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21. 发明授权

US07355657B2 Laser illuminated projection displays 失效
标题翻译：激光照明投影显示屏
公开(公告)号：US07355657B2
公开(公告)日：2008-04-08
申请号：US11011075
申请日：2004-12-14
申请人： Juan L. Chilla , Sergei V. Govorkov , Andrea Caprara , Murray K. Reed , Luis A. Spinelli
发明人： Juan L. Chilla , Sergei V. Govorkov , Andrea Caprara , Murray K. Reed , Luis A. Spinelli
IPC分类号： H04N9/31 , H01S3/08 , G03B21/14
CPC分类号： H04N9/3129 , H04N9/3114 , H04N9/315
摘要： A projection video display includes a light source including an OPS-laser delivering laser radiation in multiple transverse modes (a multiple-transverse-mode OPS-laser). The display includes a spatial light modulator for spatially modulating the radiation from the multiple-transverse-mode OPS-laser in accordance with a portion of an image to be displayed. Projection optics project the spatially modulated light on a screen on which the image is to be displayed. In one example the OPS-laser is a diode-laser array pumped OPS-laser and is one of three lasers, one delivering red light, one delivering blue light, and the other delivering green light. The lasers are time modulated such that the spatial light modulator receives light from each of the lasers separately. The OPS laser is directly time modulated by periodically turning the diode-laser array on and off.
摘要翻译：投影视频显示器包括包括以多个横向模式递送激光辐射的OPS激光器（多横模OPS激光器）的光源。显示器包括用于根据要显示的图像的一部分来空间调制来自多横模OPS激光器的辐射的空间光调制器。投影光学器件将空间调制光投射到要显示图像的屏幕上。在一个示例中，OPS激光器是二极管激光阵列泵浦OPS激光器，是三个激光器之一，一个发射红光，一个发射蓝光，另一个传递绿光。激光器被时间调制，使得空间光调制器分别接收来自每个激光器的光。 OPS激光器通过周期性地打开和关闭二极管激光器阵列而被直接时间调制。

22. 发明申请

US20080019010A1 High power and high brightness diode-laser array for material processing applications 失效
标题翻译：大功率和高亮度二极管 - 激光器阵列用于材料加工应用
公开(公告)号：US20080019010A1
公开(公告)日：2008-01-24
申请号：US11488578
申请日：2006-07-18
申请人： Sergei V. Govorkov , Sol Peter DiJaili , Douglas William Anthon , Luis A. Spinelli
发明人： Sergei V. Govorkov , Sol Peter DiJaili , Douglas William Anthon , Luis A. Spinelli
IPC分类号： G02B27/30
CPC分类号： B23K26/0613 , G02B19/0014 , G02B19/0028 , G02B19/0057 , G02B27/0905 , G02B27/0994 , G02B27/283 , H01S5/005 , H01S5/0071 , H01S5/02248 , H01S5/02252 , H01S5/02272 , H01S5/02484 , H01S5/4012 , H01S5/4018 , H01S5/4025 , H01S5/4043 , H01S5/4056 , H01S5/4087
摘要： Arrangements for combination and fast-axis alignment of fast-axes of diode-laser beams are disclosed. Alignment arrangements include providing each diode-laser with a corresponding alignable fast-axis collimating lens, providing individually alignable mirrors for steering an re-orienting beams from each diode-laser, and providing single diode-laser slab-modules in which the diode-laser beams can be pre-aligned to a common propagation-axis direction, and in which edges and surfaces of the slabs can be used to align the fast and slow-axes of the beams. Beam combination methods include combination by dichroic elements, polarization-sensitive elements, and optical fiber bundles.
摘要翻译：公开了二极管激光束的快速轴组合和快速对准的布置。对准布置包括为每个二极管激光器提供相应的可对准的快轴准直透镜，提供用于转向来自每个二极管激光器的重定向光束的单独对准的反射镜，并提供单个二极管激光板模块，其中二极管激光器梁可以预先对齐到公共传播轴方向，并且其中板的边缘和表面可以用于对准梁的快轴和慢轴。光束组合方法包括二色性元件，偏振敏感元件和光纤束的组合。

23. 发明授权

US07952603B2 Diode-laser marker with one-axis scanning mirror mounted on a translatable carriage 有权
标题翻译：具有安装在可平移滑架上的单轴扫描镜的二极管激光标记
公开(公告)号：US07952603B2
公开(公告)日：2011-05-31
申请号：US12240126
申请日：2008-09-29
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J15/14 , B41J27/00
CPC分类号： B41J15/14 , B41J2/471 , G02B26/0858 , G02B26/105
摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.
摘要翻译：用于在磁带上标记位图图像的设备包括可调制激光束的源。光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。振动镜将光束引导到安装在滑架上的聚焦透镜。聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。磁带是递增的，并且重复的滑动遍历被完成打印位图图像。

24. 发明申请

US20100079572A1 DIODE-LASER MARKER WITH ONE-AXIS SCANNING MIRROR MOUNTED ON A TRANSLATABLE CARRIAGE 有权
标题翻译：具有单向扫描镜的二极管激光标记安装在可转换的载体上
公开(公告)号：US20100079572A1
公开(公告)日：2010-04-01
申请号：US12240126
申请日：2008-09-29
申请人： Sergei V. Govorkov , John H. Jerman
发明人： Sergei V. Govorkov , John H. Jerman
IPC分类号： B41J2/47
CPC分类号： B41J15/14 , B41J2/471 , G02B26/0858 , G02B26/105
摘要： Apparatus for marking a bitmap image on tape includes a source of a modulatable laser-beam. The beam is directed to an oscillating mirror on a carriage translatable across the width direction of the tape. The oscillating mirror directs the beam to a focusing lens mounted on the carriage. The focusing lens is arranged to focus the beam to a focal-spot on the tape. As the carriage is translated, the focal-spot is swept reciprocally in a wave-like path across the tape. Modulation of the beam is arranged such that pixels of a plurality of rows of the bitmap image are printed in one traverse of the carriage. The tape is advanced incrementally and repeated traverses of the carriage are made to complete printing of the bitmap image.
摘要翻译：用于在磁带上标记位图图像的设备包括可调制激光束的源。光束被引导到可跨越带的宽度方向平移的滑架上的振动反射镜。振动镜将光束引导到安装在滑架上的聚焦透镜。聚焦透镜被布置成将光束聚焦到胶带上的焦斑上。当托架被翻译时，焦斑以波浪状轨迹往复扫过磁带。布置波束的调制使得位图图像的多行的像素被打印在滑架的一个横越中。磁带是递增的，并且重复的滑动遍历被完成打印位图图像。

25. 发明授权

US07489429B2 Precision laser machining apparatus 失效
标题翻译：精密激光加工设备
公开(公告)号：US07489429B2
公开(公告)日：2009-02-10
申请号：US11674730
申请日：2007-02-14
申请人： Michael J. Scaggs , Thomas Schoelzel , Sergei V. Govorkov
发明人： Michael J. Scaggs , Thomas Schoelzel , Sergei V. Govorkov
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/105
摘要： A focused laser beam having an optical axis passes through a first lens mounted to a first galvanometer and a second lens mounted to a second galvanometer. The first galvanometer is adapted to tilt the first lens about a X axis and the second galvanometer is adapted to tilt the second lens about a Y axis. This displaces the focused laser beam in a controlled manner from the optical axis to enable laser machining of very precise geometric features over a large processing window. In a preferred embodiment, the first and second lenses are a pair of inverted positive meniscus lenses, of high index of refraction material.
摘要翻译：具有光轴的聚焦激光束通过安装到第一电流计的第一透镜和安装到第二电流计的第二透镜。第一电流计适于使第一透镜围绕X轴倾斜，并且第二电流计适于使第二透镜围绕Y轴倾斜。这使得聚焦的激光束以受控的方式从光轴移位，使得能够在大的处理窗口上激光加工非常精确的几何特征。在优选实施例中，第一透镜和第二透镜是高折射率材料的一对反向正弯月形透镜。

26. 发明申请

US20080291962A1 BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权
标题翻译： BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

27. 发明申请

US20080151948A1 Frequency-doubled edge-emitting semiconductor lasers 失效
公开(公告)号：US20080151948A1
公开(公告)日：2008-06-26
申请号：US11643114
申请日：2006-12-21
申请人： Sergei V. Govorkov , R. Russel Austin
发明人： Sergei V. Govorkov , R. Russel Austin
IPC分类号： H01S3/10
CPC分类号： H01S5/026 , H01S5/028 , H01S5/041 , H01S5/0604 , H01S5/1032 , H01S5/125 , H01S5/3211 , H01S5/4031
摘要： A frequency-doubled, edge-emitting semiconductor laser includes a separate confinement heterostructure surmounted by a waveguide including a converting layer of a periodically poled, optically nonlinear material. Fundamental radiation generated in the heterostructure is directionally coupled from the heterostructure into the waveguide, is converted to second-harmonic radiation in the converting layer and is delivered from the waveguide as output radiation. In one example, a distributed Bragg grating is included at an interface between the heterostructure and the waveguide for facilitating coupling of fundamental radiation from the heterostructure into the waveguide.

28. 发明申请

US20080014685A1 Amorphous silicon crystallization using combined beams from optically pumped semiconductor lasers 失效
标题翻译：使用光泵浦半导体激光器的组合光束进行非晶硅结晶
公开(公告)号：US20080014685A1
公开(公告)日：2008-01-17
申请号：US11487798
申请日：2006-07-17
申请人： Sergei V. Govorkov , R. Russel Austin , Joerg Ferber
发明人： Sergei V. Govorkov , R. Russel Austin , Joerg Ferber
IPC分类号： H01L21/84 , H01L21/00
CPC分类号： B23K26/0604 , B23K26/0613 , B23K2101/40
摘要： An amorphous silicon layer on a glass substrate is crystallized by concentrating CW radiation from a number of OPS-lasers into a line of light on the layer. The layer is moved with respect to the line of light to control the dwell time of the line on any location on the layer and to crystallize an extended area of the layer.
摘要翻译：通过将来自多个OPS激光器的CW辐射集中到该层上的光线中，玻璃基板上的非晶硅层被结晶。该层相对于光线移动，以控制该层在该层上任何位置上的停留时间并使该层的延伸区域结晶。

29. 发明授权

US06690703B1 Molecular fluorine laser system 失效
标题翻译：分子氟激光系统
公开(公告)号：US06690703B1
公开(公告)日：2004-02-10
申请号：US10211971
申请日：2002-08-02
申请人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
发明人： Klaus Wolfgang Vogler , Sergei V. Govorkov , Gongxue Hua , Frank Voss , Elko Bergmann
IPC分类号： H01S3225
CPC分类号： H01S3/225 , H01S3/08 , H01S3/2308 , H01S3/2366
摘要： A molecular fluorine laser includes a discharge chamber filled with a gas mixture including molecular fluorine and a buffer gas and not including a laser active rare gas, multiple electrodes within the discharge chamber defining a discharge region therebetween connected to a pulsed discharge circuit for applying discharge pulses to the electrodes for energizing the gas mixture, and a resonator including the discharge chamber for generating an oscillator laser beam at a wavelength around 157 nm and a bandwidth of less than 0.6 pm. The laser further includes a power amplifier for increasing the energy of the attenuated oscillator laser beam to a second predetermined energy for lithographic processing, a line-narrowing unit for reducing the bandwidth, a low intensity suppressor module to suppress the weaker lines of the F2-laser, and a synchronization unit to synchronize the oscillator and amplifier.
摘要翻译：分子氟激光器包括：填充有分子氟和缓冲气体并且不包括激光活性稀有气体的气体混合物的放电室，放电室内的多个电极限定其间连接到脉冲放电电路的放电区域，用于施加放电脉冲到用于激励气体混合物的电极，以及包括用于产生波长约157nm和带宽小于0.6μm的振荡器激光束的放电室的谐振器。激光器还包括用于将衰减振荡器激光束的能量增加到用于光刻处理的第二预定能量的功率放大器，用于减小带宽的线窄变换单元，用于抑制F2- 激光器和同步单元来同步振荡器和放大器。

30. 发明授权

US06393040B1 Molecular fluorine (F2) excimer laser with reduced coherence length 失效
标题翻译：分子氟（F2）准分子激光具有减小的相干长度
公开(公告)号：US06393040B1
公开(公告)日：2002-05-21
申请号：US09482698
申请日：2000-01-13
申请人： Sergei V. Govorkov , Uwe Stamm
发明人： Sergei V. Govorkov , Uwe Stamm
IPC分类号： H01S313
CPC分类号： H01S3/225 , H01S3/106 , H01S3/1062 , H01S3/2258
摘要： A molecular fluorine (F2) laser is provided wherein the gas mixture includes molecular fluorine for generating an emission spectrum including two or three closely spaced lines around 157 nm. An optical method and means are provided for selecting an emission line from among the plurality of closely spaced emission lines of the molecular fluorine laser gas volume and broadening the spectrum of said selected emission line. This approach of broadening the spectrum reduces the coherence length of the output beam. As a result, speckle may be reduced or avoided in microlithography applications.
摘要翻译：提供分子氟（F2）激光器，其中气体混合物包括用于产生包括在157nm附近的两个或三个紧密间隔的线的发射光谱的分子氟。提供一种光学方法和装置，用于从分子氟激光器气体体积的多个紧密间隔的发射线中选择发射线，并且扩大所述选择的发射线的光谱。扩展频谱的这种方法降低了输出光束的相干长度。结果，在微光刻应用中可能会减少或避免斑点。

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