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    • 24. 发明授权
    • Method of manufacturing nanowire
    • 制造纳米线的方法
    • US07642177B2
    • 2010-01-05
    • US11643706
    • 2006-12-22
    • Hans S. Cho
    • Hans S. Cho
    • H01L21/20
    • H01L21/02675B82Y10/00B82Y30/00H01L21/02532H01L21/0262H01L21/2026H01L29/0665H01L29/0673Y10S977/762
    • A method of manufacturing a nanowire, a method of manufacturing a semiconductor apparatus including a nanowire and a semiconductor apparatus formed from the same are provided. The method of manufacturing a semiconductor apparatus may include forming a material layer pattern on a substrate, forming a first insulating layer on the material layer pattern, a first nanowire forming layer and a top insulating layer on the substrate, wherein a total depth of the first insulating layer and the first nanowire forming layer may be formed to be smaller than a depth of the material layer pattern, sequentially polishing the top insulating layer, the first nanowire forming layer and the first insulating layer so that the material layer pattern is exposed, exposing part of the first nanowire forming layer to form an exposed region and forming a single crystalline nanowire on an exposed region of the first nanowire forming layer.
    • 提供一种纳米线的制造方法,包括纳米线的半导体装置的制造方法以及由该纳米线构成的半导体装置。 半导体装置的制造方法可以包括在基板上形成材料层图案,在基板上形成第一绝缘层,在基板上形成第一纳米线形成层和顶部绝缘层, 绝缘层和第一纳米线形成层可以形成为小于材料层图案的深度,顺序地抛光顶部绝缘层,第一纳米线形成层和第一绝缘层,使得材料层图案暴露,暴露 第一纳米线形成层的一部分以形成暴露区域并在第一纳米线形成层的暴露区域上形成单晶纳米线。
    • 26. 发明授权
    • Method of forming channel region of TFT composed of single crystal Si
    • 形成由单晶硅构成的TFT的沟道区的方法
    • US07390706B2
    • 2008-06-24
    • US11289312
    • 2005-11-30
    • Hans S. ChoTakashi NoguchiDo-young Kim
    • Hans S. ChoTakashi NoguchiDo-young Kim
    • H01L21/84
    • H01L21/02675H01L21/02532H01L21/02598H01L21/2026H01L27/1281H01L27/1296H01L29/04H01L29/66772
    • A method of forming a high quality channel region of a TFT by forming a large size monocrystalline silicon thin film using a patterned metal mask and a grain boundary filtering region is provided. The method includes sequentially stacking a first buffer layer and an amorphous silicon layer on a substrate, forming a first silicon region in which crystallization begins, a second silicon region having a width smaller than a width of the first silicon region and located on a central portion of a side of the first silicon region, and a third silicon region having a width than greater the width of the second silicon region and contacting the second silicon region, forming a metal mask partly on the first silicon region, and crystallizing the amorphous silicon layer by cooling the amorphous silicon layer after melting the entire amorphous silicon layer except for a portion of the amorphous silicon layer under the metal mask by radiating laser beams to the patterned amorphous silicon layer.
    • 提供了通过使用图案化金属掩模和晶界过滤区域形成大尺寸单晶硅薄膜来形成TFT的高质量沟道区域的方法。 该方法包括在基板上依次层叠第一缓冲层和非晶硅层,形成开始结晶的第一硅区域,第二硅区域的宽度小于第一硅区域的宽度并位于中心部分 并且第三硅区域的宽度大于第二硅区域的宽度并与第二硅区域接触,部分地在第一硅区域上形成金属掩模,并且使非晶硅层结晶 通过对图案化的非晶硅层照射激光束,在金属掩模下方的非晶硅层的一部分熔融了整个非晶硅层之后,冷却非晶硅层。
    • 28. 发明申请
    • Fin structure and method of manufacturing fin transistor adopting the fin structure
    • 翅片结构的翅片结构和制造方法
    • US20080038889A1
    • 2008-02-14
    • US11826420
    • 2007-07-16
    • Hans S. ChoYoung-soo ParkWenxu Xianyu
    • Hans S. ChoYoung-soo ParkWenxu Xianyu
    • H01L21/336H01L21/36
    • H01L29/66795H01L27/105H01L27/1052H01L29/785
    • Provided are a fin structure and a method of manufacturing a fin transistor adopting the fin structure. A plurality of mesa structures including sidewalls are formed on the substrate. A semiconductor layer is formed on the mesa structures. A capping layer is formed on the semiconductor layer. Thus, the semiconductor layer is protected by the capping layer and includes a portion which is to be formed as a fin structure. A portion of an upper portion of the capping layer is removed by planarizing, and thus a portion of the semiconductor layer on upper surfaces of the mesa structures is removed. As a result, fin structures are formed on sides of the mesa structures to be isolated from one another. Therefore, a fin structure having a very narrow width can be formed, and a thickness and a location of the fin structure can be easily controlled.
    • 提供一种翅片结构和制造采用鳍结构的鳍式晶体管的方法。 在基板上形成包括侧壁的多个台面结构。 在台面结构上形成半导体层。 在半导体层上形成覆盖层。 因此,半导体层被覆盖层保护,并且包括将被形成为翅片结构的部分。 通过平坦化除去覆盖层的上部的一部分,从而去除台面结构的上表面上的半导体层的一部分。 结果,翅片结构形成在台面结构的两侧以彼此隔离。 因此,可以形成具有非常窄的宽度的翅片结构,并且可以容易地控制翅片结构的厚度和位置。