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21. 发明授权

US08377501B2 Coating and developing system control method of controlling coating and developing system 有权
标题翻译：涂料开发系统控制方法
公开(公告)号：US08377501B2
公开(公告)日：2013-02-19
申请号：US12438031
申请日：2007-09-11
申请人： Yasushi Hayashida , Yoshitaka Hara , Tomohiro Kaneko
发明人： Yasushi Hayashida , Yoshitaka Hara , Tomohiro Kaneko
IPC分类号： C23C16/52 , C23C14/54
CPC分类号： H01L21/67745 , H01L21/67178 , H01L21/67276
摘要： A coating and developing system and control method is provided. The system and control method curtails the amount of time for which a substrate is held with no purpose while improving the throughput of the coating and developing system. An inspection station through which a substrate processed in a processing station is transferred to a carrier station includes a plurality of different inspection modules respectively taking different inspection times, a buffer unit for temporarily holding a substrate and a substrate carrying means controlled by a controller. When the inspection module is engaged in inspecting a substrate, the substrate carrying means carries another substrate to be inspected by the same inspection module to the buffer unit and the substrate is held in the buffer unit. Thus, the holding of wafers in the inspection modules can be suppressed and the throughput can be improved.
摘要翻译：提供涂层和显影系统和控制方法。该系统和控制方法在提高涂层和显影系统的生产量的同时，无需目的地限制基材保持的时间。将在处理站中处理的基板通过其传送到承载站的检查站包括分别采取不同检查时间的多个不同检查模块，用于临时保持基板的缓冲单元和由控制器控制的基板承载装置。当检查模块接合检查基板时，基板承载装置将待检查的另一基板由相同的检查模块携带到缓冲单元，并且基板保持在缓冲单元中。因此，可以抑制检查模块中的晶片的保持，并且可以提高生产量。

22. 发明授权

US07765051B2 Device for controlling internal combustion engine 有权
标题翻译：内燃机控制装置
公开(公告)号：US07765051B2
公开(公告)日：2010-07-27
申请号：US11597789
申请日：2006-03-31
申请人： Masakazu Tabata , Tomohiro Kaneko
发明人： Masakazu Tabata , Tomohiro Kaneko
IPC分类号： F02D41/18
CPC分类号： F02D41/18 , F02B23/104 , F02B29/083 , F02B2075/125 , F02D2041/0015 , F02D2200/0406 , Y02T10/146 , Y02T10/42
摘要： An internal combustion engine to which the inventive device for controlling an internal combustion engine is applied includes an intake control valve provided in an air-intake path at a position upstream from an intake valve, the intake control valve being controlled to be either in an operative state operating in relation to the operation of the intake valve or in an non-operative state maintaining the air-intake path always open, and, in the operative state, closed at least prior to the opening of the intake valve and opened after the opening of the intake valve to generate the pressure difference between the upstream and downstream from the intake control valve. The device for controlling an internal engine includes a detector for detecting a value corresponding to an amount of intake air fed to the internal combustion engine, and correction means for correcting the value detected by the detector, in correspondence to the operation characteristics of the intake control valve when the intake control valve is in the operative state.
摘要翻译：应用本发明的用于控制内燃机的装置的内燃机包括：进气控制阀，其设置在进气通道中的从进气门上游的位置，进气控制阀被控制在操作状态相对于进气门的操作或维持进气路径始终打开的非操作状态操作的状态，并且至少在打开进气门之前关闭至少在打开后的开启状态以产生进气控制阀的上游和下游之间的压力差。用于控制内部发动机的装置包括：检测器，用于检测对应于供给内燃机的进气量的值;以及校正装置，用于根据进气控制器的操作特性校正由检测器检测的值进气控制阀处于工作状态时的阀。

23. 发明申请

US20090299515A1 COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND STORAGE MEDIUM 有权
标题翻译：涂料和开发设备，涂料和开发方法和储存介质
公开(公告)号：US20090299515A1
公开(公告)日：2009-12-03
申请号：US12427123
申请日：2009-04-21
申请人： Tomohiro Kaneko , Takeshi Matsumoto
发明人： Tomohiro Kaneko , Takeshi Matsumoto
IPC分类号： G05B19/406 , B65G35/00
CPC分类号： H01L21/67288 , G05B2219/37224 , H01L21/67276
摘要： When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.
摘要翻译：当产品基板通过在传送路径中的检查模块前方的第n个模块的参考模块时，将用于对产品基板所属的批次进行检查的检查预约信号输出到检查模块。当检查模块处于故障状态时，禁止输出用于产品基板的检查预约信号，并且要传送到检查模块的产品基板以转移顺序传送到检查模块旁边的模块。当检查模块的故障已经解决，并且用于确认检查的基板优先地传送到检查模块时，输出用于确认检查的基板的检查预约信号，用于确认检查的基板被传送到检查模块，并且执行检查模块的确认检查。

24. 发明申请

US20090210131A1 Device For Controlling Internal Combustion Engine 有权
标题翻译：用于控制内燃机的装置
公开(公告)号：US20090210131A1
公开(公告)日：2009-08-20
申请号：US11597789
申请日：2006-03-31
申请人： Masakazu Tabata , Tomohiro Kaneko
发明人： Masakazu Tabata , Tomohiro Kaneko
IPC分类号： F02D41/18
CPC分类号： F02D41/18 , F02B23/104 , F02B29/083 , F02B2075/125 , F02D2041/0015 , F02D2200/0406 , Y02T10/146 , Y02T10/42
摘要： An internal combustion engine to which the inventive device for controlling an internal combustion engine is applied includes an intake control valve provided in an air-intake path at a position upstream from an intake valve, the intake control valve being controlled to be either in an operative state operating in relation to the operation of the intake valve or in an non-operative state maintaining the air-intake path always open, and, in the operative state, closed at least prior to the opening of the intake valve and opened after the opening of the intake valve to generate the pressure difference between the upstream and downstream from the intake control valve. The device for controlling an internal engine includes a detector for detecting a value corresponding to an amount of intake air fed to the internal combustion engine, and correction means for correcting the value detected by the detector, in correspondence to the operation characteristics of the intake control valve when the intake control valve is in the operative state.
摘要翻译：应用本发明的用于控制内燃机的装置的内燃机包括：进气控制阀，其设置在进气通道中的从进气门上游的位置，进气控制阀被控制在操作状态相对于进气门的操作或维持进气路径始终打开的非操作状态操作的状态，并且至少在打开进气门之前关闭至少在打开后的开启状态以产生进气控制阀的上游和下游之间的压力差。用于控制内部发动机的装置包括：检测器，用于检测对应于供给内燃机的进气量的值;以及校正装置，用于根据进气控制器的操作特性校正由检测器检测的值进气控制阀处于工作状态时的阀。

25. 发明申请

US20070240679A1 Control Apparatus and Control Method for Engine 有权
标题翻译：发动机控制装置及控制方法
公开(公告)号：US20070240679A1
公开(公告)日：2007-10-18
申请号：US11579001
申请日：2006-03-31
申请人： Masakazu Tabata , Tomohiro Kaneko
发明人： Masakazu Tabata , Tomohiro Kaneko
IPC分类号： F02D13/02
CPC分类号： F02D41/0002 , F02B29/083 , F02D41/18 , F02D2041/001 , F02D2200/0402 , F02D2200/0406 , F02D2200/0411 , Y02T10/146 , Y02T10/18 , Y02T10/42
摘要： For accurately estimating an air quantity flowing into a cylinder at the time of operating an intake control valve, a control apparatus for an engine according to the present invention is provided with an intake control valve which can open/close an intake passage in synchronization with opening/closing of an intake valve, intake control valve controlling means which opens the intake control valve in the midst of the intake stroke and thereafter, closes the intake control valve, and air quantity estimating means which estimates an air quantity flowing into a cylinder after the intake control valve has opened, based upon opening timing of the intake control valve, closing timing or an opening period of the intake control valve, and a pressure at a downstream side of the intake control valve at the opening timing of the intake control valve.
摘要翻译：为了精确地估计在操作进气控制阀时流入气缸的空气量，根据本发明的用于发动机的控制装置设置有进气控制阀，该进气控制阀可以与打开同步地打开/关闭进气通道进气门关闭;进气控制阀控制装置，其在进气冲程中间打开进气控制阀，然后闭合进气控制阀;以及空气量估计装置，其估计流入气缸内的空气量进气控制阀基于进气控制阀的打开正时，关闭正时或进气控制阀的打开时段以及进气控制阀在进气控制阀的打开正时的下游侧的压力打开。

26. 发明授权

US06839621B2 Stop-start control apparatus of internal combustion engine, and control method thereof 失效
标题翻译：内燃机的停止起动控制装置及其控制方法
公开(公告)号：US06839621B2
公开(公告)日：2005-01-04
申请号：US10487402
申请日：2002-08-27
申请人： Tomohiro Kaneko
发明人： Tomohiro Kaneko
IPC分类号： F02D17/00 , F02B3/06 , F02B29/04 , F02D17/04 , F02D29/02 , F02D41/04 , F02D45/00 , F02M25/07 , F02N11/08 , F02D25/00
CPC分类号： F02D41/042 , F02B3/06 , F02B29/0406 , F02B2275/14 , F02D17/04 , F02D41/0097 , F02M26/05 , F02M26/23 , F02M26/33 , F02N11/0814 , F02N11/0818 , F02N11/0844 , F02N2200/022 , Y02T10/123 , Y02T10/48 , Y10T477/87
摘要： In an eco-run control, determination of a stop of an internal combustion engine (1) is reliably and promptly made. An internal combustion engine stop-start control apparatus for executing a control of stopping the internal combustion engine (1) upon satisfaction of a predetermined stop condition, and for executing a control of starting the internal combustion engine (1) upon satisfaction of a predetermined start condition, has: stop request determination means (step S1) for determining that there is a request for stopping the internal combustion engine (1) based on satisfaction of the stop condition; and stop determination means (steps S2, S4) for determining a stop of the internal combustion engine (1) based on a state of a predetermined physical quantity that changes in relation to operation of the internal combustion engine (1), the state occurring within a predetermined determination time (Ten), and for setting the determination time (Ten) shorter if the request for stopping the internal combustion engine (1) is present than if the request is absent.
摘要翻译：在生态运行控制中，可靠且迅速地确定内燃机（1）的停止。一种内燃机停止启动控制装置，用于在满足预定的停止条件时执行停止内燃机（1）的控制，并且在满足预定的启动时执行启动内燃机（1）的控制条件，具有：基于停止条件的满足确定存在停止内燃机（1）的请求的停止请求确定装置（步骤S1）; 以及基于相对于内燃机（1）的运转发生变化的预定物理量的状态来判定内燃机（1）的停止的停止判定单元（步骤S2，S4）预定的确定时间（Ten），并且如果存在停止内燃机（1）的请求，则如果不存在请求，则用于将确定时间（Ten）设置为较短。

27. 发明授权

US06823827B2 Control apparatus of internal combustion engine and method thereof 有权
标题翻译：内燃机的控制装置及其方法
公开(公告)号：US06823827B2
公开(公告)日：2004-11-30
申请号：US10216433
申请日：2002-08-12
申请人： Masanori Sugiura , Hiroshi Tsujii , Ken Kuretake , Hideto Hanada , Takashi Kawai , Tomohiro Kaneko
发明人： Masanori Sugiura , Hiroshi Tsujii , Ken Kuretake , Hideto Hanada , Takashi Kawai , Tomohiro Kaneko
IPC分类号： F02N1108
CPC分类号： F02N11/0844 , F02D11/105 , F02D41/042 , F02D41/065 , F02N2250/06 , Y02T10/48
摘要： A control apparatus and method of an internal combustion engine performs a predetermined stop control of the engine that includes a control to stop the supply of fuel to the engine upon establishment of a predetermined stop condition, and a re-start control that includes a control to restart the supply of fuel to the engine in response to the establishment of a predetermined re-start condition. The apparatus has a stop control discontinuing device for discontinuing the stop control if the re-start condition is established within a predetermined period between establishment of the stop condition and a stop of the engine.
摘要翻译：内燃机的控制装置和方法执行包括在建立预定停止条件时停止向发动机供应燃料的控制的发动机的预定停止控制，以及包括控制到响应于建立预定的再启动条件，重新开始向发动机供应燃料。如果在建立停止条件和发动机停止之间的预定时间段内重新启动条件建立，则该装置具有停止停止控制的停止控制中断装置。

28. 发明授权

US09786533B2 Substrate processing apparatus, substrate processing method and storage medium 有权
公开(公告)号：US09786533B2
公开(公告)日：2017-10-10
申请号：US13564217
申请日：2012-08-01
申请人： Tomohiro Kaneko
发明人： Tomohiro Kaneko
IPC分类号： H01L21/677 , H01L21/67
CPC分类号： H01L21/67745 , H01L21/6715 , H01L21/67276 , H01L21/67766
摘要： Provided is a substrate processing apparatus which can efficiently transfer substrates using a conveying mechanism including a plurality of substrate holding members. The substrate processing apparatus transfers a processed substrate to an intermediate conveying unit using a transport mechanism when the processed substrate returns to a substrate receiving unit. When a conveying mechanism withdraws the processed substrate from the intermediate conveying unit and transfers the processed substrate to the substrate receiving unit, a control unit determines whether both of a first substrate processed first among a plurality of substrates withdrawn from the substrate receiving unit as a set and a succeeding substrate processed later than the first substrate should be transferred together after waiting until the succeeding substrate is transferred to the intermediate conveying unit or to transfer the first substrate without waiting for the succeeding substrate, when the first substrate is transferred to the intermediate conveying unit.

29. 发明授权

US08306646B2 Coating and developing apparatus, coating and developing method, and storage medium 有权
标题翻译：涂装和显影设备，涂层和显影方法以及存储介质
公开(公告)号：US08306646B2
公开(公告)日：2012-11-06
申请号：US12427123
申请日：2009-04-21
申请人： Tomohiro Kaneko , Takeshi Matsumoto
发明人： Tomohiro Kaneko , Takeshi Matsumoto
IPC分类号： G06F19/00
CPC分类号： H01L21/67288 , G05B2219/37224 , H01L21/67276
摘要： When a product substrate passes a reference module which is an n-th module ahead of an inspection module in a transfer path, an inspection reservation signal for performing an inspection to a lot to which the product substrate belongs is outputted to the inspection module. When the inspection module is in trouble, the output of an inspection reservation signal for a product substrate is forbidden, and the product substrates to be transferred to the inspection module are transferred to a module which is next to the inspection module in a transfer order. When the trouble of the inspection module has been resolved and a substrate for confirmation inspection is preferentially transferred to the inspection module, an inspection reservation signal for the substrate for confirmation inspection is outputted, the substrate for confirmation inspection is transferred to the inspection module, and the confirmation inspection for the inspection module is performed.
摘要翻译：当产品基板通过在传送路径中的检查模块前方的第n个模块的参考模块时，将用于对产品基板所属的批次进行检查的检查预约信号输出到检查模块。当检查模块处于故障状态时，禁止输出用于产品基板的检查预约信号，并且要传送到检查模块的产品基板以转移顺序传送到检查模块旁边的模块。当检查模块的故障已经解决，并且用于确认检查的基板优先地传送到检查模块时，输出用于确认检查的基板的检查预约信号，用于确认检查的基板被传送到检查模块，并且执行检查模块的确认检查。

30. 发明授权

US08261755B2 Fuel injection system of compression ignition internal combustion engine 失效
标题翻译：压燃式内燃机燃油喷射系统
公开(公告)号：US08261755B2
公开(公告)日：2012-09-11
申请号：US12597723
申请日：2008-04-28
申请人： Takashi Koyama , Hisashi Ohki , Masahiro Nagae , Kiyoshi Fujiwara , Tomohiro Kaneko , Takafumi Yamada , Hajime Shimizu , Seiji Ogura
发明人： Takashi Koyama , Hisashi Ohki , Masahiro Nagae , Kiyoshi Fujiwara , Tomohiro Kaneko , Takafumi Yamada , Hajime Shimizu , Seiji Ogura
IPC分类号： F02M59/36 , F02B3/00
CPC分类号： F02D41/402 , F02D41/068 , F02D41/403 , F02D2200/021 , F02D2200/0414 , F02D2200/101 , F02D2200/703 , F02M45/04 , Y02T10/44
摘要： An object of the present invention is to control the discharge amount of unburned fuel components in the internal combustion engine. According the present invention, the number of times of execution of sub fuel injection is changed based on the operation range within which the operation state of the internal combustion engine falls so that the lower the engine load of the internal combustion engine is, and the lower the number of engine revolutions of the internal combustion engine is, the more the number of times of execution of sub fuel injection is increased. Furthermore, the lower the atmospheric pressure is, the lower the temperature of the cooling water of the internal combustion engine is, or the lower the temperature of the intake air of the internal combustion engine is, the more an operation range in which the number of times of execution of sub fuel injection is large is expanded to higher loads and higher revolutions.
摘要翻译：本发明的目的在于控制内燃机中的未燃烧燃料成分的排出量。根据本发明，副燃料喷射的执行次数根据内燃机的运转状态下降到内燃机的发动机负荷下降的运转范围而变化，下燃内燃机的发动机转数为副燃料喷射次数增加越多。此外，大气压力越低，内燃机的冷却水的温度越低，内燃机的进气的温度越低，其操作范围越大，副燃油喷射执行次数大，扩大到更高的负荷和更高的转速。

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