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    • 22. 发明申请
    • Thin-film piezoelectric resonator and filter circuit
    • 薄膜压电谐振器和滤波电路
    • US20070176513A1
    • 2007-08-02
    • US10581030
    • 2006-03-08
    • Ryoichi OharaNaoko YanaseKenya SanoTakaaki YasumotoKazuhiko Itaya
    • Ryoichi OharaNaoko YanaseKenya SanoTakaaki YasumotoKazuhiko Itaya
    • H01L41/09
    • H03H9/174H03H9/02125H03H9/132H03H9/588H03H9/605
    • It is possible to provide a resonator structure that does not cause a variation in anti-resonant frequency can be achieved, even if the cavity and the upper and lower electrode shift. A thin-film piezoelectric resonator includes: a lower electrode provided on the principal surface of the substrate so as to cover the cavity; a piezoelectric film provided on the lower electrode so as to be located above the cavity; and an upper electrode. The upper electrode includes: a main portion which overlaps a part of the cavity, a protruding portion connected to the main portion, an extension portion provided at the opposite side of the main portion. The length of the protruding portion in a direction perpendicular to a direction of connecting to the main portion is substantially the same as the length of the connecting portion in a direction perpendicular to a direction of connecting to the main portion.
    • 即使空腔和上下电极发生偏移,也可以提供不会引起抗共振频率变化的谐振器结构。 薄膜压电谐振器包括:设置在基板的主表面上以覆盖空腔的下电极; 设置在所述下电极上以便位于所述空腔上方的压电膜; 和上电极。 上部电极包括:与空腔的一部分重叠的主要部分,连接到主要部分的突出部分,设置在主要部分相对侧的延伸部分。 突出部分在垂直于与主要部分连接的方向的方向上的长度基本上与连接部分在垂直于连接主体部分的方向的方向上的长度相同。