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21. 外观设计

USD339962S Sugar bowl 失效
公开(公告)号：USD339962S
公开(公告)日：1993-10-05
申请号：US669290
申请日：1991-03-14
申请人： John Holland
设计人： John Holland

22. 发明授权

US09275887B2 Substrate processing with rapid temperature gradient control 有权
标题翻译：基板加工快速温度梯度控制
公开(公告)号：US09275887B2
公开(公告)日：2016-03-01
申请号：US11778019
申请日：2007-07-14
申请人： Alexander Matyushkin , Dan Katz , John Holland , Theodoros Panagopoulos , Michael D. Willwerth
发明人： Alexander Matyushkin , Dan Katz , John Holland , Theodoros Panagopoulos , Michael D. Willwerth
IPC分类号： B05C11/00 , H01L21/683 , H01L21/67 , B05C13/00
CPC分类号： H05B3/0047 , B05C13/00 , H01L21/67109 , H01L21/67248 , H01L21/6831 , H01L21/6833
摘要： A substrate processing chamber comprises an electrostatic chuck comprising a ceramic puck having a substrate receiving surface and an opposing backside surface. In one version, the ceramic puck comprises a thickness of less than 7 mm. An electrode is embedded in the ceramic puck to generate an electrostatic force to hold a substrate, and heater coils in the ceramic puck allow independent control of temperatures at different heating zones of the puck. A chiller provides coolant to coolant channels in a base below the ceramic puck. A controller comprises temperature control instruction sets which set the coolant temperature in the chiller in relation prior to ramping up or down of the power levels applied to the heater.
摘要翻译：基板处理室包括静电卡盘，该静电卡盘包括具有基板接收表面和相对的背面的陶瓷盘。在一个版本中，陶瓷盘包括小于7mm的厚度。电极嵌入陶瓷盘中以产生静电力来保持基板，并且陶瓷盘中的加热器线圈允许独立地控制在不同加热区域的温度。冷却器为陶瓷盘下方的底座中的冷却剂通道提供冷却剂。控制器包括温度控制指令集，其将冷却器内的冷却剂温度设定为在施加到加热器的功率水平上升或下降之前。

23. 发明授权

US08663391B2 Electrostatic chuck having a plurality of heater coils 有权
标题翻译：具有多个加热器线圈的静电卡盘
公开(公告)号：US08663391B2
公开(公告)日：2014-03-04
申请号：US13556156
申请日：2012-07-23
申请人： Alexander Matyushkin , Dennis Koosau , Theodoros Panagopoulos , John Holland
发明人： Alexander Matyushkin , Dennis Koosau , Theodoros Panagopoulos , John Holland
IPC分类号： C23C16/458 , C23C16/46 , C23F1/00 , H01L21/306 , A21B1/00 , A21B1/22
CPC分类号： H01L21/6831 , H01L21/67109 , H01L21/6875 , Y10T279/23
摘要： An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface having a plurality of spaced apart mesas, an opposing backside surface, and central and peripheral portions. A plurality of heat transfer gas conduits traverse the ceramic puck and terminate in ports on the substrate receiving surface to provide heat transfer gas to the substrate receiving surface. An electrode is embedded in the ceramic puck to generate an electrostatic force to retain a substrate placed on the substrate receiving surface. A plurality of heater coils are also embedded in the ceramic puck, the heaters being radially spaced apart and concentric to one another.
摘要翻译：用于在衬底处理室中接收衬底的静电吸盘包括具有衬底接收表面的陶瓷盘，所述衬底接收表面具有多个间隔开的台面，相对的背面以及中央和周边部分。多个传热气体导管穿过陶瓷盘并终止在基板接收表面上的端口中，以向基板接收表面提供传热气体。将电极嵌入陶瓷盘中以产生静电力以保持放置在基板接收表面上的基板。多个加热器线圈也嵌入在陶瓷盘中，加热器径向间隔开并且彼此同心。

24. 发明申请

US20120285619A1 ELECTROSTATIC CHUCK HAVING A PLURALITY OF HEATER COILS 有权
标题翻译：具有多种加热线圈的静电卡盘
公开(公告)号：US20120285619A1
公开(公告)日：2012-11-15
申请号：US13556156
申请日：2012-07-23
申请人： Alexander Matyushkin , Dennis Koosau , Theodoros Panagopoulos , John Holland
发明人： Alexander Matyushkin , Dennis Koosau , Theodoros Panagopoulos , John Holland
IPC分类号： C23C16/458 , H01L21/683 , B44C1/22
CPC分类号： H01L21/6831 , H01L21/67109 , H01L21/6875 , Y10T279/23
摘要： An electrostatic chuck for receiving a substrate in a substrate processing chamber comprises a ceramic puck having a substrate receiving surface having a plurality of spaced apart mesas, an opposing backside surface, and central and peripheral portions. A plurality of heat transfer gas conduits traverse the ceramic puck and terminate in ports on the substrate receiving surface to provide heat transfer gas to the substrate receiving surface. An electrode is embedded in the ceramic puck to generate an electrostatic force to retain a substrate placed on the substrate receiving surface. A plurality of heater coils are also embedded in the ceramic puck, the heaters being radially spaced apart and concentric to one another.
摘要翻译：用于在衬底处理室中接收衬底的静电吸盘包括具有衬底接收表面的陶瓷盘，所述衬底接收表面具有多个间隔开的台面，相对的背面以及中央和周边部分。多个传热气体导管穿过陶瓷盘并终止在基板接收表面上的端口中，以向基板接收表面提供传热气体。将电极嵌入陶瓷盘中以产生静电力以保持放置在基板接收表面上的基板。多个加热器线圈也嵌入在陶瓷盘中，加热器径向间隔开并且彼此同心。

25. 发明申请

US20100113225A1 COUNTING DEVICE FOR A PUSH-UP EXERCISE 审中-公开
标题翻译：用于推动锻炼的计数装置
公开(公告)号：US20100113225A1
公开(公告)日：2010-05-06
申请号：US12265803
申请日：2008-11-06
申请人： Alden M. Mills , Mark B. Friedman , John Holland , Kevan Hollenback , Stephen G. Hauser
发明人： Alden M. Mills , Mark B. Friedman , John Holland , Kevan Hollenback , Stephen G. Hauser
IPC分类号： A63B24/00 , A63B23/12
CPC分类号： A63B23/1281 , A63B21/4019 , A63B23/1236 , A63B2220/17
摘要： A counting device for counting repetitions and timing a push-up exercise includes a device body and a counter assembly having a display and a plurality of actuation buttons thereon. The counter assembly fits within a deformable foam ring that forms the top of the device. During exercise, a user depresses the foam ring downward with their chest a given distance so as to trigger at least one sensor in the counter assembly to register a repetition count on the display, along with an elapsed time of the exercise. The counter assembly can be fixed within the device, or a display unit thereof may be removable so that the device and display unit are configured for wireless communication.
摘要翻译：用于对重复进行计数和计时的计数装置包括具有显示器的装置主体和计数器组件，以及在其上的多个致动按钮。计数器组件装配在形成装置顶部的可变形泡沫环中。在锻炼过程中，使用者用胸部按压一定距离将泡沫环向下压，以便触发计数器组件中的至少一个传感器，以便在显示器上记录重复计数以及锻炼的经过时间。计数器组件可以固定在设备内，或者其显示单元可以是可移除的，使得设备和显示单元被配置为用于无线通信。

26. 发明申请

US20070247074A1 Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution 失效
标题翻译：使用组合电容和电感耦合等离子体源来控制等离子体离子径向分布的过程
公开(公告)号：US20070247074A1
公开(公告)日：2007-10-25
申请号：US11410780
申请日：2006-04-24
申请人： Alexander Paterson , Valentin Todorow , Theodoros Panagopoulos , Brian Hatcher , Dan Katz , Edward Hammond , John Holland , Alexander Matyushkin
发明人： Alexander Paterson , Valentin Todorow , Theodoros Panagopoulos , Brian Hatcher , Dan Katz , Edward Hammond , John Holland , Alexander Matyushkin
IPC分类号： H01J7/24
CPC分类号： H01J37/32165 , H01J37/32091 , H01J37/321 , H01J37/32174
摘要： A method of processing a workpiece in the chamber of a plasma reactor includes introducing a process gas into the chamber, capacitively coupling VHF plasma source power into a process region of the chamber that overlies the wafer while inductively coupling RF plasma source power into the process region. A particular plasma ion density level is established by maintaining the total amount of plasma source power inductively and capacitively coupled into the process region at a level that provides the desired plasma ion density. The plasma ion density radial distribution in the process region is controlled by adjusting the ratio between the amounts of the (VHF) capacitively coupled power and the inductively coupled power while continuing to maintain the level of total plasma source power. The method can also include applying independently adjustable LF bias power and HF bias power to the workpiece and adjusting the average value and population distribution of ion energy at the surface of the workpiece by adjusting the proportion between the LF and HF bias powers. The VHF capacitively coupled power may be applied from the ceiling or from the wafer support.
摘要翻译：在等离子体反应器的腔室中处理工件的方法包括将工艺气体引入室中，将VHF等离子体源功率电容耦合到层叠在晶片上的室的处理区域，同时将RF等离子体源功率感应耦合到工艺区域。通过将等离子体源功率的总量以感应和电容耦合到处理区域中的水平提供期望的等离子体离子密度来建立特定的等离子体离子密度水平。通过调节（VHF）电容耦合功率和电感耦合功率之间的比例来控制处理区域中的等离子体离子密度径向分布，同时继续保持总等离子体源功率的水平。该方法还可以包括对工件应用独立可调的LF偏置功率和HF偏置功率，并通过调整LF和HF偏置功率之间的比例来调节工件表面处离子能量的平均值和总体分布。 VHF电容耦合功率可以从天花板或从晶片支架施加。

27. 发明申请

US20070173150A1 Body armor with improved knife-stab resistance formed from flexible composites 失效
公开(公告)号：US20070173150A1
公开(公告)日：2007-07-26
申请号：US11037680
申请日：2005-01-18
申请人： Ashok Bhatnagar , Huy Nguyen , John Holland
发明人： Ashok Bhatnagar , Huy Nguyen , John Holland
IPC分类号： B32B27/04 , B32B27/12 , B32B5/02
CPC分类号： F41H5/0478 , B32B5/024 , B32B5/08 , B32B25/08 , B32B25/10 , B32B25/12 , B32B25/14 , B32B25/16 , B32B27/12 , B32B27/306 , B32B2262/0223 , B32B2262/0246 , B32B2262/0253 , B32B2262/0269 , B32B2262/0276 , B32B2262/14 , B32B2270/00 , B32B2307/558 , B32B2307/581 , B32B2571/02 , Y10S428/911 , Y10T442/2615 , Y10T442/2623
摘要： Flexible body armor formed from flexible composites which have improved knife-stab resistance. The body armor is formed from composites which include layers of a fabric base, formed from high tenacity fibers, and a rubber layer bonded to the fabric base. A thermoplastic bonding layer may be used to bond the fabric and rubber layers together. To provide ballistic resistance, the body armor may also include a ballistic resistant composite of a network of high tenacity fibers.

28. 发明申请

US20070084563A1 Independent control of ion density, ion energy distribution and ion dissociation in a plasma reactor 有权
标题翻译：在等离子体反应器中独立控制离子密度，离子能量分布和离子离解
公开(公告)号：US20070084563A1
公开(公告)日：2007-04-19
申请号：US11337153
申请日：2006-01-19
申请人： John Holland
发明人： John Holland
IPC分类号： C23F1/00
CPC分类号： H01J37/32082 , H01J37/32165 , H01J37/3266 , H01L21/67069
摘要： A method of processing a workpiece in a plasma reactor includes coupling RF power from at least three RF power source of three respective frequencies to plasma in the reactor, setting ion energy distribution shape by selecting a ratio between the power levels of a first pair of the at least three RF power sources, and setting ion dissociation and ion density by selecting a ratio between the power levels of a second pair of the at least three RF power sources. The three respective frequencies can be an LF frequency, an HF frequency and a VHF frequency, wherein the first pair corresponds to the LF and HF frequencies and the second pair corresponds to the HF and VHF frequencies. Alternatively, the power sources comprise four RF power sources, and wherein the first pair corresponds to an HF frequency and an LF frequency and the second pair corresponds to a VHF frequency and another frequency. In one embodiment, the second pair corresponds to an upper VHF frequency and a lower VHF frequency. The other frequency may be coupled through an inductive source power applicator, a toroidal plasma source power applicator or a ceiling electrode. Or, all three frequencies may be coupled through a wafer support pedestal of the reactor.
摘要翻译：在等离子体反应器中处理工件的方法包括将来自三个相应频率的至少三个RF功率源的RF功率耦合到反应器中的等离子体，通过选择第一对的功率级之间的比率来设定离子能量分布形状至少三个RF功率源，以及通过选择所述至少三个RF功率源的第二对功率电平之间的比率来设定离子解离和离子密度。三个相应频率可以是LF频率，HF频率和VHF频率，其中第一对对应于LF和HF频率，并且第二对对应于HF和VHF频率。或者，电源包括四个RF电源，并且其中第一对对应于HF频率和LF频率，并且第二对对应于VHF频率和另一频率。在一个实施例中，第二对对应于上VHF频率和较低VHF频率。另一个频率可以通过感应源功率施加器，环形等离子体源功率施加器或天花板电极耦合。或者，所有三个频率可以通过反应器的晶片支撑基座耦合。

29. 发明申请

US20070039790A1 Vehicle suspension spring system 有权
标题翻译：车辆悬挂弹簧系统
公开(公告)号：US20070039790A1
公开(公告)日：2007-02-22
申请号：US11506846
申请日：2006-08-21
申请人： Sean Timoney , John Holland
发明人： Sean Timoney , John Holland
IPC分类号： F16F9/512
CPC分类号： B60G17/0432 , B60G17/0162 , B60G17/0164 , B60G17/08 , B60G2202/154 , B60G2400/104 , B60G2400/1042 , B60G2400/106 , B60G2400/204 , B60G2400/39 , B60G2400/41 , B60G2500/10 , B60G2500/20 , B60G2500/206 , B60G2800/012 , B60G2800/014 , B60G2800/702 , B60G2800/912 , F16F9/06
摘要： A vehicle suspension spring system for a vehicle wheel station includes a hydraulic cylinder or strut having a piston which divides the cylinder volume into a main oil volume and an annular oil volume. The main oil volume communicates via a first oil passage with a first accumulator having a main gas volume. The annular oil volume communicates via a second oil passage with a second accumulator having an auxiliary gas volume. The oil in each accumulator is separated from the gas by a separator piston or diaphragm. A third oil passage with an isolating valve interconnects said first and second oil passages. Operation of the isolating valve is regulated by a controller. At least one sensor for sensing a parameter associated with vehicle attitude is connected to the controller. The controller is operable for switching the isolating valve between open and closed positions for altering spring stiffness of the strut in response to said sensed vehicle attitude parameter when the vehicle is in motion.
摘要翻译：用于车轮车站的车辆悬架弹簧系统包括具有活塞的液压缸或支柱，所述活塞将气缸容积分成主油量和环形油体积。主油量通过第一油通道与具有主气体体积的第一储液器连通。环形油体积经由第二油路与具有辅助气体体积的第二蓄液器连通。每个蓄能器中的油通过分离器活塞或隔膜与气体分离。具有隔离阀的第三油路将所述第一和第二油通道相互连接。隔离阀的操作由控制器调节。用于感测与车辆姿态相关联的参数的至少一个传感器连接到控制器。控制器可操作用于在打开和关闭位置之间切换隔离阀，以在车辆运动时响应于所感测的车辆姿态参数改变支柱的弹簧刚度。

30. 发明申请

US20060254465A1 Fire resistant glazings 有权
标题翻译：防火玻璃
公开(公告)号：US20060254465A1
公开(公告)日：2006-11-16
申请号：US11146925
申请日：2005-06-07
申请人： John Holland , Karikath Varma , David Holden
发明人： John Holland , Karikath Varma , David Holden
IPC分类号： C09D5/18 , B32B17/06 , C04B28/26
CPC分类号： B32B17/069
摘要： Novel waterglass compositions comprise a zirconium containing anionic aggregate, preferably potassium zirconium carbonate or ammonium zirconium carbonate, in a quantity sufficient to provide at least 0.5% as zirconium metal. The compositions can be dried and/or gelled to form optically clear interlayers useful in the production of fire resistant glass laminates. The incorporation of the zirconium containing aggregate improves the fire resistant performance of the laminates.
摘要翻译：新型水玻璃组合物包含足够提供至少0.5％作为锆金属的量的含锆阴离子聚集体，优选碳酸锆锆或碳酸锆锆。组合物可以干燥和/或胶凝以形成用于生产耐火玻璃层压材料的光学透明中间层。加入含锆聚集体可提高层压板的耐火性能。

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