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    • 21. 发明申请
    • METHOD OF MANUFACTURING ELECTRONIC COMPONENT
    • 制造电子元件的方法
    • US20110070713A1
    • 2011-03-24
    • US12882649
    • 2010-09-15
    • Hiroyuki Nansei
    • Hiroyuki Nansei
    • H01L21/02
    • H01L45/16H01L27/0207H01L27/24
    • According to one embodiment, a lower wiring layer is formed by using a sidewall transfer process for forming a sidewall film having a closed loop along a sidewall of a sacrificed or dummy pattern and, after removing the sacrificed pattern to leave the sidewall film, selectively removing the base material with the sidewall film as a mask. One or more upper wiring layers are formed in an upper layer of the lower wiring layer via another layer using the sidewall transfer process. Etching for cutting each of the lower wiring layer and the upper wiring layers is collectively performed, whereby closed-loop cut is applied to the lower wiring layer and the upper wiring layers.
    • 根据一个实施例,通过使用侧壁转移工艺形成下部布线层,所述侧壁转移工艺用于形成具有沿牺牲或虚拟图案的侧壁的闭环的侧壁膜,并且在去除牺牲图案以离开侧壁膜之后,选择性地去除 该基材以侧壁膜为掩模。 使用侧壁转移工艺,通过另一层在下布线层的上层中形成一个或多个上布线层。 共同进行用于切割下布线层和上布线层的蚀刻,由此对下布线层和上布线层施加闭环切割。
    • 22. 发明授权
    • Non-volatile memory and method of controlling the same
    • 非易失性存储器及其控制方法
    • US07274592B2
    • 2007-09-25
    • US11342947
    • 2006-01-30
    • Yukio HayakawaHiroyuki Nansei
    • Yukio HayakawaHiroyuki Nansei
    • G11C16/04
    • H01L29/66833G11C16/0475H01L27/115H01L27/11568H01L29/7923
    • A single cell that has a gate insulating film formed with an ONO film is provided in a region in which two bit lines cross one word line. The single cell is a four-bit multi-value cell, and has four charge accumulation regions. Two plug-like control electrodes are provided in the region surrounded by the word line and the bit lines. A bias is applied to one of the plug-like control electrodes and the word line so that the portion on the surface of the semiconductor substrate that is located immediately below the word line and corresponds to the location of the bias-applied control electrode is put into an accumulation state or a depletion state. In this manner, the width of the channel is adjusted, and the charge holding state of each of the four charge accumulation regions is controlled through the channel width adjustment.
    • 在两个位线交叉一个字线的区域中设置具有由ONO膜形成的栅极绝缘膜的单电池。 单个单元是四位多值单元,并具有四个电荷累积区。 在由字线和位线包围的区域中设置两个插塞状控制电极。 对一个插塞状控制电极和字线施加偏压,使得位于字线正下方并对应于施加偏压的控制电极的位置的半导体衬底的表面上的部分被放置 成为累积状态或耗尽状态。 以这种方式,调节通道的宽度,并且通过通道宽度调节来控制四个电荷累积区域中的每一个的电荷保持状态。
    • 28. 发明授权
    • Resistive change non-volatile semiconductor memory device
    • 电阻变化非易失性半导体存储器件
    • US08431919B2
    • 2013-04-30
    • US12883593
    • 2010-09-16
    • Hiroyuki Nansei
    • Hiroyuki Nansei
    • H01L45/00
    • H01L27/2481H01L27/2409H01L27/2472H01L27/249H01L45/04H01L45/06H01L45/1226H01L45/1253H01L45/146H01L45/147
    • According to one embodiment, a non-volatile semiconductor memory device includes: a semiconductor substrate; a plurality of first lines; a plurality of second lines; and a plurality of non-volatile memory cells arranged at positions where the plurality of first lines intersect with the plurality of second lines, wherein each of the plurality of non-volatile memory cells includes a resistance change element and a rectifying element connected in series to the resistance change element, and a resistance change film continuously extending over the plurality of second lines is arranged between the plurality of first lines and the plurality of second lines, and the resistance change element includes a portion where the first line intersect with the second line in the resistance change film.
    • 根据一个实施例,非易失性半导体存储器件包括:半导体衬底; 多条第一行; 多条第二线; 以及多个非易失性存储单元,其布置在所述多个第一线与所述多条第二线相交的位置处,其中所述多个非易失性存储单元中的每一个包括电阻变化元件和整流元件, 电阻变化元件和连续延伸在多条第二线上的电阻变化膜配置在多条第一线和多条第二线之间,电阻变化元件包括第一线与第二线相交的部分 在电阻变化膜。
    • 30. 发明授权
    • Non-volatile sonos-type memory device
    • 非挥发性声像型存储器件
    • US07888209B2
    • 2011-02-15
    • US12574884
    • 2009-10-07
    • Hiroyuki Nansei
    • Hiroyuki Nansei
    • H01L29/792
    • H01L27/11568H01L21/28282H01L27/115H01L29/66833H01L29/792
    • A semiconductor memory device with the thickness of both a tunnel film and a top film provided thereon configured to be in the FN tunneling region (4 nm or more). Data retention characteristics can be improved by configuring both a tunnel film and a top film to have a thickness in the FN tunneling region. Secondly, a high-concentration impurity region of a conductivity type the same as that of the substrate is provided in a substrate region arranged between assist gates provided adjacently to each other. The aforementioned high-concentration impurity region makes a depletion layer extremely thin when bias is applied to the assist gates. Hot holes generated between bands in the depletion region are injected into a charge storage region and the holes and electrons make pairs and disappear, enabling easy data erasing.
    • 一种半导体存储器件,其具有设置在其中的隧道膜和顶膜的厚度,配置为处于FN隧穿区域(4nm以上)。 通过配置隧道膜和顶部膜以在FN隧道区域中具有厚度可以改善数据保持特性。 其次,在布置在彼此相邻设置的辅助栅之间的衬底区域中设置与衬底相同的导电类型的高浓度杂质区。 当向辅助栅极施加偏压时,上述高浓度杂质区域使耗尽层非常薄。 在耗尽区域中的带之间产生的热孔注入电荷存储区域,并且空穴和电子成对并消失,从而使数据清除容易。