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    • 21. 发明授权
    • Semiconductor device provided with a field-effect transistor and method of manufacturing the same
    • 具有场效晶体管的半导体装置及其制造方法
    • US06232640B1
    • 2001-05-15
    • US09413513
    • 1999-10-06
    • Masakazu OkadaKeiichi Higashitani
    • Masakazu OkadaKeiichi Higashitani
    • H01L2972
    • H01L29/0847H01L21/823878H01L29/0657H01L29/41725H01L29/665
    • A semiconductor device can reduce a leak current, and a manufacturing method can provide such a semiconductor device. A semiconductor device includes an isolating and insulating film formed on a main surface of a semiconductor substrate including a first conductivity type region, and also includes a field-effect transistor. The field-effect transistor includes a second conductivity type region neighboring to the isolating and insulating film, a gate electrode, a lower layer side wall film formed on a side surface of the gate electrode, an upper layer side wall film formed on the lower layer side wall film and containing a material different from that of the lower layer side wall film, and a high-melting-point metal silicide layer formed on the second conductivity type region. The upper surface of the isolating and insulating film is located at a level substantially equal to or lower than the main surface of the semiconductor substrate and higher than a junction boundary surface between the first and second conductivity type regions.
    • 半导体器件可以减少泄漏电流,并且制造方法可以提供这种半导体器件。一种半导体器件包括形成在包括第一导电类型区域的半导体衬底的主表面上的隔离和绝缘膜,并且还包括场 - 影响晶体管。 场效应晶体管包括与隔离绝缘膜相邻的第二导电类型区域,栅电极,形成在栅电极的侧表面上的下层侧壁膜,形成在下层上的上层侧壁膜 并且含有与下层侧壁膜不同的材料,以及形成在第二导电类型区域上的高熔点金属硅化物层。 隔离绝缘膜的上表面位于基本上等于或低于半导体衬底的主表面的水平面,并且高于第一和第二导电类型区域之间的结界面。
    • 24. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
    • 半导体器件及其制造方法
    • US20110001246A1
    • 2011-01-06
    • US12883031
    • 2010-09-15
    • Takeshi FURUSAWATakao KamoshimaMasatsugu AmishiroNaohito SuzumuraShoichi FukuiMasakazu Okada
    • Takeshi FURUSAWATakao KamoshimaMasatsugu AmishiroNaohito SuzumuraShoichi FukuiMasakazu Okada
    • H01L23/48
    • H01L21/76832H01L21/76834H01L21/76883
    • The reliability of a semiconductor device having an embedded wire in the lowest layer wire is improved. In a main surface of a semiconductor substrate, MISFETs are formed and over the main surface, insulating films 10, 11 are formed. In the insulating films 10, 11 a contact hole is formed and a plug is embedded therein. Over the insulating film 11 in which the plug is embedded, insulating films 14, 15, 16 are formed and an opening is formed in the insulating films 14, 15, 16 and a wire is embedded therein. The insulating film 15 is an etching stopper film when etching the insulating film 16 in order to form the opening, containing silicon and carbon. The insulating film 11 has a high hygroscopicity and the insulating film 15 has a low moisture resistance, however, by interposing the insulating film 14 therebetween and making the insulating film 14 have a higher density of the number of Si (silicon) atoms than that of the insulating film 11, an electrically weak interface is prevented from being formed.
    • 提高了在最低层布线中具有嵌入线的半导体器件的可靠性。 在半导体衬底的主表面中,形成MISFET,并且在主表面上形成绝缘膜10,11。 在绝缘膜10,11中形成有接触孔,并且插入插头。 在插入插头的绝缘膜11上形成绝缘膜14,15,16,并且在绝缘膜14,15,16中形成开口,并且在其中嵌入线。 绝缘膜15是在蚀刻绝缘膜16以形成包含硅和碳的开口时的蚀刻停止膜。 绝缘膜11具有高的吸湿性,绝缘膜15具有低的耐湿性,然而,通过在其间插入绝缘膜14,使得绝缘膜14具有比Si(硅)原子数更高的Si(硅)原子数 绝缘膜11,电阻弱的界面被防止形成。
    • 27. 发明申请
    • Liquid crystal display
    • 液晶显示器
    • US20050140864A1
    • 2005-06-30
    • US11018981
    • 2004-12-21
    • Mitsuyoshi MiyaiJun YamadaMasakazu OkadaKeiichi FurukawaTomoo Izumi
    • Mitsuyoshi MiyaiJun YamadaMasakazu OkadaKeiichi FurukawaTomoo Izumi
    • C09K19/02G02F1/1335G02F1/137
    • G02F1/133504G02F1/13718G02F2001/133541G02F2203/02
    • A liquid crystal display apparatus having a circular polarizer (composed of a linear polarizer and a retardation film), a scattering layer and a liquid crystal display which are stacked one upon another. The liquid crystal display has a chiral nematic liquid crystal layer between substrates, and electrodes and aligning layers are provided on mutually opposite surfaces of the substrates. The chiral nematic liquid crystal changes between a planar state and a focal-conic state in accordance with a voltage applied thereto through the electrodes. When the liquid crystal is in a planar state, light reflected by the electrode formed on the substrate located farther from an observing side is absorbed in the circular polarizer, and a black display is made. When the liquid crystal is in a focal-conic state, light reflected by the electrode formed on the substrate located farther from the observing side passes through the circular polarizer, and a white display is made. In this moment, the light reflected by the electrode is scattered by a scattering layer, and the directivity of the reflected light is weakened.
    • 具有彼此层叠的圆偏振器(由线偏振器和延迟膜构成),散射层和液晶显示器的液晶显示装置。 液晶显示器在基板之间具有手性向列型液晶层,并且电极和对准层设置在基板的彼此相对的表面上。 根据通过电极施加到其上的电压,手征向列液晶在平面状态和焦点锥形状态之间变化。 当液晶处于平面状态时,形成在远离观察侧的基板上形成的电极的光被圆偏振器吸收,并进行黑色显示。 当液晶处于焦锥状态时,由形​​成在远离观察侧的基板上形成的电极反射的光通过圆偏振片,并进行白色显示。 此时,由电极反射的光被散射层散射,反射光的方向性变弱。
    • 28. 发明申请
    • Liquid crystal display element and method of producing the same
    • 液晶显示元件及其制造方法
    • US20050007531A1
    • 2005-01-13
    • US10901885
    • 2004-07-29
    • Masakazu OkadaKiyofumi HashimotoMitsuyoshi Miyai
    • Masakazu OkadaKiyofumi HashimotoMitsuyoshi Miyai
    • G02F1/136G02F1/1333G02F1/1337G02F1/1347G02F1/137
    • G02F1/1347G02F1/133707G02F1/133753G02F1/13718G02F2001/133757
    • (1) A liquid crystal display element including a liquid crystal layer including liquid crystal contained between a pair of substrates and exhibiting a cholesteric phase, wherein an orientation film is arranged on at least one of the paired substrates, and is in contact with the liquid crystal layer, and liquid crystal molecular orientation processing for portions of each orientation film corresponding to pixel regions are effected in a manner different from that effected on at least a portion of a portion corresponding to non-pixel region of the orientation film on at least one of the substrates. (2) A liquid crystal light modulation element including a liquid crystal layer held between a pair of substrate and including a liquid crystal material exhibiting a cholesteric phase in a room temperature and having a peak of a selective reflection wavelength in a visible wavelength range, wherein the liquid crystal layer in the selective reflection state has pixel regions neighboring to the opposite substrates, respectively, and liquid crystal domains in the pixel regions neighboring to at least one of the substrates are in a mixed state of a polydomain state and a monodomain state.
    • (1)一种液晶显示元件,其特征在于,具有包含液晶的液晶层,所述液晶层包含在一对基板之间并具有胆甾醇相,其中取向膜配置在所述成对基板中的至少一个上,并且与所述液体接触 对于与像素区域相对应的各取向膜的部分的液晶分子取向处理,以不同于对至少一个取向膜的非像素区域的至少一部分的方式进行的液晶分子取向处理 的基材。 (2)一种液晶光调制元件,其包括保持在一对基板之间的液晶层,并且在室温下包含呈现胆甾醇相的液晶材料,并且在可见光波长范围内具有选择性反射波长的峰值,其中 选择反射状态的液晶层分别具有与相对基板相邻的像素区域,与至少一个基板相邻的像素区域中的液晶畴处于多晶畴状态和单畴状态的混合状态。
    • 29. 发明授权
    • Liquid crystal device having a resin wall using different resins with
different surface interactions structure and manufacturing method for
same
    • 具有使用具有不同表面相互作用结构的不同树脂的树脂壁的液晶装置及其制造方法
    • US6130738A
    • 2000-10-10
    • US71114
    • 1998-05-01
    • Takuji HatanoMasakazu Okada
    • Takuji HatanoMasakazu Okada
    • G02F1/13G02F1/1333G02F1/1337G02F1/1339
    • G02F1/133377
    • A liquid crystal device that includes a pair of substrates and a composite layer disposed between the substrates. The composite layer has a liquid crystal phase of a liquid crystal material and a resin phase of a resin. The liquid crystal device is made such that the resin phase comprises a resin wall structure which does not contain a substantial amount of the liquid crystal material. To enhance contrast and viewing angle, the resin phase has a rough surface which is sufficient to disarrange an orientation of molecules of the liquid crystal material. The invention is further directed to a method of manufacturing a liquid crystal device, which includes the steps of defining a mixing ratio of two kinds of resin raw materials that have different contact angles, mixing these kinds of resin raw materials, mixing the mixed raw material with a liquid crystal material, and separating the mixed material from the liquid crystal material. In a preferred embodiment the resulting resin phase would have a contact angle with respect to the liquid crystal material in the range of 11.degree. to 15.degree..
    • 一种液晶装置,包括一对基板和设置在基板之间的复合层。 复合层具有液晶材料的液晶相和树脂的树脂相。 液晶装置被制成使得树脂相包括不含有大量液晶材料的树脂壁结构。 为了增强对比度和视角,树脂相具有足以使液晶材料分子的取向歧化的粗糙表面。 本发明还涉及一种液晶装置的制造方法,其特征在于,包括以下步骤:确定两种具有不同接触角的树脂原料的混合比例,混合这些树脂原料,混合混合原料 与液晶材料一起分离混合材料。 在优选的实施方式中,所得到的树脂相相对于液晶材料的接触角在11°至15°的范围内。