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    • 22. 发明授权
    • Method of fabricating field effect transistors
    • 制造场效应晶体管的方法
    • US4503599A
    • 1985-03-12
    • US462014
    • 1983-01-28
    • Kiichi UeyanagiSusumu TakahashiYasunari UmemotoMichiharu Nakamura
    • Kiichi UeyanagiSusumu TakahashiYasunari UmemotoMichiharu Nakamura
    • H01L29/78H01L21/033H01L21/336H01L21/338H01L29/417H01L29/80H01L29/812H01L21/265
    • H01L29/66522H01L21/033H01L29/66871H01L29/80H01L29/812
    • Herein disclosed is a field effect transistor fabricating method comprising: the step of forming a surface portion of a semiconductor substrate with an impurity region for a channel; the step of forming a first material layer, which has a width substantially equal to that of a gate electrode, in such a position on said semiconductor substrate and is to be formed with said gate electrode, a second material layer, which has a width larger than that of said first material layer, above said first material layer, and source and drain regions by an ion implantation using said first and second material layers thus formed as a mask; the step of forming source and drain electrodes in contact with said source and drain regions; the step of forming a third material layer, which has a selectivity with said first material layer in its etched characteristics, on the semiconductor body thus far prepared by the foregoing steps; the step of forming at least an aperture by removing said first material layer in a state using said third material layer as a mask; and the step of forming said gate electrode in said aperture.
    • 本文公开了一种场效应晶体管制造方法,包括:形成具有沟道杂质区的​​半导体衬底的表面部分的步骤; 在所述半导体衬底上形成具有与栅电极的宽度基本相等的第一材料层的步骤,并形成所述栅电极,第二材料层的宽度较大 比所述第一材料层的上述第一材料层的上述第一材料层和通过使用由此形成的掩模的所述第一和第二材料层的离子注入的源极和漏极区域; 形成与所述源极和漏极区域接触的源极和漏极的步骤; 在上述步骤制备的半导体本体上形成第三材料层的步骤,该第三材料层具有其蚀刻特性中的所述第一材料层的选择性; 通过以使用所述第三材料层作为掩模的状态除去所述第一材料层来形成至少一个孔的步骤; 以及在所述孔中形成所述栅电极的步骤。
    • 24. 发明申请
    • Near-field light-emitting element and optical head
    • 近场发光元件和光头
    • US20090252002A1
    • 2009-10-08
    • US12457328
    • 2009-06-08
    • Kiichi UeyanagiMasayuki NayaYuichi Tomaru
    • Kiichi UeyanagiMasayuki NayaYuichi Tomaru
    • G11B11/00
    • G11B7/1387
    • A near-field light-emitting element includes a transparent medium having a plane of incidence into which a laser beam enters, and a light-condensing plane on which the laser beam having entered the plane of incidence is concentrated, and a metal body provided on the light-condensing plane of the transparent medium having a first surface contacting the light-condensing plane, a second surface opposing the first surface, and an aperture which is formed to penetrate through the first and second surfaces at a position where the laser beam is concentrated and which emits a near-field light obtained from the laser beam. The metal body is arranged apart from a center of the aperture by a predetermined distance to connect together the first and second surfaces, and has a plasmon reflection plane that reflects toward the aperture a surface plasmon excited on the first and second surfaces by the laser beam concentrated at the aperture.
    • 近场发光元件包括具有激光束入射的入射面的透明介质和进入入射平面的激光束集中的聚光面,以及设置在其上的金属体 所述透明介质的聚光面具有与所述聚光面接触的第一表面,与所述第一表面相对的第二表面,以及形成为穿过所述第一表面和所述第二表面的孔, 并且发射从激光束获得的近场光。 金属体与孔径的中心隔开预定的距离,以将第一和第二表面连接在一起,并且具有等离子体反射面,该等离子体反射面通过激光​​束向孔径反射在第一和第二表面上激发的表面等离子体激元 集中在光圈。
    • 30. 发明授权
    • Near-field magneto-optical head having a magnetic sensor
    • 具有磁传感器的近场磁光头
    • US06704250B1
    • 2004-03-09
    • US09547103
    • 2000-04-11
    • Kiichi Ueyanagi
    • Kiichi Ueyanagi
    • G11B1100
    • B82Y10/00G11B5/127G11B7/1387G11B11/10536G11B11/10554G11B11/1058G11B2005/0005G11B2005/0021
    • The present invention provides a recording/reproducing head, a recording/reproducing disk, and a recording/reproducing disk apparatus that are capable of high density recording, cost reduction, easy tracking control, and high speed seek operation. A collimated beam that is incident onto an incident surface of a transparent condensing medium is reflected on a reflecting film formed on the surface of a reflecting surface to condense on a second surface, and a beam spot is formed near the end of the second surface. The beam condensed on the beam spot leaks as a near field wave and is propagated to a magneto-optic recording film of a recording/reproducing disk, and information is OAM-recorded cooperatively with the magnetic field of a coil. In reproduction of the information, a leakage magnetic flux that comes from the recording film is detected by a magnetic sensor.
    • 本发明提供能够进行高密度记录,成本降低,易于跟踪控制和高速搜索操作的记录/再现盘,记录/再现盘和记录/再现盘装置。 入射到透明聚光介质的入射表面上的准直光束在形成在反射面的表面上的反射膜上反射,以在第二表面上冷凝,并且在第二表面的端部附近形成光斑。 在光束点上聚光的光束作为近场波泄漏,并被传播到记录/再现盘的磁光记录膜,并且信息与线圈的磁场协同地记录OAM。 在信息的再现中,通过磁传感器检测来自记录膜的漏磁通。