会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 24. 发明授权
    • Non-planar capacitor and method of forming the non-planar capacitor
    • 非平面电容器和非平面电容器的形成方法
    • US08610249B2
    • 2013-12-17
    • US13434964
    • 2012-03-30
    • James P. Di SarroRobert J. Gauthier, Jr.Tom C. LeeJunjun LiSouvick MitraChristopher S. Putnam
    • James P. Di SarroRobert J. Gauthier, Jr.Tom C. LeeJunjun LiSouvick MitraChristopher S. Putnam
    • H01L21/02
    • H01L27/0805H01L21/845H01L27/1211H01L28/90H01L29/94
    • Disclosed herein are embodiments of non-planar capacitor. The non-planar capacitor can comprise a plurality of fins above a semiconductor substrate. Each fin can comprise at least an insulator section on the semiconductor substrate and a semiconductor section, which has essentially uniform conductivity, stacked above the insulator section. A gate structure can traverse the center portions of the fins. This gate structure can comprise a conformal dielectric layer and a conductor layer (e.g., a blanket or conformal conductor layer) on the dielectric layer. Such a non-planar capacitor can exhibit a first capacitance, which is optionally tunable, between the conductor layer and the fins and a second capacitance between the conductor layer and the semiconductor substrate. Also disclosed herein are method embodiments, which can be used to form such a non-planar capacitor and which are compatible with current state of the art multi-gate non-planar field effect transistor (MUGFET) processing.
    • 这里公开了非平面电容器的实施例。 非平面电容器可以包括在半导体衬底上方的多个鳍片。 每个翅片可以包括半导体衬底上的至少绝缘体部分和在绝缘体部分上方堆叠具有基本上均匀的导电性的半导体部分。 门结构可以穿过翅片的中心部分。 该栅极结构可以包括在电介质层上的共形介电层和导体层(例如,覆盖层或保形导体层)。 这种非平面电容器可以在导体层和散热片之间展现可选地可调谐的第一电容和导体层与半导体衬底之间的第二电容。 本文还公开了可用于形成这种非平面电容器并且与现有技术的多栅极非平面场效应晶体管(MUGFET)处理兼容的方法实施例。