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21. 发明申请

US20080049888A1 High Brightness - Multiple Beamlets Source for Patterned X-ray Production 有权
标题翻译：高亮度 - 用于图案X射线生产的多个光束源
公开(公告)号：US20080049888A1
公开(公告)日：2008-02-28
申请号：US11757137
申请日：2007-06-01
申请人： Ka-Ngo Leung , Qing Ji , William Barletta , Ximan Jiang , Lili Ji
发明人： Ka-Ngo Leung , Qing Ji , William Barletta , Ximan Jiang , Lili Ji
IPC分类号： G21K1/02 , G01N23/203 , H01J37/08
CPC分类号： G01N23/203 , B82Y10/00 , B82Y40/00 , G01V5/0008 , H01J3/025 , H01J3/04 , H01J27/024 , H01J35/00 , H01J37/045 , H01J37/077 , H01J37/08 , H01J37/3172 , H01J37/3174 , H01J37/3177 , H01J2235/06 , H01J2235/068 , H01J2237/0435 , H01J2237/061 , H01J2237/06366 , H01J2237/06375 , H01J2237/3171
摘要： Techniques for controllably directing beamlets to a target substrate are disclosed. The beamlets may be either positive ions or electrons. It has been shown that beamlets may be produced with a diameter of 1 μm, with inter-aperture spacings of 12 μm. An array of such beamlets, may be used for maskless lithography. By step-wise movement of the beamlets relative to the target substrate, individual devices may be directly e-beam written. Ion beams may be directly written as well. Due to the high brightness of the beamlets from extraction from a multicusp source, exposure times for lithographic exposure are thought to be minimized. Alternatively, the beamlets may be electrons striking a high Z material for X-ray production, thereafter collimated to provide patterned X-ray exposures such as those used in CAT scans. Such a device may be used for remote detection of explosives.
摘要翻译：公开了用于将子束可控地引导到目标衬底的技术。子束可以是正离子或电子。已经表明，可以制造直径为1um的子束，孔径间隔为12μm。这种子束的阵列可用于无掩模光刻。通过子束相对于目标衬底的逐步运动，各个器件可以被直接电子束写入。离子束也可以直接写入。由于从多焦源提取的子束的高亮度，认为光刻曝光的曝光时间被最小化。或者，子束可以是撞击高Z材料用于X射线产生的电子，然后准直以提供图案化的X射线曝光，例如在CAT扫描中使用的那些。这种装置可用于远程检测炸药。

22. 发明授权

US07084407B2 Ion beam extractor with counterbore 失效
公开(公告)号：US07084407B2
公开(公告)日：2006-08-01
申请号：US10367664
申请日：2003-02-13
申请人： Qing Ji , Keith Standiford , Tsu-Jae King , Ka-Ngo Leung
发明人： Qing Ji , Keith Standiford , Tsu-Jae King , Ka-Ngo Leung
IPC分类号： H01J27/00 , H01J7/24
CPC分类号： H01J27/022
摘要： An extractor system for a plasma ion source has a single (first) electrode with one or more apertures, or a pair of spaced electrodes, a first or plasma forming electrode and a second or extraction electrode, with one or more aligned apertures. The aperture(s) in the first electrode (or the second electrode or both) have a counterbore on the downstream side (i.e. away from the plasma ion source or facing the second electrode). The counterbored extraction system reduces aberrations and improves focusing. The invention also includes an ion source with the counterbored extraction system, and a method of improving focusing in an extraction system by providing a counterbore.

23. 发明授权

US06922019B2 Microwave ion source 失效
标题翻译：微波离子源
公开(公告)号：US06922019B2
公开(公告)日：2005-07-26
申请号：US10150534
申请日：2002-05-17
申请人： Ka-Ngo Leung , Jani Reijonen , Rainer W. Thomae
发明人： Ka-Ngo Leung , Jani Reijonen , Rainer W. Thomae
IPC分类号： H01J27/18 , H01J37/08 , H05G2/00 , H01J7/24 , G21G5/00 , G21G5/20
CPC分类号： H05G2/003 , H01J27/18 , H01J37/08
摘要： A compact microwave ion source has a permanent magnet dipole field, a microwave launcher, and an extractor parallel to the source axis. The dipole field is in the form of a ring. The microwaves are launched from the middle of the dipole ring using a coaxial waveguide. Electrons are heated using ECR in the magnetic field. The ions are extracted from the side of the source from the middle of the dipole perpendicular to the source axis. The plasma density can be increased by boosting the microwave ion source by the addition of an RF antenna. Higher charge states can be achieved by increasing the microwave frequency. A xenon source with a magnetic pinch can be used to produce intense EUV radiation.
摘要翻译：紧凑型微波离子源具有永磁偶极子场，微波发射器和平行于源轴的提取器。偶极场是环的形式。微波使用同轴波导从偶极环的中间发射。使用ECR在磁场中加热电子。从垂直于源轴的偶极子的中间离子源从源的一侧提取。通过添加RF天线来增加微波离子源可以提高等离子体密度。可以通过增加微波频率来实现更高的充电状态。具有磁性夹点的氙气源可用于产生强烈的EUV辐射。

24. 发明授权

US06907097B2 Cylindrical neutron generator 有权
标题翻译：圆柱形中子发生器
公开(公告)号：US06907097B2
公开(公告)日：2005-06-14
申请号：US10100962
申请日：2002-03-18
申请人： Ka-Ngo Leung
发明人： Ka-Ngo Leung
IPC分类号： G21B3/00 , G21B1/00
CPC分类号： G21B3/00 , Y02E30/18
摘要： A cylindrical neutron generator is formed with a coaxial RF-driven plasma ion source and target. A deuterium (or deuterium and tritium) plasma is produced by RF excitation in a cylindrical plasma ion generator using an RF antenna. A cylindrical neutron generating target is coaxial with the ion generator, separated by plasma and extraction electrodes which contain many slots. The plasma generator emanates ions radially over 360° and the cylindrical target is thus irradiated by ions over its entire circumference. The plasma generator and target may be as long as desired. The plasma generator may be in the center and the neutron target on the outside, or the plasma generator may be on the outside and the target on the inside. In a nested configuration, several concentric targets and plasma generating regions are nested to increase the neutron flux.
摘要翻译：圆柱形中子发生器形成有同轴RF驱动的等离子体离子源和靶。在使用RF天线的圆柱形等离子体离子发生器中通过RF激发产生氘（或氘和氚）等离子体。圆柱形中子产生靶与离子发生器同轴，由等离子体和包含许多槽的引出电极隔开。等离子体发生器径向离子发射离子360°，圆柱形靶因此在其整个圆周上被离子照射。等离子体发生器和靶可以是期望的长度。等离子体发生器可以在中心，并且外部的中子靶，或者等离子体发生器可以在外部，并且靶在内部。在嵌套配置中，嵌套多个同心目标和等离子体产生区域以增加中子通量。

25. 发明授权

US5365070A Negative ion beam injection apparatus with magnetic shield and electron removal means 失效
标题翻译：具有磁屏蔽和电子去除装置的负离子束注入装置
公开(公告)号：US5365070A
公开(公告)日：1994-11-15
申请号：US875778
申请日：1992-04-29
申请人： Oscar A. Anderson , Chun F. Chan , Ka-Ngo Leung
发明人： Oscar A. Anderson , Chun F. Chan , Ka-Ngo Leung
IPC分类号： H01J27/02
CPC分类号： H01J27/022 , H01J27/028
摘要： A negative ion source is constructed to produce H.sup.- ions without using Cesium. A high percentage of secondary electrons that typically accompany the extracted H.sup.- are trapped and eliminated from the beam by permanent magnets in the initial stage of acceleration. Penetration of the magnetic field from the permanent magnets into the ion source is minimized. This reduces the destructive effect the magnetic field could have on negative ion production and extraction from the source. A beam expansion section in the extractor results in a strongly converged final beam.
摘要翻译：构建负离子源以产生不含铯的H-离子。通常伴随提取的H的高百分比的二次电子在加速的初始阶段被永磁体从束中被捕获和消除。从永磁体到离子源的磁场的渗透最小化。这减少了磁场对负离子产生和从源提取的破坏作用。提取器中的光束扩展部分产生强烈会聚的最终光束。

26. 发明授权

US5198677A Production of N.sup.+ ions from a multicusp ion beam apparatus 失效
标题翻译：从多重离子束装置生产N +离子
公开(公告)号：US5198677A
公开(公告)日：1993-03-30
申请号：US774912
申请日：1991-10-11
申请人： Ka-Ngo Leung , Wulf B. Kunkel , Steven R. Walther
发明人： Ka-Ngo Leung , Wulf B. Kunkel , Steven R. Walther
IPC分类号： H01J27/14
CPC分类号： H01J27/14 , H01J2237/08 , H01J2237/31701
摘要： A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.
摘要翻译：使用具有由多个磁体（13）包围的圆柱形室壁（12）形成的室（11）的多重离子源（10）产生高纯度（至少98％）的N +离子束的方法，中心设置在所述室中的灯丝（57），具有在所述室的一端处的提取孔（41）的等离子体电极（36），具有与所述等离子体电极（36）间隔开的两个平行磁体（21,22）的磁性过滤器，并将室（11）分割成电弧放电和提取区域。该方法包括在室（11）的电弧放电区域中离子化氮气，将室壁（12）保持在相对于灯丝（57）的正电压并且处于提取的N +离子的最佳百分比的量级离子束，在室内和室壁附近设置热衬里（45）以限制N +离子复合到N 2 +离子中，使磁性过滤器的磁体（21,22）彼此间隔，以获得最佳百分比在提取的离子束中保持N 3离子，并且在提取孔的下游保持相对较低的压力，并且在提取的离子束中的N +离子的最佳百分比（优选在3-8×10 -4乇的范围内）。

27. 发明授权

US4795940A Large area directly heated lanthanum hexaboride cathode structure having predetermined emission profile 失效
标题翻译：大面积直接加热六硼化镧阴极结构，具有预定的排放曲线
公开(公告)号：US4795940A
公开(公告)日：1989-01-03
申请号：US108327
申请日：1987-10-14
申请人： Ka-Ngo Leung , Keith C. Gordon , Dean O. Kippenham , Peter Purgalis , David Moussa , Malcom D. Williams , Stephen B. Wilde , Mark W. West
发明人： Ka-Ngo Leung , Keith C. Gordon , Dean O. Kippenham , Peter Purgalis , David Moussa , Malcom D. Williams , Stephen B. Wilde , Mark W. West
IPC分类号： H01J1/16 , H01J1/14 , H01J19/10
CPC分类号： H01J1/16
摘要： A large area directly heated lanthanum hexaboride (LaB.sub.6) cathode system (10) is disclosed. The system comprises a LaB.sub.6 cathode element (11) generally circular in shape about a central axis. The cathode element (11) has a head (21) with an upper substantially planar emission surface (23), and a lower downwardly and an intermediate body portion (26) which diminishes in cross-section from the head (21) towards the base (22) of the cathode element (11). A central rod (14) is connected to the base (22) of the cathode element (11) and extends along the central axis. Plural upstanding spring fingers (37) are urged against an outer peripheral contact surface (24) of the head end (21) to provide a mechanical and electrical connection to the cathode element (11).
摘要翻译：公开了大面积直接加热六硼化镧（LaB6）阴极系统（10）。该系统包括围绕中心轴线大致圆形的LaB6阴极元件（11）。阴极元件（11）具有头部（21），其具有上部基本上平面的发射表面（23），以及下部向下和中间主体部分（26），其从头部（21）朝基部（11）的阴极元件（22）。中心杆（14）连接到阴极元件（11）的底座（22）并且沿中心轴线延伸。多个直立的弹簧指（37）被推靠在头端（21）的外周接触表面（24）上以提供与阴极元件（11）的机械和电连接。

28. 发明授权

US08971473B2 Plasma driven neutron/gamma generator 有权
标题翻译：等离子驱动中子/γ发生器
公开(公告)号：US08971473B2
公开(公告)日：2015-03-03
申请号：US12992188
申请日：2009-06-09
申请人： Ka-Ngo Leung , Arlyn Antolak
发明人： Ka-Ngo Leung , Arlyn Antolak
IPC分类号： G21G4/02 , H05H3/06
CPC分类号： H05H3/06
摘要： An apparatus for the generation of neutron/gamma rays is described including a chamber which defines an ion source, said apparatus including an RF antenna positioned outside of or within the chamber. Positioned within the chamber is a target material. One or more sets of confining magnets are also provided to create a cross B magnetic field directly above the target. To generate neutrons/gamma rays, the appropriate source gas is first introduced into the chamber, the RF antenna energized and a plasma formed. A series of high voltage pulses are then applied to the target. A plasma sheath, which serves as an accelerating gap, is formed upon application of the high voltage pulse to the target. Depending upon the selected combination of source gas and target material, either neutrons or gamma rays are generated, which may be used for cargo inspection, and the like.
摘要翻译：描述了用于产生中子/γ射线的装置，其包括限定离子源的室，所述装置包括位于室内或室内的RF天线。定位在室内是目标材料。还提供了一组或多组约束磁体以在靶上方产生交叉B磁场。为了产生中子/γ射线，首先将合适的源气体引入腔室，RF天线通电并形成等离子体。然后将一系列高电压脉冲施加到目标。用作加速间隙的等离子体护套是在向目标施加高电压脉冲时形成的。取决于所选择的源气体和目标材料的组合，产生可用于货物检查的中子或γ射线等。

29. 发明申请

US20120213319A1 Fast Pulsed Neutron Generator 审中-公开
标题翻译：快脉冲中子发生器
公开(公告)号：US20120213319A1
公开(公告)日：2012-08-23
申请号：US13384578
申请日：2010-08-13
申请人： Joe Kwan , Qing Ji , Ka-Ngo Leung
发明人： Joe Kwan , Qing Ji , Ka-Ngo Leung
IPC分类号： G21G1/10 , H01J27/02
CPC分类号： H05H3/06
摘要： An apparatus and method for fast pulsing of a neutron generator is described in which a series of electrodes are used to first extract deuterium or tritium ions from a plasma contained within an ion source, and then either accelerate or stop the flow of ions to the source, depending upon the voltage potential applied to the downstream electrodes. In one embodiment, the extraction/gating system comprises 3 electrodes, a first extraction electrode which is maintained at the same positive potential as the ion sources, a second electrode maintained at a lower potential to extract ions from the source, and a third electrode which depending on the operational mode is maintained either at the same potential as the second electrode (for beam passage) or at a potential higher than that of the first electrode (for beam blockage).
摘要翻译：描述了用于中子发生器的快速脉冲的装置和方法，其中使用一系列电极首先从离子源中包含的等离子体中提取氘离子或氚离子，然后加速或停止离子流到源取决于施加到下游电极的电压电位。在一个实施例中，提取/门控系统包括3个电极，与离子源保持相同正电位的第一提取电极，保持在较低电位从源极提取离子的第二电极和第三电极，取决于操作模式保持与第二电极（用于光束通过）相同的电位或者比第一电极的电位高（用于光束阻塞）。

30. 发明授权

US07639770B2 Cylindrical neutron generator 有权
公开(公告)号：US07639770B2
公开(公告)日：2009-12-29
申请号：US12107545
申请日：2008-04-22
申请人： Ka-Ngo Leung
发明人： Ka-Ngo Leung
IPC分类号： G21G1/06
CPC分类号： H05H3/06
摘要： A cylindrical neutron generator is formed with a coaxial RF-driven plasma ion source and target. A deuterium (or deuterium and tritium) plasma is produced by RF excitation in a cylindrical plasma ion generator using an RF antenna. A cylindrical neutron generating target is coaxial with the ion generator, separated by plasma and extraction electrodes which contain many slots. The plasma generator emanates ions radially over 360° and the cylindrical target is thus irradiated by ions over its entire circumference. The plasma generator and target may be as long as desired. The plasma generator may be in the center and the neutron target on the outside, or the plasma generator may be on the outside and the target on the inside. In a nested configuration, several concentric targets and plasma generating regions are nested to increase the neutron flux.

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