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    • 21. 发明授权
    • Field enhanced tunnel oxide on treated substrates
    • 处理基板上的场增强隧道氧化物
    • US4806202A
    • 1989-02-21
    • US104837
    • 1987-10-05
    • Daniel N. TangHimanshu ChoksiSimon WangSimon M. Tam
    • Daniel N. TangHimanshu ChoksiSimon WangSimon M. Tam
    • H01L21/316H01L21/28H01L21/302H01L21/3065H01L21/8247H01L29/788H01L29/792H01L21/312
    • H01L21/28273Y10S148/058Y10S438/964
    • A method for growing tunnel oxides on a specially treated substrate surface. The method comprises steps for roughening the substrate surface to induce low tunneling voltage in the subsequently grown tunnel oxide layer. The tunnel oxide layer is grown in a low temperature steam cycle to further provide enhanced tunneling. The surface treatment comprises the steps of growing a first oxide layer to seal the surface of the substrate followed by growing a second oxide on the first oxide layer. In the preferred embodiment, a plasma etch utilizing an oxide etcher with high energy ion bombardment and an aluminum electrode is utilized to etch through the first and second oxide layers. The aluminum electrode causes sputtered aluminum on the second oxide layer's surface. The sputtered aluminum blocks the anisotropic etching leaving a grass type oxide residue on the substrate surface. The etching continues, overetching into the substrate surface. The grass type oxide residue causes pitting to occur on the substrate surface. This pitting, resulting in sharpened features on the surface, yields enhanced tunneling characteristics for a subsequently grown tunnel oxide layer. The residue is then removed and the surface cleaned. The tunnel oxide layer is grown in a low temperture steam cycle to preserve and enhance the sharp tips for the purpose of enhanced tunneling.
    • 在特殊处理的基材表面上生长隧道氧化物的方法。 该方法包括用于使衬底表面粗糙化以在随后生长的隧道氧化物层中诱导低隧穿电压的步骤。 隧道氧化物层在低温蒸汽循环中生长以进一步提供增强的隧道。 表面处理包括生长第一氧化物层以密封衬底的表面,然后在第一氧化物层上生长第二氧化物的步骤。 在优选实施例中,利用利用具有高能离子轰击的氧化物蚀刻器和铝电极的等离子体蚀刻蚀刻穿过第一和第二氧化物层。 铝电极在第二氧化物层的表面上形成溅射的铝。 溅射的铝阻挡各向异性蚀刻,在基板表面上留下草型氧化物残留物。 蚀刻继续,过刻蚀进入衬底表面。 草型氧化物残留物在基材表面产生点蚀。 这种点蚀,导致在表面上锐化的特征,为随后生长的隧道氧化物层产生增强的隧穿特性。 然后将残余物除去并清洁表面。 隧道氧化物层在低温蒸汽循环中生长,以保护和增强锋利的尖端,以增强隧道的目的。
    • 27. 发明授权
    • Multiple synthesizer based timing signal generation scheme
    • 基于多合成器的定时信号生成方案
    • US06172937B2
    • 2001-01-09
    • US09309049
    • 1999-05-10
    • Alper IlkbaharSimon M. TamIan A. Young
    • Alper IlkbaharSimon M. TamIan A. Young
    • G11C800
    • G06F1/06
    • A multiple synthesizer based timing signal generation scheme is described that allows accurate data and strobe generation in high speed source synchronous system interfaces. Multiple loop locked clock synthesizers (e.g., phase locked loops, delay locked loops) are used to generate multiple clock signals. Data and strobe signals are triggered off of transitions of one of the clock signals. Because multiple loop locked clock synthesizers are used to generate the clock signals, optimal or near optimal alignment of the data and strobe signals can be achieved. Improved alignment of the data and strobe signals provides improved data transmission rates.
    • 描述了基于多合成器的定时信号生成方案,其允许在高速源同步系统接口中进行准确的数据和频闪生成。 多环路锁定时钟合成器(例如,锁相环,延迟锁定环)用于产生多个时钟信号。 数据和选通信号从一个时钟信号的转换触发。 由于使用多个环路锁定时钟合成器来产生时钟信号,所以可以实现数据和选通信号的最佳或接近最佳对准。 改进的数据和选通信号的对准提供了改进的数据传输速率。