structure formed on the insulating layer, where the fin structure includes first and second side surfaces, a dielectric layer formed on the first and second side surfaces of the fin structure, a first gate electrode formed adjacent the dielectric layer on the first side surface of the fin structure, a second gate electrode formed adjacent the dielectric layer on the second side surface of the fin structure, and a doped structure formed on an upper surface of the fin structure in the channel region of the semiconductor device.
摘要翻译：半导体器件包括衬底和衬底上的绝缘层。半导体器件还包括形成在绝缘层上的翅片结构，其中鳍结构包括第一和第二侧表面，形成在鳍结构的第一和第二侧表面上的电介质层，形成在电介质层附近的第一栅电极在翅片结构的第一侧表面上形成与鳍结构的第二侧表面上的电介质层相邻的第二栅电极，以及在半导体器件的沟道区中形成在鳍结构的上表面上的掺杂结构。

27. 发明授权

US07183152B1 Epitaxially grown fin for FinFET 有权
标题翻译： FinFET的外延生长鳍
公开(公告)号：US07183152B1
公开(公告)日：2007-02-27
申请号：US10975475
申请日：2004-10-29
申请人： Srikanteswara Dakshina-Murthy , Chih-Yuh Yang , Bin Yu
发明人： Srikanteswara Dakshina-Murthy , Chih-Yuh Yang , Bin Yu
IPC分类号： H01L21/336 , H01L21/8234 , H01L21/00 , H01L21/84 , H01L21/3205
CPC分类号： H01L29/785 , H01L21/84 , H01L27/1203 , H01L29/1054 , H01L29/66795 , H01L29/78687
摘要： A method of forming a fin for a fin field effect transistor (FinFET) includes defining a trench in a layer of first material, where a width of an opening of the trench is substantially smaller than a thickness of the layer. The method includes growing a second material in the trench to form the fin and removing the layer of first material.
摘要翻译：形成鳍状场效应晶体管（FinFET）的鳍片的方法包括在第一材料层中限定沟槽，其中沟槽的开口的宽度基本上小于该层的厚度。该方法包括在沟槽中生长第二材料以形成翅片并去除第一材料层。

28. 发明授权

US07112847B1 Smooth fin topology in a FinFET device 有权
标题翻译： FinFET器件中的平滑鳍拓扑
公开(公告)号：US07112847B1
公开(公告)日：2006-09-26
申请号：US10653227
申请日：2003-09-03
申请人： Bin Yu , Haihong Wang
发明人： Bin Yu , Haihong Wang
IPC分类号： H01L27/01
CPC分类号： H01L29/785 , H01L21/823431 , H01L29/42384 , H01L29/4908 , H01L29/66795 , Y10S257/90
摘要： A semiconductor device includes a semiconductor fin formed on an insulator and sidewall spacers formed adjacent the sides of the fin. A gate material layer is formed over the fin and the sidewall spacers and etched to form a gate. The presence of the sidewall spacers causes a topology of the gate material layer to smoothly transition over the fin and the first and second sidewall spacers.
摘要翻译：半导体器件包括形成在绝缘体上的半导体鳍片和邻近翅片侧面形成的侧壁间隔物。栅极材料层形成在鳍片和侧壁间隔物上并被蚀刻以形成栅极。侧壁间隔物的存在导致栅极材料层的拓扑结构平滑地过渡翅片和第一和第二侧壁间隔物。

29. 发明授权

US07041601B1 Method of manufacturing metal gate MOSFET with strained channel 有权
标题翻译：制造具有应变通道的金属栅极MOSFET的方法
公开(公告)号：US07041601B1
公开(公告)日：2006-05-09
申请号：US10653103
申请日：2003-09-03
申请人： Bin Yu , Haihong Wang
发明人： Bin Yu , Haihong Wang
IPC分类号： H01L21/311
CPC分类号： H01L29/7842 , H01L29/4908 , H01L29/66545 , H01L29/66795 , H01L29/785
摘要： A method of manufacturing a MOSFET type semiconductor device includes forming a fin structure and a dummy gate structure over the fin structure. Sidewall spacers may be formed adjacent the dummy gate structure. The dummy gate structure may be later removed and replaced with a metal layer that is formed at a high temperature (e.g., 600°–700° C.). The cooling of the metal layer induces strain to the fin structure that affects the mobility of the double-gate MOSFET.
摘要翻译：制造MOSFET型半导体器件的方法包括在鳍结构上形成翅片结构和虚拟栅极结构。侧壁间隔件可以与伪栅极结构相邻地形成。可以稍后去除虚拟栅极结构并用在高温（例如600℃-700℃）下形成的金属层代替。金属层的冷却会引起对鳍结构的应变，从而影响双栅极MOSFET的迁移率。

30. 发明申请

US20060089820A1 Event-based system and process for recording and playback of collaborative electronic presentations 有权
公开(公告)号：US20060089820A1
公开(公告)日：2006-04-27
申请号：US10973186
申请日：2004-10-25
申请人： Bin Yu , Yong Rui
发明人： Bin Yu , Yong Rui
IPC分类号： G06F11/30 , G21C17/00 , G06F15/00
CPC分类号： G06Q10/10
摘要： An event-based system and process for recording and playback of collaborative electronic presentations is presented. The present system and process includes a technique for recording collaborative electronic presentations by capturing and storing the interactions between each participant and presentation data where each interaction event is timestamped and linked to a data file comprising the presentation data. The present system and process also includes a technique for playing back the recorded collaborative electronic presentation, which involves displaying the presentation data in an order it was originally presented and reproducing the recorded interactions between each participant and the displayed presentation data at the same point in the presentation that they were originally performed, based on the aforementioned timestamps.

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