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    • 23. 发明申请
    • PIEZOELECTRIC ACTUATOR INKJET HEAD AND METHOD OF FORMING THE SAME
    • 压电致动器喷嘴头及其形成方法
    • US20100146756A1
    • 2010-06-17
    • US12712442
    • 2010-02-25
    • Tae-kyung LEEJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • Tae-kyung LEEJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • H01L41/22
    • B41J2/14233B41J2002/14491Y10T29/42Y10T29/49002Y10T29/49005Y10T29/4908
    • A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
    • 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极,形成在下电极上的与每个压力室对应的位置处的压电层,形成在下电极上的支撑焊盘,支撑焊盘接触压电体的一端 并且离开压电层的一端延伸,以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路,以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成,并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分,并且第二部分可以比第一部分更宽。
    • 25. 发明授权
    • Piezoelectric actuator of an ink-jet printhead and method for forming the same
    • 喷墨打印头的压电致动器及其形成方法
    • US07364275B2
    • 2008-04-29
    • US10805430
    • 2004-03-22
    • Seung-mo LimJae-woo ChungJae-chang Lee
    • Seung-mo LimJae-woo ChungJae-chang Lee
    • B41J2/45H01L41/24H01L41/08
    • B41J2/1629B41J2/14233B41J2/161B41J2/1628B41J2/1631B41J2/1646H01L41/0973H01L41/314Y10T29/42
    • A piezoelectric actuator for providing a driving force to a pressure chamber of an ink-jet printhead for ejecting ink by deforming a vibration plate, the vibration plate forming an upper wall of the pressure chamber, the piezoelectric actuator including a lower electrode formed on the vibration plate, a piezoelectric film having either: (a) peripheral portions, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber and having a space between the peripheral portions and the lower electrode, or (b) a lateral surface, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber, the lateral surface of the piezoelectric film substantially forming a right angle with respect to a top surface of the lower electrode, and an upper electrode formed on the piezoelectric film for applying a voltage to the piezoelectric film.
    • 一种压电致动器,用于通过使振动板变形来向喷墨打印头的压力室提供驱动力,所述振动板形成所述压力室的上壁,所述压电致动器包括形成在所述振动上的下电极 压电薄膜具有:(a)周边部分,在与电解槽对应的位置处形成在下部电极上并且在周边部分和下部电极之间具有空间的压电薄膜,或者(b)横向 形成在下电极上的与压力室相对应的位置处的压电膜,压电膜的侧表面相对于下电极的上表面基本形成直角,以及上电极 用于向压电膜施加电压的压电膜。