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    • 26. 发明授权
    • Temperature monitoring unit
    • 温度监测单元
    • US5242224A
    • 1993-09-07
    • US823364
    • 1992-01-21
    • Shunsuke YoshiokaKenichi HisamatsuKeiji YoshikawaShozo KanekoNobuya Watanabe
    • Shunsuke YoshiokaKenichi HisamatsuKeiji YoshikawaShozo KanekoNobuya Watanabe
    • G01J5/08
    • G01J5/0022G01J5/08G01J5/0806G01J5/0809G01J5/0818G01J5/084G01J5/0856G01J5/0893G01J5/026Y10S236/15
    • A temperature monitoring unit has a high degree of sensitivity and reliability even when monitoring the temperature of a relatively large rotary heating element. The temperature monitoring unit includes a mirror which is provided in the vicinity of the rotary heating element and is oriented to reflect infrared rays from the heating element in the radial direction thereof, the mirror being reciprocated linearly in the radial direction, a condenser lens provided radially outwardly of the heating element for converging the infrared rays reflected by the mirror, an infrared sensor on which the converged rays impinge, a plate provided between the mirror and the lens and which has a slit therein that is elongate in a direction approximately perpendicular to the surface of the heating element, and an image processor receiving the output of the infrared sensor. The sensitivity is high because infrared rays from around the thermal point of the heating element are blocked by the plate. Moreover, because the visual field is elongate in the radial direction of the heating element, the mirror can quickly scan the entirety of the heating element.
    • 即使在监视较大的旋转加热元件的温度的情况下,温度监视单元也具有高度的灵敏度和可靠性。 温度监视单元包括设置在旋转加热元件附近的反射镜,其被定向成反射从加热元件沿其径向的红外线,反射镜在径向方向上往复运动,聚光透镜径向设置 在加热元件的外侧,用于会聚由镜反射的红外线,会聚光线所在的红外传感器,设置在反射镜和透镜之间的板,其中具有狭缝,该狭缝在大致垂直于 加热元件的表面和接收红外线传感器的输出的图像处理器。 灵敏度高,因为来自加热元件的热​​点附近的红外线被板阻挡。 此外,由于视野在加热元件的径向方向上是细长的,反射镜可以快速扫描整个加热元件。
    • 29. 发明授权
    • Method and apparatus for forming thin film
    • 用于形成薄膜的方法和装置
    • US4901669A
    • 1990-02-20
    • US47328
    • 1987-05-08
    • Takashi YamamotoShozo KanekoTadashi GengoJoji IchinariHiroshi FujiyamaYoshio KayumiMasayoshi Murata
    • Takashi YamamotoShozo KanekoTadashi GengoJoji IchinariHiroshi FujiyamaYoshio KayumiMasayoshi Murata
    • C23C16/517H01L21/205
    • C23C16/517H01L21/02532H01L21/0262
    • The present invention is directed to a method for forming a thin film on a substrate by the use of a glow discharge plasma which comprises generating a magnetic field in a direction which crosses an electric field for discharge at right angles and fluctuating the magnetic field. The present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, means for reducing the pressure in the reaction vessel and means for introducing the feed of reaction gases to the reaction vessel, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for causing a glow discharge is fed to the electrodes for discharge, a coil surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles to an electric field generated between the electrodes for discharge, and an AC power source for generating a magnetic field fed to the coil, whereby a thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.
    • 本发明涉及一种通过使用辉光放电等离子体在衬底上形成薄膜的方法,该方法包括在与电场交叉的方向上产生磁场,以便以直角放电并使磁场发生波动。 本发明还涉及一种用于实施上述方法的装置,该装置由反应容器,用于降低反应容器内的压力的装置和将反应气体进料引入反应容器的装置,排出电极 面对面设置在反应容器内,将用于引起辉光放电的电压供给到放电用电极的电源,围绕放电用电极的线圈,用于沿垂直方向交叉的方向产生磁场 在用于放电的电极之间产生的电场和用于产生馈送到线圈的磁场的AC电源,由此在支撑在放电电场的范围外并与该方向平行的基板上形成薄膜 的电场。