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21. 发明授权

US5024722A Process for fabricating conductors used for integrated circuit connections and the like 失效
标题翻译：用于制造用于集成电路连接的导体的方法等
公开(公告)号：US5024722A
公开(公告)日：1991-06-18
申请号：US536733
申请日：1990-06-12
申请人： David A. Cathey, Jr.
发明人： David A. Cathey, Jr.
IPC分类号： C23F4/00 , H01L21/3213
CPC分类号： C23F4/00 , H01L21/32136 , H01L21/32139 , Y10T428/24917
摘要： A process for defining conductors on a integrated circuit substrate which includes selectively dry etching through a metal layer on the substrate using plasma reactants including conductor sidewall passivation gases such as silicon tetrabromide, SiBr.sub.4. This process is useful to form high quality silicon and nitrogen containing inorganic films on the sidewall surfaces of the conductors thus formed, and these films protect the conductors from lateral etching and undercutting and preserve their structural integrity. In a preferred embodiment of the invention, the metal layer or substrate is tungsten, W, and is masked directly with a photoresist polymer.
摘要翻译：一种用于在集成电路衬底上定义导体的方法，其包括使用包括导体侧壁钝化气体如四溴化硅SiBr 4的等离子体反应物选择性地干蚀刻通过衬底上的金属层。该方法可用于在如此形成的导体的侧壁表面上形成高质量的含硅和氮的无机膜，并且这些膜保护导体免受横向蚀刻和底切，并保持其结构完整性。在本发明的优选实施例中，金属层或衬底是钨，W，并且被光致抗蚀剂聚合物直接掩蔽。

22. 发明授权

US5910791A Method and circuit for reducing emission to grid in field emission displays 失效
标题翻译：在场发射显示屏中减少发射到电网的方法和电路
公开(公告)号：US5910791A
公开(公告)日：1999-06-08
申请号：US623509
申请日：1996-03-28
申请人： David A. Zimlich , Thomas W. Voshell , David A. Cathey, Jr.
发明人： David A. Zimlich , Thomas W. Voshell , David A. Cathey, Jr.
IPC分类号： G09G3/22 , H01J3/02
CPC分类号： H01J3/022 , G09G3/22 , G09G2300/08 , G09G2330/026 , H01J2329/00
摘要： A method and a control circuit for controlling a field emission display to reduce emission to grid during turn on and turn off are provided. In an illustrative embodiment, the control circuit includes a threshold detector that receives an input signal proportional to an anode voltage (V.sub.Anode) for the display and produces a high or low output signal dependent on the level of V.sub.Anode. An output low corresponding to a high voltage at the display screen enables a gate element of a pass transistor that controls current flow to the grid. Alternately, an output high corresponding to a low voltage at the display screen enables a pull down transistor that controls discharge of the grid to ground. The control circuit can also include a fault detection circuit for detecting a sharp decrease in the anode voltage and discharging the grid. In an alternate embodiment, the control circuit shorts the emitter sites together during turn on and turn off and provides a high source impedance to restrict current flow to any one emitter site. The high source impedance can be permanent or switchable by a relay or switching circuit.
摘要翻译：提供一种用于控制场致发射显示以在打开和关闭期间减少到格栅的发射的方法和控制电路。在说明性实施例中，控制电路包括阈值检测器，其接收与用于显示器的阳极电压（VAnode）成比例的输入信号，并且根据VAnode的电平产生高或低输出信号。与显示屏幕上的高电压相对应的输出低电平使得能够控制电流流向电网的通过晶体管的栅极元件。或者，对应于显示屏幕处的低电压的输出高电平使得能够控制电网到地的放电的下拉晶体管。控制电路还可以包括用于检测阳极电压急剧下降并排出电网的故障检测电路。在替代实施例中，控制电路在导通和断开期间将发射极点一起短路，并提供高的源阻抗以限制电流流向任何一个发射器位置。高源阻抗可以由继电器或开关电路永久或切换。

23. 发明授权

US5698932A Interelectrode spacers for display devices including field emission displays 失效
标题翻译：用于包括场发射显示器的显示装置的电极间隔件
公开(公告)号：US5698932A
公开(公告)日：1997-12-16
申请号：US618928
申请日：1996-03-20
申请人： David A. Cathey, Jr. , Jim J. Browing
发明人： David A. Cathey, Jr. , Jim J. Browing
IPC分类号： H01J9/18 , H01J29/02 , H01J31/12 , H01J1/88
CPC分类号： H01J9/185 , H01J29/028 , H01J31/127 , H01J2329/8625 , H01J2329/863 , H01J2329/8645
摘要： A method for forming interelectrode spacers for flat panel display devices that employ reduced pressures, includes the steps of; forming a substrate out of an aerogel, xerogel photosensitive material (e.g., photosensitive glass, photosensitive aerogel, photosensitive xerogel); forming a pattern of openings and gas removal channels in the substrate; and then placing the substrate between a display screen and base plate of the display device. The substrate is formulated to be light weight, insulative and with a high compressive strength for resisting atmospheric loads placed on the display screen by the reduced pressure. In addition, the substrate is formulated to be easily etched, laser ablated or photochemically machined and assembled as a third member spacer structure.
摘要翻译：一种用于形成使用减压的平板显示装置的电极间间隔物的方法，包括以下步骤：从气凝胶形成基材，干凝胶感光材料（例如感光玻璃，感光气凝胶，感光干凝胶）; 在衬底中形成开口和气体去除通道的图案; 然后将该基板放置在显示装置的显示屏和基板之间。该基材被配制为重量轻，绝缘性和高抗压强度，以通过减压来抵抗放置在显示屏上的大气负荷。此外，将基底配制成易于蚀刻，激光烧蚀或光化学加工并组装为第三构件间隔结构。

24. 发明授权

US5354698A Hydrogen reduction method for removing contaminants in a semiconductor ion implantation process 失效
标题翻译：用于去除半导体离子注入工艺中的污染物的氢还原方法
公开(公告)号：US5354698A
公开(公告)日：1994-10-11
申请号：US93424
申请日：1993-07-19
申请人： David A. Cathey, Jr.
发明人： David A. Cathey, Jr.
IPC分类号： H01J37/30 , H01L21/265 , H01L21/30 , H01L21/306
CPC分类号： H01L21/02046 , H01J37/3002 , H01L21/265 , H01L21/26513 , H01L21/3003 , H01J2237/022 , H01J2237/3175 , Y10S438/913
摘要： In semiconductor manufacture a method of ion implanting a substrate includes an in-situ hydrogen reduction for removing or outgassing contaminants present on the surface of the substrate. By removing the contaminants, the implantation of "knock ons" into the crystal lattice structure of the substrate is prevented. In an illustrative embodiment of the invention, the hydrogen reduction is performed using a low-temperature, high-energy hydrogen plasma. The method of the invention can be used to remove contaminants such as carbon, carbon dioxide, oxygen, sulfur, phosphorus, boron, H.sub.2 O and native oxides present on the surface to be implanted.
摘要翻译：在半导体制造中，离子注入衬底的方法包括用于去除或除气存在于衬底表面上的污染物的原位氢还原。通过去除污染物，可以防止将“敲击”植入衬底的晶格结构中。在本发明的说明性实施例中，使用低温，高能量氢等离子体进行氢还原。本发明的方法可用于去除待植入的表面上存在的污染物，例如碳，二氧化碳，氧，硫，磷，硼，H 2 O和天然氧化物。

25. 发明授权

US5302241A Post etching treatment of semiconductor devices 失效
标题翻译：半导体器件的后蚀刻处理
公开(公告)号：US5302241A
公开(公告)日：1994-04-12
申请号：US996479
申请日：1992-12-23
申请人： David A. Cathey, Jr.
发明人： David A. Cathey, Jr.
IPC分类号： H01L21/302 , H01L21/02 , H01L21/3065 , H01L21/3213 , H01L21/00
CPC分类号： H01L21/02071 , Y10S438/976
摘要： According to the process of this invention, after the etching of a semiconductor device in an etching area is completed a reactive chemical composition is typically formed on the semiconductor device. Prior to removing the etched semiconductor from the etching area, a passivating agent comprising silicon tetrafluoride is introduced into the etching area. The passivating agent reacts with any reactive chemical compound associated with the semiconductor to inhibit corrosion of the semiconductor device. The inhibited reactive chemical composition, which is typically in the gas phase, is then pumpable out of the etch area. The inhibited reactive chemical composition is substantially unreactive with and does not post-etch the semiconductor device as is the case with the reactive chemical composition per se. Furthermore, the parametric properties and the threshold voltage which were altered by the prior art dry etch process are not changed by the use of the subject post etching process.
摘要翻译：根据本发明的方法，在蚀刻区域中的半导体器件的蚀刻完成之后，通常在半导体器件上形成反应性化学组成。在从蚀刻区域去除蚀刻的半导体之前，将包含四氟化硅的钝化剂引入蚀刻区域。钝化剂与与半导体相关联的任何反应性化合物反应以抑制半导体器件的腐蚀。典型地处于气相中的被抑制的反应化学组成然后可泵送出蚀刻区域。与反应性化学组合物本身的情况一样，抑制的反应性化学组成基本上不反应并且不后蚀刻半导体器件。此外，由现有技术的干法蚀刻工艺改变的参数特性和阈值电压不会因使用对象后蚀刻工艺而改变。

26. 发明授权

US4992137A Dry etching method and method for prevention of low temperature post etch deposit 失效
标题翻译：干蚀刻方法和防止低温后蚀刻沉积的方法
公开(公告)号：US4992137A
公开(公告)日：1991-02-12
申请号：US555100
申请日：1990-07-18
申请人： David A. Cathey, Jr. , Harlan Frankamp
发明人： David A. Cathey, Jr. , Harlan Frankamp
IPC分类号： C23F4/00 , H01L21/302 , H01L21/3065 , H01L21/311
CPC分类号： H01L21/31116 , Y10S438/935
摘要： A method of preventing low temperature dry etch deposit on a semiconductor substrate wafer comprises:ceasing injection of reactive gas to within a dry etching reactor at substantial completion of a selective etch while maintaining sufficient power to the reactor to maintain gases therein in a plasma state; andsubstantially evacuating the reactive gas plasma from the reactor before decreasing power to the reactor below that which is sufficient to maintain gases therein in the plasma state.
摘要翻译：防止半导体衬底晶片上的低温干蚀刻沉积的方法包括：在基本完成选择性蚀刻的同时，在干蚀刻反应器内停止将反应性气体注入，同时保持足够的功率以将其中的气体保持在等离子体状态; 并在将反应性气体等离子体从反应器中抽出之前将其降低到等于等离子体状态下足以维持其中的气体的功率。

27. 发明授权

US07539513B2 Portable phone with ergonomic image projection system 有权
标题翻译：便携式手机符合人体工学的影像投影系统
公开(公告)号：US07539513B2
公开(公告)日：2009-05-26
申请号：US11049458
申请日：2005-02-02
申请人： David A. Cathey, Jr. , Steven Howell , James Cathey
发明人： David A. Cathey, Jr. , Steven Howell , James Cathey
IPC分类号： H04Q7/32
CPC分类号： H04M1/0272 , G03B21/00 , G03B21/005 , G03B29/00 , H04M1/02 , H04M1/0202 , H04M1/0279 , H04M1/03 , H04M1/57 , H04N5/74
摘要： A portable phone includes a handset and a data projection system configured to form a visual image of data, such as caller waiting ID data, on a viewing surface viewable by a user during a two way conversation. The handset also includes a speaker, a microphone, conventional phone circuitry and a keyboard. The data projection system is configured to receive signals from the phone circuitry, to generate a pattern representative of the data, to process the pattern into a mirror image of the visual image, and to project the mirror image from a bottom end surface of the handset. The projection system includes an electro optic system for generating the pattern, and an optics system for projecting the mirror image onto the viewing surface.A method for projecting data in a portable phone includes the steps of: providing the handset with the data projection system, conducting a two way conversation with the handset held against the head of the user, and forming the visual image on the viewing surface during the two way conversation with the handset held against the head. The method can also include the steps of manipulating the handset and a body part to locate and focus the visual image, sensing an orientation of the handset during the two way conversation, and orienting the visual image as a function of the sensing step.
摘要翻译：便携式电话包括手机和数据投影系统，其被配置为在双向对话期间由用户可观看的观看表面上形成诸如呼叫者等待ID数据的数据的视觉图像。手机还包括扬声器，麦克风，常规电话线路和键盘。数据投影系统被配置为从电话电路接收信号，以产生表示数据的图案，将图案处理成视觉图像的镜像，并且从手机的底端表面投射镜像。投影系统包括用于产生图案的电光系统和用于将镜像投影到观察表面上的光学系统。一种用于在便携式电话中投影数据的方法包括以下步骤：向手持机提供数据投影系统，与保持在用户头部的手持机进行双向通话，以及在视觉表面上形成视觉图像与手机对抗的双向对话。该方法还可以包括以下步骤：操纵手持机和身体部分以定位和聚焦视觉图像，在双向通话期间感测手机的定向，以及根据感测步骤定向视觉图像。

28. 发明授权

US06291941B1 Method and circuit for controlling a field emission display for reducing emission to grid 失效
标题翻译：用于控制场发射显示以减少发射到电网的方法和电路
公开(公告)号：US06291941B1
公开(公告)日：2001-09-18
申请号：US09261589
申请日：1999-03-03
申请人： David A. Zimlich , Thomas W. Voshell , David A. Cathey, Jr.
发明人： David A. Zimlich , Thomas W. Voshell , David A. Cathey, Jr.
IPC分类号： G09G310
CPC分类号： H01J3/022 , G09G3/22 , G09G2300/08 , G09G2330/026 , H01J2329/00
摘要： A method and a control circuit for controlling a field emission display to reduce emission to grid during turn on and turn off are provided. In an illustrative embodiment, the control circuit includes a threshold detector that receives an input signal proportional to an anode voltage (VAnode) for the display and produces a high or low output signal dependent on the level of VAnode. An output low corresponding to a high voltage at the display screen enables a gate element of a pass transistor that controls current flow to the grid. Alternately, an output high corresponding to a low voltage at the display screen enables a pull down transistor that controls discharge of the grid to ground. The control circuit can also include a fault detection circuit for detecting a sharp decrease in the anode voltage and discharging the grid. In an alternate embodiment, the control circuit shorts the emitter sites together during turn on and turn off and provides a high source impedance to restrict current flow to any one emitter site. The high source impedance can be permanent or switchable by a relay or switching circuit.
摘要翻译：提供一种用于控制场致发射显示以在打开和关闭期间减少到格栅的发射的方法和控制电路。在说明性实施例中，控制电路包括阈值检测器，其接收与用于显示器的阳极电压（VAnode）成比例的输入信号，并且根据VAnode的电平产生高或低输出信号。与显示屏幕上的高电压相对应的输出低电平使得能够控制电流流向电网的通过晶体管的栅极元件。或者，对应于显示屏幕处的低电压的输出高电平使得能够控制电网到地的放电的下拉晶体管。控制电路还可以包括用于检测阳极电压急剧下降并排出电网的故障检测电路。在替代实施例中，控制电路在导通和断开期间将发射极点一起短路，并提供高的源阻抗以限制电流流向任何一个发射器位置。高源阻抗可以由继电器或开关电路永久或切换。

29. 发明授权

US06285135B1 Field emission display having circuit for preventing emission to grid 有权
公开(公告)号：US06285135B1
公开(公告)日：2001-09-04
申请号：US09753396
申请日：2001-01-02
申请人： David A. Zimlich , David A. Cathey, Jr.
发明人： David A. Zimlich , David A. Cathey, Jr.
IPC分类号： G09G310
摘要： A field emission display includes an array of emitter sites, a grid for controlling electron emission from the emitter sites, and a display screen. The field emission display also includes a control circuit for controlling the grid for preventing emission to grid. The control circuit includes a high impedance grid bias path, and a low impedance grid bias path. In addition, the control circuit includes a sensing-switching circuit for sensing an anode voltage at the display screen, and switching from the high impedance to the low impedance grid bias path upon detection of a threshold anode voltage. An alternate embodiment control circuit is configured to provide a programmable delay during enabling of the grid to insure that the display screen reaches the threshold voltage prior to electron emission. An alternate embodiment field emission display includes a focus ring that is controlled to prevent emission to grid.

30. 发明授权

US06186850B1 Method of preventing junction leakage in field emission displays 失效
标题翻译：防止场致发射显示器的结漏的方法
公开(公告)号：US06186850B1
公开(公告)日：2001-02-13
申请号：US09461917
申请日：1999-12-15
申请人： David A. Cathey, Jr. , John Lee
发明人： David A. Cathey, Jr. , John Lee
IPC分类号： H01J902
CPC分类号： H01J9/025 , H01J29/04 , H01J29/06 , H01J29/89 , H01J31/127 , H01J2201/319
摘要： A method for fabricating a field emission display (FED) with improved junction leakage characteristics is provided. The method includes the formation of a light blocking element between a cathodoluminescent display screen of the FED and semiconductor junctions formed on a baseplate of the FED. The light blocking element protects the junctions from light formed at the display screen and light generated in the environment striking the junctions. Electrical characteristics of the junctions thus remain constant and junction leakage is improved. The light blocking element may be formed as an opaque light absorbing or light reflecting layer. In addition, the light blocking element may be patterned to protect predetermined areas of the baseplate and may provide other circuit functions such as an interconnect layer.
摘要翻译：提供了一种制造具有改善的结漏电特性的场发射显示（FED）的方法。该方法包括在FED的阴极发光显示屏和形成在FED的底板上的半导体结之间形成遮光元件。光阻挡元件保护接点免受在显示屏上形成的光和在环境中产生的光的撞击。因此，结的电气特性保持恒定，并且提高结漏电。遮光元件可以形成为不透明的光吸收或光反射层。此外，遮光元件可以被图案化以保护基板的预定区域并且可以提供诸如互连层的其它电路功能。

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