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21. 发明申请

US20060038984A9 System for detecting anomalies and/or features of a surface 有权
公开(公告)号：US20060038984A9
公开(公告)日：2006-02-23
申请号：US10360512
申请日：2003-02-06
申请人： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
发明人： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
IPC分类号： G01N21/00
CPC分类号： G01N21/95623 , G01N21/47 , G01N21/94 , G01N2201/1045
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.

22. 发明授权

US06891611B1 Sample inspection system 失效
标题翻译：样品检验系统
公开(公告)号：US06891611B1
公开(公告)日：2005-05-10
申请号：US10070079
申请日：1998-09-18
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N21/956 , G01J3/44 , G01N21/00 , G01N21/21 , G01N21/47 , G01N21/88 , G01N21/94 , G01N21/95 , H01L21/66
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.
摘要翻译：弯曲的镜面（78）用于收集由样品表面（76a）散射并由普通照明光束（70）和倾斜照明光束（90）产生的辐射。所收集的辐射被聚焦到检测器（80）。可以通过使用两个不同波长的辐射来区分源自正常和倾斜照明光束的散射辐射，通过有意地在由两个光束照射的光点之间引入偏移，或者通过切换正常和倾斜的照明光束（70,90）交替地关闭。可以通过检测倾斜照明光束的镜面反射并响应于其而改变照明方向来校正由样本高度的变化引起的光束位置误差。蝶形空间滤波器可以与曲面镜辐射收集器（78）一起使用，以将检测限制到某些方位角。

23. 发明授权

US06657715B2 Sample inspection system 有权
公开(公告)号：US06657715B2
公开(公告)日：2003-12-02
申请号：US09746415
申请日：2000-12-21
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N2100
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

24. 发明授权

US06618134B2 Sample inspection system 有权
公开(公告)号：US06618134B2
公开(公告)日：2003-09-09
申请号：US10033069
申请日：2001-12-27
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N2100
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

25. 发明授权

US06384910B2 Sample inspection system 有权
标题翻译：样品检验系统
公开(公告)号：US06384910B2
公开(公告)日：2002-05-07
申请号：US09745492
申请日：2000-12-21
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N2188
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.
摘要翻译：弯曲的镜面用于收集样品表面散射的辐射，并起源于正常照明光束和倾斜照明光束。收集的辐射被聚焦到检测器。可以通过使用两个不同波长的辐射，通过有意地在由两个光束照射的光斑之间引入偏移，或者通过交替地切换正常和倾斜照明光束来区分源自正常和倾斜照明光束的散射辐射。可以通过检测倾斜照明光束的镜面反射并响应于其而改变照明方向来校正由样本高度的变化引起的光束位置误差。蝶形空间滤波器可以与曲面镜辐射收集器一起使用，以将检测限制在某些方位角。

26. 发明申请

US20080002193A1 SYSTEM FOR DETECTING ANOMALIES AND/OR FEATURES OF A SURFACE 审中-公开
标题翻译：用于检测表面异常和/或特征的系统
公开(公告)号：US20080002193A1
公开(公告)日：2008-01-03
申请号：US11855935
申请日：2007-09-14
申请人： Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Stanley Stokowski , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： G01N21/9501
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
摘要翻译：使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。

27. 发明授权

US07079238B2 Sample inspection system 失效
公开(公告)号：US07079238B2
公开(公告)日：2006-07-18
申请号：US10437829
申请日：2003-05-13
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N21/00
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

28. 发明申请

US20050206886A1 Sample inspection system 审中-公开
公开(公告)号：US20050206886A1
公开(公告)日：2005-09-22
申请号：US11126467
申请日：2005-05-10
申请人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stanley Stokowski , Guoheng Zhao
IPC分类号： G01N21/956 , G01J3/44 , G01N21/00 , G01N21/21 , G01N21/47 , G01N21/88 , G01N21/94 , G01N21/95 , H01L21/66
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.

29. 发明申请

US20050141810A1 Illumination apparatus and methods 有权
标题翻译：照明装置和方法
公开(公告)号：US20050141810A1
公开(公告)日：2005-06-30
申请号：US11015852
申请日：2004-12-15
申请人： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
发明人： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
IPC分类号： G02B6/00 , G02B6/04 , G02B6/32 , G02B27/48
CPC分类号： G02B27/48 , G02B6/0001 , G02B6/04
摘要： Disclosed are apparatus and methods for illuminating a sample, e.g., during an inspection of such sample for defects. In one aspect, the illumination apparatus includes a bundle of fibers that each have a first end and a second end. The illumination apparatus further includes an illumination selector for selectively transmitting one or more incident beams into one or more corresponding first ends of the optical fibers so that the selected one or more incident beams are output from one or more corresponding second ends of the fibers. The illumination apparatus also includes a lens arrangement for receiving the selected one or more incidents beams output from the corresponding one or more second ends of the fibers and directing the selected one or more incident beams towards the sample. The lens arrangement and the fibers are arranged with respect to each other so as to image an imaging plane of the sample at the second ends of the fibers. In one aspect, the incident beams are laser beams. In a specific application of the invention, the sample is selected from a group consisting of a semiconductor device, a semiconductor wafer, and a semiconductor reticle.
摘要翻译：公开了用于照亮样品的装置和方法，例如在检查这种样品的缺陷时。一方面，照明装置包括一束纤维，每束纤维具有第一端和第二端。照明装置还包括照明选择器，用于选择性地将一个或多个入射光束传输到光纤的一个或多个相应的第一端中，使得所选择的一个或多个入射光束从光纤的一个或多个对应的第二端输出。照明设备还包括透镜装置，用于接收从光纤的对应的一个或多个第二端输出的所选择的一个或多个事件光束，并将所选择的一个或多个入射光束引向样品。透镜布置和光纤相对于彼此布置，以便在纤维的第二端成像样品的成像平面。一方面，入射光束是激光束。在本发明的具体应用中，样品选自半导体器件，半导体晶片和半导体掩模版。

30. 发明申请

US20050110986A1 Scanning system for inspecting anamolies on surfaces 审中-公开
标题翻译：用于检查表面上的烟雾的扫描系统
公开(公告)号：US20050110986A1
公开(公告)日：2005-05-26
申请号：US11020603
申请日：2004-12-21
申请人： Mehrdad Nikoonahad , Stanley Stokowski , Keith Wells , Brian Leslie
发明人： Mehrdad Nikoonahad , Stanley Stokowski , Keith Wells , Brian Leslie
IPC分类号： G01N21/94 , G01N21/95 , G01N21/956 , G01N21/88
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/956
摘要： An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity/autoposition channel, an alignment/registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity/autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment/registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the present system.
摘要翻译：一种光学扫描系统和方法，用于使用光束，相对于表面以掠射角扫描，在图案化和未图案化的表面上检测包括图案缺陷和颗粒污染物的异常，多个检测器和通道间通信方案，比较每个检测器的数据，这有助于表征异常。光束照射在短扫描线上扫描的表面上的斑点。表面以使得斑点沿着相邻条纹区域以蛇形方式在其整个区域上扫描的方式移动。多个检测器包括围绕表面周向设置的集电极通道组，亮场反射率/自动对位通道，对准/配准通道和成像通道。每个组中的收集器通道在扫描线的中心的相对侧对称地设置在方位角上。收集器通道的位置以及光束的极化有助于区分图案缺陷和颗粒污染物。亮场反射率/自动定位通道被定位成接收镜面反射光，其携带关于反射率的局部变化的信息，其用于对检测到的异常进行分类，以及确定表面高度的变化。定位/配准通道用于检测从表面上的图案散射的光的最大值，以确保表面上存在的模具的街道被定向成相对于扫描线不倾斜。成像通道结合了扫描系统和成像系统的优点，同时提高了本系统的信号/背景比。

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