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    • 1. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08850888B2
    • 2014-10-07
    • US13409039
    • 2012-02-29
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • G01C19/56G01P15/09
    • G01C19/56G01P15/09G01P15/14G01P2015/084
    • Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括:膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140,以便垂直地与质量体120的驱动方向相遇。 通过这种构造,通过在压电体130的厚度方向上收缩形成沟槽,以提供方向性,同时保持压电体130的刚性,以防止波在不必要的方向上传播,从而驱动惯性传感器100 在所需的特定方向。
    • 5. 发明授权
    • Piezoelectric actuator inkjet head and method of forming the same
    • 压电致动器喷墨头及其形成方法
    • US07682001B2
    • 2010-03-23
    • US11581333
    • 2006-10-17
    • Tae-kyung LeeJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • Tae-kyung LeeJae-woo ChungKyo-yeol LeeHwa-sun LeeSeung-mo LimJae-chang Lee
    • B41J2/045
    • B41J2/14233B41J2002/14491Y10T29/42Y10T29/49002Y10T29/49005Y10T29/4908
    • A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
    • 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极,形成在下电极上的与每个压力室对应的位置处的压电层,形成在下电极上的支撑焊盘,支撑焊盘接触压电体的一端 并且离开压电层的一端延伸,以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路,以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成,并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分,并且第二部分可以比第一部分更宽。