专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明授权

US07149022B2 Optical scanner with curved mirror and method of manufacturing the same 有权
标题翻译：具有曲面镜的光学扫描仪及其制造方法
公开(公告)号：US07149022B2
公开(公告)日：2006-12-12
申请号：US10872480
申请日：2004-06-22
申请人： Yong-kweun Mun , Ju-hyun Lee , Young-chul Ko , Jin-ho Lee
发明人： Yong-kweun Mun , Ju-hyun Lee , Young-chul Ko , Jin-ho Lee
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.
摘要翻译：提供了一种光学扫描器及其制造方法。光学扫描器包括矩形框架，H形台阶，其在垂直于框架内的中心轴线的第一方向的第二方向上线性地驱动，并且包括位于中心轴线的方向上的中心区域和四个延伸的从平行于中心轴线的中心区域的相对侧延伸的区域，设置在中心区域上并沿着第二方向扫描入射在其表面上的激光束的圆柱形反射镜，扭矩杆设置在中心轴并且通过连接框架和平台的中心区域来支撑平台，以及台架驱动结构，其包括形成在舞台的两个长边处的驱动梳电极和形成在框架的相应侧的固定梳电极，平行于第一个方向。

22. 发明申请

US20050117235A1 Micro mirror and method for fabricating the same 有权
标题翻译：微镜及其制造方法
公开(公告)号：US20050117235A1
公开(公告)日：2005-06-02
申请号：US11000004
申请日：2004-12-01
申请人： Young-chul Ko , Jin-ho Lee , Jin-woo Cho
发明人： Young-chul Ko , Jin-ho Lee , Jin-woo Cho
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G02B26/10 , G02B7/182
CPC分类号： G02B26/0833 , G02B26/105
摘要： A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要翻译：微镜结构在高速驱动的同时具有增大的驱动角度。微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转地驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和一对弹簧部分，以及包括设置在相邻部分上的移动梳状物的驱动部分。在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。根据本发明，通过存在椭圆形邻接部分，可以在不大幅度增加旋转惯性力矩的情况下增加力矩。因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

23. 发明授权

US07436574B2 Frequency tunable resonant scanner 失效
标题翻译：频率可调共振扫描仪
公开(公告)号：US07436574B2
公开(公告)日：2008-10-14
申请号：US11806946
申请日：2007-06-05
申请人： Young-chul Ko , Jin-ho Lee , Ju-hyun Lee , Yong-kweun Mun
发明人： Young-chul Ko , Jin-ho Lee , Ju-hyun Lee , Yong-kweun Mun
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.
摘要翻译：提供了一种单轴驱动光学扫描器，其包括基板，从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架，从两个边缘侧的中间部分支撑台阶的扭簧固定到基板以支撑扭簧的支撑部分，相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极舞台。

24. 发明申请

US20070268099A1 Actuator and two-dimensional scanner 审中-公开
标题翻译：执行器和二维扫描仪
公开(公告)号：US20070268099A1
公开(公告)日：2007-11-22
申请号：US11654582
申请日：2007-01-18
申请人： Hee-moon Jeong , Seong-ho Shin , Jin-ho Lee , Jin-woo Cho , Young-chul Ko
发明人： Hee-moon Jeong , Seong-ho Shin , Jin-ho Lee , Jin-woo Cho , Young-chul Ko
IPC分类号： H01H51/22
CPC分类号： H02K33/18 , G02B26/085 , G02B26/101
摘要： An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.
摘要翻译：执行器和二维扫描仪。致动器和二维扫描仪包括基板，围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板，形成磁力的磁场产生部分，其作用在与第二轴平行的方向，在第一轴的位置具有最小尺寸，与第一轴和第二轴的至少一个同轴设置的支撑构件，连接基板和可动板，并形成可移动板的枢转轴线和驱动线圈部分，可动板的驱动力被施加到可动板上，以便相对于第一轴线和第二轴线的交叉点具有点对称形状轴。

25. 发明授权

US07242511B2 Frequency tunable resonant scanner 失效
标题翻译：频率可调共振扫描仪
公开(公告)号：US07242511B2
公开(公告)日：2007-07-10
申请号：US10963693
申请日：2004-10-14
申请人： Young-chul Ko , Jin-ho Lee , Ju-hyun Lee , Yong-kweun Mun
发明人： Young-chul Ko , Jin-ho Lee , Ju-hyun Lee , Yong-kweun Mun
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.
摘要翻译：提供了一种单轴驱动光学扫描器，其包括基板，从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架，从两个边缘侧的中间部分支撑台阶的扭簧固定到基板以支撑扭簧的支撑部分，相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极舞台。

26. 发明授权

US07185994B2 Micro mirror and method for fabricating the same 有权
标题翻译：微镜及其制造方法
公开(公告)号：US07185994B2
公开(公告)日：2007-03-06
申请号：US11000004
申请日：2004-12-01
申请人： Young-chul Ko , Jin-ho Lee , Jin-woo Cho
发明人： Young-chul Ko , Jin-ho Lee , Jin-woo Cho
IPC分类号： G02B7/182
CPC分类号： G02B26/0833 , G02B26/105
摘要： A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要翻译：微镜结构在高速驱动的同时具有增大的驱动角度。微反射镜包括反射光的可旋转镜部分，用于支撑镜部分的一对弹簧部分，并且当镜部被旋转地驱动时用作镜部分的旋转轴线，用于连接镜部分的椭圆形邻接部分和一对弹簧部分，以及包括设置在相邻部分上的移动梳状物的驱动部分。在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。根据本发明，通过存在椭圆形邻接部分，可以在不大幅度增加旋转惯性力矩的情况下增加力矩。因此，可以提供具有增加的驱动角度的高速光学扫描仪，这是高分辨率激光电视所需要的。

27. 发明授权

US07180647B2 Optical scanner and method of fabricating the same 失效
标题翻译：光学扫描器及其制造方法
公开(公告)号：US07180647B2
公开(公告)日：2007-02-20
申请号：US10226176
申请日：2002-08-23
申请人： Jin-ho Lee , Young-chul Ko
发明人： Jin-ho Lee , Young-chul Ko
IPC分类号： G02F1/03
CPC分类号： G02B26/0841
摘要： An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.
摘要翻译：提供了一种光学扫描器及其制造方法。光学扫描器包括基底，框架，H形台，支架和台架驱动结构。在基底基板上形成具有预定图案的布线层。框架具有形成在基底基板上的矩形框架形状。 H形台具有相对于单轴中心轴在框架中执行跷跷板运动并位于单轴中心轴线上的中心区域，以及从中心区域的两侧延伸的四个延伸区域，单轴中心轴通过，平行于单轴中心轴。支持者具有位于单轴中心轴上的支撑梁，并且连接到从支撑梁延伸并且连接到平台的中心区域的框架和扭杆。舞台驱动结构分别在舞台下方和底座衬底上面具有移动梳状电极和固定梳状电极。多个梳状电极可以形成在延伸区域上。因此，可以大大提高驱动力，这导致使用相当低的电压获得类似的驱动速度。此外，对于高速驾驶，舞台的重量应该大大降低。为此，舞台被切成多个阶段。此外，为了增加驱动力，在台的右侧和左侧另外形成多个梳状电极。

28. 发明授权

US07083737B2 Method for manufacturing a micro-actuator 失效
标题翻译：微型致动器的制造方法
公开(公告)号：US07083737B2
公开(公告)日：2006-08-01
申请号：US10791756
申请日：2004-03-04
申请人： Jin-ho Lee , Young-chul Ko , Do-hyun Kong
发明人： Jin-ho Lee , Young-chul Ko , Do-hyun Kong
IPC分类号： H01L21/302
CPC分类号： B81C3/001 , B81B2201/033 , B81B2203/0136 , B81B2203/0181 , B81B2203/04 , B81B2203/058 , B81C1/00142 , B81C2201/0132 , B81C2203/038 , Y10T29/42 , Y10T29/435
摘要： A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.
摘要翻译：公开了一种具有能够进行跷跷板运动的平台的微致动器及其制造方法。在本发明的微型致动器中，在台架的底部形成多个平行的驱动梳状电极，在基板上形成多个平行的固定梳状电极。在舞台的两侧是一个扭杆，可以实现跷跷板的动作。扭杆由包括第一框架层和第二框架层的框架支撑。扭杆和第一框架层形成一体。第一和第二框架层通过在金属层之间的金属共晶接合层结合。

29. 发明申请

US20050077633A1 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same 失效
标题翻译：阳极结合结构及其制造方法以及使用其制造光学扫描器的方法
公开(公告)号：US20050077633A1
公开(公告)日：2005-04-14
申请号：US11004096
申请日：2004-12-06
申请人： Young-chul Ko , Jin-ho Lee , Chang-soo Lee
发明人： Young-chul Ko , Jin-ho Lee , Chang-soo Lee
IPC分类号： G02B26/10 , B81B1/00 , B81B3/00 , B81C1/00 , H01L21/00 , H01L23/48 , H01L29/40
CPC分类号： B81C3/001 , B81B2201/047 , B81B2203/0136 , B81B2203/04 , B81C2203/031 , Y10T428/12597
摘要： Provided are an anodic bonding structure, a fabricating method thereof, and a method of manufacturing an optical scanner using the same. Provided anodic bonding structure having a substrate and a glass substrate arranged above the substrate, includes at least one dielectric and at least one metal layer deposited between the substrate and the glass substrate, with a dielectric arranged uppermost, wherein the uppermost dielectric and the glass substrate are anodic bonded. Provided method of fabricating an anodic bonding structure having a substrate and a glass substrate arranged above the substrate, includes an act of depositing at least one dielectric and at least one metal layer between the substrate and the glass substrate, with dielectric arranged uppermost, and an act of anodic bonding the uppermost dielectric with the glass substrate. In the provided structure of depositing the metal layer and the dielectric between the substrate and the glass substrate, the dielectric and the glass substrate or the dielectric and the metal layer are anodic bonded so that a stable performance is attained to manufacture various micro-electromechanical systems (MEMS) devices.
摘要翻译：本发明提供阳极结合结构及其制造方法，以及使用其制造光学扫描器的方法。提供了具有衬底和布置在衬底上方的玻璃衬底的阳极结合结构，包括沉积在衬底和玻璃衬底之间的至少一个电介质和至少一个金属层，其中布置有最上层的电介质，其中最上面的电介质和玻璃衬底阳极结合。提供一种制造具有布置在基板上方的基板和玻璃基板的阳极结合结构的方法，包括在基板和玻璃基板之间沉积至少一个电介质和至少一个金属层的动作，其中电介质布置在最上面，并且将最上面的电介质与玻璃基板阳极接合。在提供的金属层和电介质在基板和玻璃基板之间沉积的结构中，电介质和玻璃基板或电介质和金属层被阳极接合，从而获得稳定的性能来制造各种微机电系统（MEMS）器件。

30. 发明申请

US20080168670A1 ROTATIONAL MEMS DEVICE HAVING PIEZO-RESISTOR SENSOR 失效
标题翻译：具有PIEZO电阻传感器的旋转MEMS器件
公开(公告)号：US20080168670A1
公开(公告)日：2008-07-17
申请号：US11858183
申请日：2007-09-20
申请人： Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
发明人： Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
IPC分类号： G01B7/30
CPC分类号： G01D5/18 , G02B6/359 , G02B26/0841
摘要： A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.
摘要翻译：提供了具有压电阻传感器的旋转微机电系统（MEMS）。旋转MEMS装置包括一对扭转弹簧，其支撑一级，四个电阻器，至少一个电阻器沿扭转弹簧的中心轴线形成，以及连接到四个电阻器的电信号电缆，其中至少一个在具有（100）面的n型硅衬底上沿<100>方向形成扭转弹簧，并且形成在至少一个扭转弹簧上的电阻器形成为<110>组方向。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式