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21. 发明授权

US08688398B2 Method and apparatus for robot calibrations with a calibrating device 有权
标题翻译：用于校准装置的机器人校准的方法和装置
公开(公告)号：US08688398B2
公开(公告)日：2014-04-01
申请号：US13523751
申请日：2012-06-14
申请人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
发明人： Vijay Sakhare , Sekar Krishnasamy , Mordechai Leska , Donald Foldenauer , Rinat Shimshi , Marvin L. Freeman , Jeffery Hudgens , Satish Sundar
IPC分类号： G01C17/38
CPC分类号： H01L21/681 , B25J9/1692 , G01B11/03 , G01B21/042 , G05B2219/37278 , G05B2219/37608 , G05B2219/39047 , G05B2219/39056 , H01L21/67742 , H01L21/67748
摘要： Described herein is a method and apparatus for performing calibrations on robotic components. In one embodiment, a method for performing robotic calibrations includes moving the calibrating device across a target (e.g., a wafer chuck). Next, the method includes measuring distances between light spots from the sensors and a perimeter of the target using the sensors located on the calibrating device. Next, the method includes determining a displacement of the calibrating device relative to a center of the target. Then, the method includes determining a rotation angle of the calibrating device relative to a system of coordinates of the target. Next, the method includes calibrating a robot position of the robot based on the displacement and rotation angle of the calibrating device with respect to the target.
摘要翻译：这里描述了一种用于对机器人部件执行校准的方法和装置。在一个实施例中，用于执行机器人校准的方法包括使校准装置跨越目标（例如，晶片卡盘）移动。接下来，该方法包括使用位于校准装置上的传感器来测量来自传感器的光点和目标周边之间的距离。接下来，该方法包括确定校准装置相对于目标的中心的位移。然后，该方法包括确定校准装置相对于目标系的坐标系的旋转角度。接下来，该方法包括基于校准装置相对于目标的位移和旋转角度来校准机器人的机器人位置。

22. 发明授权

US07997851B2 Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same 有权
标题翻译：适用于与其接口的多级装载锁定室，传送室和机器人的装置和方法
公开(公告)号：US07997851B2
公开(公告)日：2011-08-16
申请号：US12257262
申请日：2008-10-23
申请人： Robert B. Moore , Eric Ruhland , Satish Sundar , Mario David Silvetti
发明人： Robert B. Moore , Eric Ruhland , Satish Sundar , Mario David Silvetti
IPC分类号： B21D39/03
CPC分类号： H01L21/67742 , H01L21/67201 , Y10S414/135 , Y10T29/49826
摘要： A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
摘要翻译：公开了一种用于处理衬底的新设备。具有四个环境隔离室的多级装载锁定室与具有机器人组件的传送室接口。机器人组件具有两个臂，每个臂可随着机器人组件围绕其轴旋转而水平移动。臂可以到达负载锁的隔离室，以从底部隔离室接收衬底，将衬底输送到处理室，然后将衬底放置在上腔室中。负载锁定室中的隔离室可以具有可枢转地连接的盖，其可以打开以进入隔离室的内部。

23. 发明申请

US20100178137A1 SYSTEMS, APPARATUS AND METHODS FOR MOVING SUBSTRATES 审中-公开
标题翻译：用于移动基板的系统，装置和方法
公开(公告)号：US20100178137A1
公开(公告)日：2010-07-15
申请号：US12684754
申请日：2010-01-08
申请人： Prudhvi R. Chintalapati , Satish Sundar , Boris Axelrod , Mario Dave Silvetti , Tom K. Cho , Jeffrey A. Brodine , Jason K. Foster , Edward Ng
发明人： Prudhvi R. Chintalapati , Satish Sundar , Boris Axelrod , Mario Dave Silvetti , Tom K. Cho , Jeffrey A. Brodine , Jason K. Foster , Edward Ng
IPC分类号： H01L21/673 , H01L21/677
CPC分类号： H01L21/67742 , H01L21/68707
摘要： Systems, methods and apparatus are provided for moving substrates in electronic device manufacturing. In some aspects, end effectors having a base portion and at least three pads are provided. Each of the pads has a contact surface, and at least one of the contact surfaces has a curved shape. A substrate supported by the end effector may be moved at a relatively high lateral g-force without significant slipping relative to the pads. Additional aspects are provided.
摘要翻译：提供了用于在电子设备制造中移动基板的系统，方法和装置。在一些方面，提供具有基部和至少三个垫的末端执行器。每个垫具有接触表面，并且至少一个接触表面具有弯曲的形状。由端部执行器支撑的衬底可以以相对较高的横向g力移动，而不会相对于衬垫显着滑动。还提供了其他方面。

24. 发明申请

US20100145513A1 METHOD FOR MONITORING THE POSITION OF A SEMICONDUCTOR PROCESSING ROBOT 审中-公开
标题翻译：用于监测半导体加工机器人的位置的方法
公开(公告)号：US20100145513A1
公开(公告)日：2010-06-10
申请号：US12712091
申请日：2010-02-24
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G05B15/00 , G06F19/00 , H01L21/67
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器分离，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

25. 发明授权

US07695232B2 Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same 有权
标题翻译：多级装载锁定室，传送室和机器人适用于与其接口
公开(公告)号：US07695232B2
公开(公告)日：2010-04-13
申请号：US11424461
申请日：2006-06-15
申请人： Robert B. Moore , Eric Ruhland , Satish Sundar , Mario David Silvetti
发明人： Robert B. Moore , Eric Ruhland , Satish Sundar , Mario David Silvetti
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , H01L21/67201 , Y10S414/135 , Y10T29/49826
摘要： A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
摘要翻译：公开了一种用于处理衬底的新设备。具有四个环境隔离室的多级装载锁定室与具有机器人组件的传送室接口。机器人组件具有两个臂，每个臂可随着机器人组件围绕其轴旋转而水平移动。臂可以到达负载锁的隔离室，以从底部隔离室接收衬底，将衬底输送到处理室，然后将衬底放置在上腔室中。负载锁定室中的隔离室可以具有可枢转地连接的盖，其可以打开以进入隔离室的内部。

26. 发明申请

US20070292244A1 MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME 有权
标题翻译：多级负载锁定室，转移室和适用于与其相接的机器人
公开(公告)号：US20070292244A1
公开(公告)日：2007-12-20
申请号：US11424461
申请日：2006-06-15
申请人： ROBERT B. MOORE , Eric Ruhland , Satish Sundar , Mario David Silvetti
发明人： ROBERT B. MOORE , Eric Ruhland , Satish Sundar , Mario David Silvetti
IPC分类号： H01L21/677
CPC分类号： H01L21/67742 , H01L21/67201 , Y10S414/135 , Y10T29/49826
摘要： A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
摘要翻译：公开了一种用于处理衬底的新设备。具有四个环境隔离室的多级装载锁定室与具有机器人组件的传送室接口。机器人组件具有两个臂，每个臂可随着机器人组件围绕其轴旋转而水平移动。臂可以到达负载锁的隔离室，以从底部隔离室接收衬底，将衬底输送到处理室，然后将衬底放置在上腔室中。负载锁定室中的隔离室可以具有可枢转地连接的盖，其可以打开以进入隔离室的内部。

27. 发明申请

US20060219179A1 SUBSTRATE GRIPPING APPARATUS 失效
标题翻译：基板搬运装置
公开(公告)号：US20060219179A1
公开(公告)日：2006-10-05
申请号：US11423966
申请日：2006-06-14
申请人： Satish Sundar
发明人： Satish Sundar
IPC分类号： C23C16/00
CPC分类号： C23C16/4585 , H01L21/68 , H01L21/68728
摘要： In one embodiment, a substrate centering apparatus for centering a substrate on a substrate support is provided. In one embodiment, the invention comprises an apparatus that is mounted to an underside of a substrate support and includes a lever that projects upward through a support surface of the substrate support. The lever may be biased toward a center of the substrate support to contact an edge of a substrate. A mechanism is coupled to the lever and moves the lever radially outward to release the substrate. In one embodiment, the mechanism is actuated as the substrate support moves downward to a position that facilitates substrate handoff.
摘要翻译：在一个实施例中，提供了一种用于将衬底定心在衬底支撑件上的衬底定心装置。在一个实施例中，本发明包括安装到基板支撑件的下侧的装置，并且包括通过基板支撑件的支撑表面向上突出的杠杆。杠杆可以朝着基板支撑件的中心偏置以接触基板的边缘。机构联接到杠杆并且将杆径向向外移动以释放基板。在一个实施例中，当衬底支撑件向下移动到便于衬底切换的位置时，机构被致动。

28. 发明授权

US07107125B2 Method and apparatus for monitoring the position of a semiconductor processing robot 失效
标题翻译：用于监测半导体处理机器人的位置的方法和装置
公开(公告)号：US07107125B2
公开(公告)日：2006-09-12
申请号：US10697731
申请日：2003-10-29
申请人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
发明人： Pyongwon Yim , Satish Sundar , Vinay Shah , Mario David Silvetti , Douglas Kitajima , Venkatesh Babu , Visweswaren Sivaramakrishnan , Indrajit Lahiri , Surinder Bedi
IPC分类号： G05B15/00 , G05B19/00
CPC分类号： H01L21/67259 , H01L21/67766 , H01L21/681
摘要： A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true position. In one embodiment, the positioning system includes a robot, a controller, a motor sensor and a decoupled sensor. The robot has at least one motor for manipulating a linkage controlling the displacement of a substrate support coupled thereto. The motor sensor is provides the controller with motor actuation information utilized to move the substrate support. The decoupled sensor provides information indicative of the true position the substrate support that may be utilized to correct the robot's motion.
摘要翻译：提供了与传感系统配合以校正机器人运动的机器人定位系统。感测系统与常规用于控制机器人运动的传感器分离，从而提供机器人真实位置的可重复检测。在一个实施例中，定位系统包括机器人，控制器，马达传感器和去耦传感器。机器人具有至少一个用于操纵联动装置的电动机，控制联接到其上的衬底支架的位移。马达传感器为控制器提供用于移动基板支架的马达驱动信息。解耦传感器提供指示可用于校正机器人运动的基板支撑件的真实位置的信息。

29. 发明授权

US06327517B1 Apparatus for on-the-fly center finding and notch aligning for wafer handling robots 有权
标题翻译：用于晶片处理机器人的飞行中心发现和凹口对准的装置
公开(公告)号：US06327517B1
公开(公告)日：2001-12-04
申请号：US09626899
申请日：2000-07-27
申请人： Satish Sundar
发明人： Satish Sundar
IPC分类号： G06F1900
CPC分类号： H01L21/681
摘要： A system and an associated method for positioning a substrate includes transferring a substrate along a path intersecting a plane of a sensor beam; determining a center point and an orientation indicator of the substrate utilizing signals from the sensor beam; and positioning a substrate according to the center point and the orientation indicator of the substrate.
摘要翻译：用于定位衬底的系统和相关联的方法包括沿着与传感器束的平面相交的路径传送衬底; 使用来自传感器束的信号确定衬底的中心点和取向指示器; 并且根据基板的中心点和取向指示器来定位基板。

30. 发明授权

US5905302A Loadlock cassette with wafer support rails 失效
标题翻译：带有晶片支撑导轨的装载锁盒
公开(公告)号：US5905302A
公开(公告)日：1999-05-18
申请号：US752462
申请日：1996-11-18
申请人： Christopher Lane , Satish Sundar
发明人： Christopher Lane , Satish Sundar
IPC分类号： H01L21/673 , H01L23/02
CPC分类号： H01L21/67742 , H01L21/6719 , H01L21/67201
摘要： The present invention provides a wafer cassette generally comprising one or more wafer support plates defining two or more coplanar wafer seats, a movable stem supporting the wafer support plates, and an actuating member connected to the stem to move the wafer support plates.
摘要翻译：本发明提供了一种晶片盒，其通常包括限定两个或更多个共面晶片座的一个或多个晶片支撑板，支撑晶片支撑板的可移动的杆以及连接到杆的致动构件以移动晶片支撑板。

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