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21. 发明授权

US09921114B2 Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel 有权
公开(公告)号：US09921114B2
公开(公告)日：2018-03-20
申请号：US15388629
申请日：2016-12-22
申请人： Kabushiki Kaisha Toshiba
发明人： Yoshihiko Fuji , Kei Masunishi , Hideaki Fukuzawa , Yoshihiro Higashi , Michiko Hara , Akio Hori , Tomohiko Nagata , Shiori Kaji , Akiko Yuzawa
IPC分类号： G01L1/22 , G01L1/12 , G01L5/16 , G01L9/00 , H04R1/02 , H04R1/04 , H04R7/00 , H04R19/00 , G06F3/041 , A61B5/00 , A61B5/021 , A61B5/024 , G01L1/20 , H04R19/04
CPC分类号： G01L1/2287 , A61B5/02141 , A61B5/02438 , A61B5/7475 , G01L1/12 , G01L1/205 , G01L1/2262 , G01L1/2293 , G01L5/161 , G01L9/0051 , G06F3/041 , G06F3/0414 , G06F2203/04105 , H04R1/028 , H04R1/04 , H04R7/00 , H04R19/005 , H04R19/04 , H04R2499/11
摘要： According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.

22. 发明授权

US09810711B2 Inertial sensor 有权
公开(公告)号：US09810711B2
公开(公告)日：2017-11-07
申请号：US14460450
申请日：2014-08-15
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hideaki Fukuzawa , Michiko Hara , Yoshihiko Fuji , Yoshihiro Higashi , Shiori Kaji , Akio Hori , Tomohiko Nagata , Akiko Yuzawa , Akira Kikitsu
IPC分类号： G01P15/08 , G01P15/105
CPC分类号： G01P15/105 , G01P15/0802 , G01P2015/0805
摘要： An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

23. 发明授权

US09618411B2 Pressure sensor device 有权
公开(公告)号：US09618411B2
公开(公告)日：2017-04-11
申请号：US13749404
申请日：2013-01-24
申请人： Kabushiki Kaisha Toshiba
发明人： Hiromi Yuasa , Hideaki Fukuzawa , Yoshihiko Fuji , Michiko Hara , Yoshihiro Higashi , Tomohiko Nagata , Akio Hori
IPC分类号： G01L9/16 , G01L9/00 , G01L1/12 , H01L41/12
CPC分类号： G01L9/0051 , G01L1/125 , G01L9/16 , H01L41/125
摘要： A pressure sensor device comprises a support substrate including a thin film area which is bendable by a pressure, a sensor film comprising a first electrode provided on the thin film area, a second electrode provided on the first electrode, a reference layer provided between the first electrode and the second electrode, a free layer provided between the reference layer and the first electrode or between the reference layer and the second electrode, a spacer layer provided between the reference layer and the free layer, a shield provided on a side of the support substrate.

24. 发明申请

US20150204739A1 PRESSURE SENSOR, ACCELERATION SENSOR, AND METHOD FOR MANUFACTURING PRESSURE SENSOR 有权
标题翻译：压力传感器，加速度传感器和制造压力传感器的方法
公开(公告)号：US20150204739A1
公开(公告)日：2015-07-23
申请号：US14565755
申请日：2014-12-10
申请人： Kabushiki Kaisha Toshiba
发明人： Hideaki FUKUZAWA , Yoshihiko Fuji , Yoshihiro Higashi , Michiko Hara
IPC分类号： G01L1/22 , G01P15/105
CPC分类号： G01L1/2287 , G01L1/12 , G01L1/125 , G01L5/16 , G01L9/16 , G01P15/105
摘要： According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.
摘要翻译：根据一个实施例，压力传感器包括设置在基座上的底座和传感器单元。传感器单元包括具有第一表面的转换薄膜，设置在第一表面上的第一应变感测元件和设置在第一表面上的第二应变感测元件。第一应变传感元件包括第一磁性层，具有第一氧浓度的第一膜，设置在第一磁性层和第一膜之间的第二磁性层以及设置在第一和第二磁性层之间的第一中间层。第二应变传感元件包括第三磁性层，具有不同于第一浓度的第二氧浓度的第二膜，设置在第三磁性层和第二膜之间的第四磁性层，以及设置在第三和第二膜之间的第二中间层，第四磁性层。

25. 发明授权

US09000547B2 Strain sensor and method for manufacturing the same 有权
标题翻译：应变传感器及其制造方法
公开(公告)号：US09000547B2
公开(公告)日：2015-04-07
申请号：US14203868
申请日：2014-03-11
申请人： Kabushiki Kaisha Toshiba
发明人： Yusaku Asano , Kazuhito Higuchi , Takeshi Miyagi , Yoshihiro Higashi , Michiko Hara , Hideaki Fukuzawa , Masayuki Kii , Eizo Fujisawa
IPC分类号： H01L29/82 , H01L21/00 , G01L1/12 , H01L29/84 , H01L43/12 , H01L43/08
CPC分类号： G01L1/125
摘要： According to one embodiment, a strain sensor includes a substrate, a lid, a frame, and a sensing unit. The substrate has a first surface. The lid is provided on the first surface. The frame is provided between the substrate and the lid. The frame is nonconductive and includes a magnetic body. The sensing unit is provided inside the frame between the substrate and the lid, and includes a magnetoresistance effect element.
摘要翻译：根据一个实施例，应变传感器包括基板，盖子，框架和感测单元。衬底具有第一表面。盖子设置在第一表面上。框架设置在基板和盖子之间。框架是不导电的并且包括磁体。感测单元设置在基板和盖子之间的框架内部，并且包括磁阻效应元件。

26. 发明申请

US20140069200A1 PRESSURE SENSOR DEVICE 有权
标题翻译：压力传感器装置
公开(公告)号：US20140069200A1
公开(公告)日：2014-03-13
申请号：US13749404
申请日：2013-01-24
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hiromi Yuasa , Hideaki Fukuzawa , Yoshihiko Fuji , Michiko Hara , Yoshihiro Higashi , Tomohiko Nagata , Akio Hori
IPC分类号： G01L9/00
CPC分类号： G01L9/0051 , G01L1/125 , G01L9/16 , H01L41/125
摘要： A pressure sensor device comprises a support substrate including a thin film area which is bendable by a pressure, a sensor film comprising a first electrode provided on the thin film area, a second electrode provided on the first electrode, a reference layer provided between the first electrode and the second electrode, a free layer provided between the reference layer and the first electrode or between the reference layer and the second electrode, a spacer layer provided between the reference layer and the free layer, a shield provided on a side of the support substrate.
摘要翻译：压力传感器装置包括：支撑基板，其包括可通过压力弯曲的薄膜区域;传感器膜，包括设置在所述薄膜区域上的第一电极;设置在所述第一电极上的第二电极;设置在所述第一电极电极和第二电极，设置在参考层和第一电极之间或参考层和第二电极之间的自由层，设置在参考层和自由层之间的间隔层，设置在支撑体的一侧的屏蔽基质。

27. 发明授权

US11432751B2 Magnetic sensor and inspection device 有权
公开(公告)号：US11432751B2
公开(公告)日：2022-09-06
申请号：US17399345
申请日：2021-08-11
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Satoshi Shirotori , Hitoshi Iwasaki , Akira Kikitsu , Yoshihiro Higashi , Yoshinari Kurosaki
IPC分类号： G01R5/00 , A61B5/245 , G01R33/00
摘要： According to one embodiment, a magnetic sensor includes a first magnetic element, a second magnetic element, a third magnetic element located between the first and second magnetic elements in a first direction, a fourth magnetic element located between the third and second magnetic elements in the first direction, a first conductive member, a second conductive member, a third conductive member located between the first and second conductive members in the first direction, a fourth conductive member located between the third and second conductive members in the first direction, a first magnetic member, a second magnetic member, a third magnetic member located between the first and second magnetic members in the first direction, a fourth magnetic member located between the third and second magnetic members in the first direction, and a fifth magnetic member located between the third and fourth magnetic members in the first direction.

28. 发明授权

US11119161B2 Magnetic sensor and diagnostic device 有权
公开(公告)号：US11119161B2
公开(公告)日：2021-09-14
申请号：US16816401
申请日：2020-03-12
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Hitoshi Iwasaki , Akira Kikitsu , Yoshihiro Higashi , Satoshi Shirotori
IPC分类号： G01R33/09 , G01R33/00
摘要： According to one embodiment, a magnetic sensor includes a first element. The first element includes a first magnetic part, a first magnetic layer, a first nonmagnetic portion, and a first intermediate magnetic layer. The first magnetic part includes first to third portions. The first portion is between the second and third portions. The first portion has a first length and a second length. The second portion has at least one of a third length longer than the first length or a fourth length longer than the second length. The third portion has at least one of a fifth length longer than the first length or a sixth length longer than the second length. The first nonmagnetic portion is provided between the first portion and the first magnetic layer. The first intermediate magnetic layer is provided between the first portion and the first nonmagnetic portion.

29. 发明授权

US10902986B2 Sensor, microphone, and touch panel 有权
公开(公告)号：US10902986B2
公开(公告)日：2021-01-26
申请号：US16119008
申请日：2018-08-31
申请人： KABUSHIKI KAISHA TOSHIBA
发明人： Kazuaki Okamoto , Yoshihiko Fuji , Shiori Kaji , Yoshihiro Higashi , Tomohiko Nagata , Shotaro Baba , Michiko Hara
IPC分类号： H01F10/32 , H01L43/02 , H01L43/10 , A61B5/021 , G01L9/00 , H01L43/08 , H01L41/12 , H01L41/16 , G06F3/041 , H04R1/02
摘要： According to one embodiment, a sensor includes a deformable film portion, and a first sensing element provided at the film portion. The first sensing element includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and second magnetic layers. The first intermediate layer is nonmagnetic. The first magnetic layer includes a first film including Fe and Co, a second film including Fe and Co, a third film, and a fourth film. The third film includes at least one selected from the group consisting of Cu, Au, Ru, Ag, Pt, Pd, Ir, Rh, Re, and Os and is provided between the first and second films. The fourth film includes at least one selected from the group consisting of Mg, Ca, Sc, Ti, Sr, Y, Zr, Nb, Mo, Ba, La, Hf, Ta, and W and is provided between the third and second films.

30. 发明授权

US10775197B2 Sensor 有权
公开(公告)号：US10775197B2
公开(公告)日：2020-09-15
申请号：US16119373
申请日：2018-08-31
申请人： KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
发明人： Yoshihiko Fuji , Keiju Yamada , Kei Masunishi , Michiko Hara , Yoshihiro Higashi , Kazuaki Oakamoto , Shiori Kaji
IPC分类号： G01D5/16 , G01D5/48 , H04R21/00 , G01R33/09
摘要： According to one embodiment, a sensor includes a sensing element portion and a first magnetic portion. The sensing element portion includes a supporter, a deformable film portion supported by the supporter, and a first element including a magnetic layer and being provided at the film portion. The first magnetic portion is separated from the sensing element portion. The first magnetic portion includes a plurality of first holes. A width of one of the plurality of first holes along a second direction is narrower than a length of the sensing element portion along the second direction and wider than a length of the first element along the second direction. The second direction crosses a first direction from the film portion toward the first element.

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