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21. 发明授权

US07649188B2 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
公开(公告)号：US07649188B2
公开(公告)日：2010-01-19
申请号：US11783387
申请日：2007-04-09
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： H05G2/00
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.

22. 发明授权

US07903715B2 Slab type laser apparatus 有权
标题翻译：板式激光装置
公开(公告)号：US07903715B2
公开(公告)日：2011-03-08
申请号：US12482824
申请日：2009-06-11
申请人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi , Akira Endo
发明人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi , Akira Endo
IPC分类号： H01S3/22
CPC分类号： H01S3/076 , G03F7/70025 , G03F7/70033 , H01S3/005 , H01S3/0971 , H01S3/115 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/235 , H01S3/2375 , H01S5/141 , H01S5/4087
摘要： A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electric power. The apparatus includes an oscillator part including a pair of resonator mirrors oppositely disposed with a part of the gas laser medium part in between, and for amplifying a laser beam to have predetermined light intensity to emit the laser beam, and the amplifier part including a plurality of return mirrors oppositely disposed with a part of the gas laser medium part in between. The incident laser beam goes and returns plural times between the return mirrors, and the laser beam is amplified to have predetermined power.
摘要翻译：平板型激光装置具有板状气体激光介质部，该平板型气体激光介质部形成在由一对电极平板限定的区域中，该对电极平板彼此平行配置，以填充由高频激发的气体激光介质电力。该装置包括：振荡器部分，包括一对谐振器反射镜，该谐振器反射镜与气体激光介质部分的一部分相对设置，并且用于放大激光束以具有预定的光强度以发射激光束，并且放大器部件包括多个的反射镜与气体激光介质部分的一部分相对设置。入射激光束在返回镜之间返回多次，激光束被放大成具有预定的功率。

23. 发明申请

US20100193710A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS 有权
标题翻译：激光装置和极光超光源光源装置
公开(公告)号：US20100193710A1
公开(公告)日：2010-08-05
申请号：US12580523
申请日：2009-10-16
申请人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
发明人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
IPC分类号： H05G2/00 , H01S3/10 , H01S3/22 , H01S3/0941
CPC分类号： H01S3/2316 , B82Y20/00 , G03F7/70033 , H01S3/0007 , H01S3/107 , H01S3/2232 , H01S3/235 , H01S5/02284 , H01S5/0654 , H01S5/06837 , H01S5/0687 , H01S5/141 , H01S5/3402 , H01S5/4012 , H01S5/4062 , H01S5/4087
摘要： An extreme ultraviolet light source apparatus comprises a laser apparatus having a master oscillator outputting one or more longitudinal-mode-laser lights, an amplifier with a molecular gas as an amplifying agency amplifying a longitudinal-mode laser light of which wavelength is included in one of amplifiable lines, and a controller adjusting the master oscillator so that the wavelength of the longitudinal-mode laser light outputted from the master oscillator is included in one of the amplifiable lines, the laser apparatus being used as a driver laser, wherein the laser apparatus irradiates a target material with a laser light for generating plasma, and the extreme ultraviolet light is emitted from the plasma and outputted from the extreme ultraviolet light source apparatus.
摘要翻译：一种极紫外光源装置包括具有输出一个或多个纵模式激光灯的主振荡器的激光装置，具有分子气体的放大器作为放大器，放大其中包含波长的纵模式激光，以及调节主振荡器的控制器，使得从主振荡器输出的纵模激光的波长包括在可放大线之一中，激光装置用作驱动激光器，其中激光装置照射具有用于产生等离子体的激光的目标材料，并且从等离子体发射极紫外光并从极紫外光源装置输出。

24. 发明授权

US07502146B2 Image reading apparatus including reading unit having conductive abutting portion 失效
标题翻译：图像读取装置包括具有导电抵接部的读取单元
公开(公告)号：US07502146B2
公开(公告)日：2009-03-10
申请号：US10351509
申请日：2003-01-27
申请人： Ryo Hanashi , Takashi Suganuma
发明人： Ryo Hanashi , Takashi Suganuma
IPC分类号： H04N1/04
CPC分类号： H04N1/00976 , H04N1/1017 , H04N1/193 , H04N2201/0456
摘要： An image reading apparatus has a placing member where an original is placed, a reading unit for reading an image of the original in a way that moves relatively to the placing member, and a press member for pressing the reading unit against the placing member. The reading unit includes a conductive abutting portion coming into a contact with the placing member, and a grounding member for grounding the conductive abutting portion.
摘要翻译：一种图像读取装置具有放置原稿的放置构件，用于以相对于放置构件移动的方式读取原稿的图像的读取单元和用于将读取单元按压在放置构件上的按压构件。读取单元包括与放置构件接触的导电抵接部，以及用于使导电抵接部接地的接地构件。

25. 发明授权

US4623250A DC plasma jet generator for emission spectrochemical analysis 失效
标题翻译：直流等离子体射流发生器进行排放光谱分析
公开(公告)号：US4623250A
公开(公告)日：1986-11-18
申请号：US530122
申请日：1983-09-07
申请人： Koichi Onishi , Takashi Suganuma
发明人： Koichi Onishi , Takashi Suganuma
IPC分类号： G01N21/73 , H05H1/34
CPC分类号： G01N21/73 , H05H1/34 , H05H2001/3452
摘要： Improvements on a DC plasma jet generator for emission spectrochemical analysis wherein two anode blocks and one cathode block are positioned in an inverted Y shape, and each of the anode blocks has a cylinder, a piston, an an anode received by a recess in the end of the piston. Each anode can be secured in the recess at the end of the piston in the corresponding anode block by magnetic force. Each of the anode and cathode blocks is pivotable so that the associated electrode attached to each block can be fixed upright with the free end thereof directed upward. This means that the electrodes can be replaced easily as well as speedily by remote control using manipulators.
摘要翻译：用于发射光谱化学分析的DC等离子体射流发生器的改进，其中两个阳极块和一个阴极块被定位成倒置的Y形状，并且每个阳极块具有圆柱体，活塞，由端部的凹部容纳的阳极的活塞。每个阳极可以通过磁力固定在活塞端部的相应阳极块中的凹部中。阳极和阴极块中的每一个可枢转，使得附接到每个块的相关电极可以被固定成直立，其自由端朝上。这意味着可以通过使用操纵器的遥控器轻松更换电极。

26. 发明授权

US09036251B2 Slab amplification device, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：平板放大装置，激光装置和极紫外光发生系统
公开(公告)号：US09036251B2
公开(公告)日：2015-05-19
申请号：US13642464
申请日：2011-11-10
申请人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
发明人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
IPC分类号： H01S4/00 , H01S3/10 , H01S3/23 , H05G2/00 , H01S3/00 , H01S3/03
CPC分类号： H01S3/2366 , H01S3/005 , H01S3/0315 , H01S3/2375 , H05G2/008
摘要： An EUV light generation system includes a driver laser comprising a master oscillator such as a semiconductor laser, a spatial filter, gas slab amplification devices, relay optical systems, and high-speed axial-flow amplifiers. The slab amplification devices include beam adjusting optical units disposed, respectively, at input and output sides of the slab amplifiers SA to convert the beam profile and/or polarization direction and/or an elongated direction of the beam profile with the slab amplifiers is parallel to a free space axis AF of the slab waveguides, i.e. parallel to the discharge electrodes.
摘要翻译： EUV光发生系统包括：激光器，其包括诸如半导体激光器的主振荡器，空间滤波器，气体平板放大器件，中继光学系统和高速轴流放大器。平板放大装置包括光束调节光学单元，分别设置在平板放大器SA的输入和输出侧，以将平板放大器的光束轮廓和/或偏振方向和/或光束轮廓的细长方向平行于平板波导的自由空间轴AF，即平行于放电电极。

27. 发明授权

US08891161B2 Optical device, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：光学装置，激光装置和极紫外光发生系统
公开(公告)号：US08891161B2
公开(公告)日：2014-11-18
申请号：US13817818
申请日：2012-02-17
申请人： Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
发明人： Hakaru Mizoguchi , Takashi Suganuma , Hideo Hoshino , Osamu Wakabayashi
IPC分类号： H01S3/101
CPC分类号： H01S3/0071 , H01S3/0014 , H01S3/10061 , H01S3/1305 , H05G2/008
摘要： An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
摘要翻译：光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。

28. 发明授权

US08749876B2 Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system 有权
标题翻译：再生放大器，激光设备和极紫外光发生系统
公开(公告)号：US08749876B2
公开(公告)日：2014-06-10
申请号：US13121319
申请日：2011-03-07
申请人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
发明人： Krzysztof Nowak , Takashi Suganuma , Osamu Wakabayashi
IPC分类号： H01S3/05
CPC分类号： H01S3/05 , B82Y20/00 , H01S3/0315 , H01S3/08031 , H01S3/139 , H01S3/22 , H01S3/2232 , H01S3/2325 , H01S3/235 , H01S3/2366 , H01S3/2375 , H01S5/042 , H01S5/06 , H01S5/14 , H01S5/3401
摘要： A regenerative amplifier according to one aspect of this disclosure is used in combination with a laser device, and the regenerative amplifier may include: a pair of resonator mirrors constituting an optical resonator; a slab amplifier provided between the pair of the resonator mirrors for amplifying a laser beam with a predetermined wavelength outputted from the laser device; and an optical system disposed to configure a multipass optical path along which the laser beam is reciprocated inside the slab amplifier, the optical system transferring an optical image of the laser beam at a first position as an optical image of the laser beam at a second position.
摘要翻译：根据本公开的一个方面的再生放大器与激光装置组合使用，再生放大器可以包括：构成光谐振器的一对谐振器镜; 设置在所述一对所述谐振器镜之间用于放大从所述激光装置输出的预定波长的激光束的平板放大器; 以及光学系统，被配置为配置多个光路，激光束沿着该光路在所述平板放大器内部往复运动，所述光学系统将所述激光束的光学图像在第一位置处作为所述激光束的光学图像在第二位置。

29. 发明申请

US20110309270A1 LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES 审中-公开
标题翻译：激光装置，极光紫外线发光装置和用于维持装置的方法
公开(公告)号：US20110309270A1
公开(公告)日：2011-12-22
申请号：US13120998
申请日：2011-02-16
申请人： Yohichi Yamanouchi , Takashi Suganuma , Junichi Fujimoto , Osamu Wakabayashi , Hiroaki Nakarai , Hidenobu Kameda , Hitoshi Oga
发明人： Yohichi Yamanouchi , Takashi Suganuma , Junichi Fujimoto , Osamu Wakabayashi , Hiroaki Nakarai , Hidenobu Kameda , Hitoshi Oga
IPC分类号： G01J3/10 , H01S3/091
CPC分类号： G03F7/70975 , G03F7/70033 , H01S3/0071 , H01S3/03
摘要： Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface.
摘要翻译：提供一种激光装置，其安装在预定空间内并在预定的地板区域上，激光装置可包括：主振荡器; 至少一个放大单元，放大从主振荡器输出的激光束; 至少一个电源单元，其向所述至少一个放大器单元提供激励能量; 以及使所述至少一个放大器单元和所述至少一个电源单元中的至少一个能够在与地板表面平行的方向上移动的移动机构。

30. 发明授权

US07680158B2 LPP type extreme ultra violet light source apparatus and driver laser for the same 有权
标题翻译： LPP型极紫外光源装置和驱动激光器相同
公开(公告)号：US07680158B2
公开(公告)日：2010-03-16
申请号：US11242016
申请日：2005-10-04
申请人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
发明人： Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
IPC分类号： H01S3/10
CPC分类号： H01S3/2308 , B82Y10/00 , G03F7/70033 , H01S3/0057 , H01S3/08004 , H01S3/08009 , H01S3/1075 , H01S3/108 , H01S3/1083 , H01S3/1103 , H01S3/2232 , H01S3/23 , H01S3/235
摘要： A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
摘要翻译：用于EUV光源装置的驱动器激光器，其驱动器激光器同时实现短脉冲和多线振荡。驱动器激光器包括：短脉冲多线振荡CO 2激光振荡器，其具有缩短包括在要输出的激光束中的脉冲的宽度的装置，以及抑制表现出能量峰值的振荡频谱的幅度的装置; 以及至少一个放大器，其输入从短脉冲多线振荡的CO 2激光振荡器输出的激光束，并放大输入的激光束以输出放大的激光束。

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