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    • 24. 发明申请
    • Method for forming a fully silicided semiconductor device
    • 形成全硅化半导体器件的方法
    • US20050266664A1
    • 2005-12-01
    • US10857726
    • 2004-05-28
    • Michael HarrisonOlubunmi AdetutuSam Garcia
    • Michael HarrisonOlubunmi AdetutuSam Garcia
    • H01L21/28H01L21/324H01L21/44
    • H01L21/324H01L21/28097
    • A method for forming an improved fully silicided gate electrode in a semiconductor device in which the fully silicided gate electrode is formed using indirect heating. One embodiment relates to a method of manufacturing at least one semiconductor device. The method includes depositing silicon to a first thickness, depositing metal over the silicon, and indirectly heating the metal and silicon to form a metal silicide having a second thickness not less than the first thickness. Another embodiment relates to a method of manufacturing semiconductor devices, each semiconductor device having a fully silicided control electrode. The method includes providing a substrate, forming a dielectric layer over the substrate, forming a silicon-containing layer over the dielectric layer, depositing a metal-containing layer over the silicon-containing layer, and indirectly heating the metal-containing and silicon-containing layers to form a silicide layer in contact with the dielectric layer.
    • 一种在半导体器件中形成改进的全硅化物栅电极的方法,其中使用间接加热形成全硅化栅电极。 一个实施例涉及制造至少一个半导体器件的方法。 该方法包括将硅沉积到第一厚度,在硅上沉积金属,并间接加热金属和硅以形成具有不小于第一厚度的第二厚度的金属硅化物。 另一实施例涉及制造半导体器件的方法,每个半导体器件具有完全硅化的控制电极。 该方法包括提供衬底,在衬底上形成电介质层,在电介质层上形成含硅层,在含硅层上沉积含金属层,并间接加热含金属和含硅的 以形成与介电层接触的硅化物层。
    • 28. 发明申请
    • Flexible laser safety curtain
    • 柔性激光安全帘
    • US20070258502A1
    • 2007-11-08
    • US11796556
    • 2007-04-27
    • Michael HarrisonJoseph FerrarioAshot Mesropyan
    • Michael HarrisonJoseph FerrarioAshot Mesropyan
    • H01S3/00
    • F16P1/06B23K26/706F16P1/02
    • A flexible laser safety curtain is disclosed that utilizes a plurality of columns flexibly attached to one another along their longitudinal edges in such a manner as to create a curtain of columns. The base of each column contains a cavity within which at least one moveable element, columnar in form, may be located and protrude from the cavity. The moveable element, when pressed against a work surface, is forced into the cavity. A biasing element within the cavity provides an opposite force on the moveable elements to both keep the moveable element in contact with the work surface, and to return the moveable element to its original position when the inward force is removed. The curtain's edge follows the contours of an uneven work surface and thereby the curtain provides a complete barrier to laser radiation.
    • 公开了一种灵活的激光安全帘幕,其利用沿其纵向边缘彼此柔性地附接的多个列,以便形成柱帘。 每列的基底包含空腔,在该空腔内至少有一个形状为圆柱形的可移动元件可以位于空腔内并从腔突出。 当可移动元件被压靠在工作表面上时,被迫进入空腔。 空腔内的偏置元件在可移动元件上提供相反的力,以将可移动元件保持与工作表面接触,并且当向内的力被移除时使可移动元件返回到其初始位置。 窗帘的边缘遵循不平坦的工作表面的轮廓,从而幕帘为激光辐射提供了完整的屏障。