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    • 1. 发明授权
    • Micro mirror and method for fabricating the same
    • 微镜及其制造方法
    • US07301692B2
    • 2007-11-27
    • US11668713
    • 2007-01-30
    • Young-chul KoJin-ho LeeJin-woo Cho
    • Young-chul KoJin-ho LeeJin-woo Cho
    • G02B26/00G02B26/08H01L29/00H02N1/00C23F1/00
    • G02B26/0833G02B26/105
    • Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
    • 公开了一种微镜,其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状部分的驱动部分,以及设置在移动梳状体上方和/或下方的固定梳齿,以对应于移动梳来产生静电力。 根据本发明,通过存在椭圆形相邻部分,可以大大提高力矩而不增加旋转惯性矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。
    • 2. 发明申请
    • Micro mirror and method for fabricating the same
    • 微镜及其制造方法
    • US20050117235A1
    • 2005-06-02
    • US11000004
    • 2004-12-01
    • Young-chul KoJin-ho LeeJin-woo Cho
    • Young-chul KoJin-ho LeeJin-woo Cho
    • B81B3/00B81C1/00G02B26/08G02B26/10G02B7/182
    • G02B26/0833G02B26/105
    • A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
    • 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转地驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明,通过存在椭圆形邻接部分,可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。
    • 4. 发明申请
    • MICRO MIRROR AND METHOD FOR FABRICATING THE SAME
    • 微镜和其制造方法
    • US20070121188A1
    • 2007-05-31
    • US11668713
    • 2007-01-30
    • Young-chul KOJin-ho LeeJin-woo Cho
    • Young-chul KOJin-ho LeeJin-woo Cho
    • G02B26/08
    • G02B26/0833G02B26/105
    • Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
    • 公开了一种微镜,其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状部分的驱动部分,以及设置在移动梳状体上方和/或下方的固定梳齿,以对应于移动梳来产生静电力。 根据本发明,通过存在椭圆形相邻部分,可以大大提高力矩而不增加旋转惯性矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。
    • 5. 发明申请
    • Biaxial actuator and method of manufacturing the same
    • 双轴致动器及其制造方法
    • US20060082250A1
    • 2006-04-20
    • US11248169
    • 2005-10-13
    • Young-chul KoJin-ho LeeJin-woo ChoHyun-ku Jeong
    • Young-chul KoJin-ho LeeJin-woo ChoHyun-ku Jeong
    • G02B26/08G02B26/00H02N1/00
    • H02N1/008G02B26/0841
    • Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.
    • 提供双轴致动器及其制造方法。 双轴致动器包括:在第一方向上跷跷板的台架单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元,包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极,使得第一驱动和固定梳状电极 互相交替; 第二支撑单元,其支撑所述第一支撑单元,使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元,包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极,其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处,使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。
    • 6. 发明授权
    • Biaxial actuators with comb electrodes having separated vertical positions
    • 具有梳状电极的双轴致动器具有分离的垂直位置
    • US07508111B2
    • 2009-03-24
    • US11248169
    • 2005-10-13
    • Young-chul KoJin-ho LeeJin-woo ChoHyun-ku Jeong
    • Young-chul KoJin-ho LeeJin-woo ChoHyun-ku Jeong
    • H02N1/00G02B26/08
    • H02N1/008G02B26/0841
    • Provided are a biaxial actuator and a method of manufacturing the same. The biaxial actuator includes: a stage unit seesawing in a first direction; a first support unit supporting the stage unit; a stage unit driving unit including first driving comb electrodes outwardly extending from opposite sides of the stage unit in the first direction, and first fixed comb electrodes extending from the first support unit facing the first driving comb electrodes such that the first driving and fixed comb electrodes alternate with each other; a second support unit supporting the first support unit such that the first support unit seesaws in a second direction perpendicular to the first direction; and a first support unit driving unit including second driving comb electrodes installed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the first and second driving comb electrodes and the stage unit are formed at a first level, and the first and second fixed comb electrodes are formed at a second level lower than the first level such that the first and second fixed comb electrodes do not overlap with the first and second driving comb electrodes at a vertical plane.
    • 提供双轴致动器及其制造方法。 双轴致动器包括:在第一方向上跷跷板的平台单元; 支撑舞台单元的第一支撑单元; 舞台单元驱动单元,包括从第一方向上的舞台单元的相对侧向外延伸的第一驱动梳状电极和从第一支撑单元延伸到第一驱动梳状电极的第一固定梳状电极,使得第一驱动和固定梳状电极 互相交替; 第二支撑单元,其支撑所述第一支撑单元,使得所述第一支撑单元在垂直于所述第一方向的第二方向上跷跷板; 以及第一支撑单元驱动单元,包括安装在第一支撑单元处的第二驱动梳状电极和与第二驱动梳状电极相对应的第二固定梳状电极,其中第一和第二驱动梳状电极和平台单元形成在第一级 并且第一和第二固定梳电极形成在比第一电平低的第二电平处,使得第一和第二固定梳电极在垂直平面处不与第一和第二驱动梳电极重叠。
    • 7. 发明申请
    • Actuator and two-dimensional scanner
    • 执行器和二维扫描仪
    • US20070268099A1
    • 2007-11-22
    • US11654582
    • 2007-01-18
    • Hee-moon JeongSeong-ho ShinJin-ho LeeJin-woo ChoYoung-chul Ko
    • Hee-moon JeongSeong-ho ShinJin-ho LeeJin-woo ChoYoung-chul Ko
    • H01H51/22
    • H02K33/18G02B26/085G02B26/101
    • An actuator and a two dimensional scanner. The actuator and the two dimensional scanner include a base plate, a movable plate pivoted around at least one of a first imaginary axis or a second imaginary axis which are perpendicular to each other, a magnetic field-producing portion forming a magnetic force which acts in a direction parallel to the second axis and has a minimum size at a position of the first axis, a support member disposed coaxially with at least one of the first axis and the second axis, connecting the base plate and the movable plate, and forming a pivoting axis of the movable plate, and a driving coil portion to which a driving power of the movable plate is applied and disposed on the movable plate so as to have a point symmetry shape with respect to an intersecting point of the first axis and the second axis.
    • 执行器和二维扫描仪。 致动器和二维扫描仪包括基板,围绕彼此垂直的第一假想轴或第二假想轴中的至少一个枢转的可动板,形成磁力的磁场产生部分,其作用在 与第二轴平行的方向,在第一轴的位置具有最小尺寸,与第一轴和第二轴的至少一个同轴设置的支撑构件,连接基板和可动板,并形成 可移动板的枢转轴线和驱动线圈部分,可动板的驱动力被施加到可动板上,以便相对于第一轴线和第二轴线的交叉点具有点对称形状 轴。
    • 8. 发明授权
    • Micro mirror and method for fabricating the same
    • 微镜及其制造方法
    • US07185994B2
    • 2007-03-06
    • US11000004
    • 2004-12-01
    • Young-chul KoJin-ho LeeJin-woo Cho
    • Young-chul KoJin-ho LeeJin-woo Cho
    • G02B7/182
    • G02B26/0833G02B26/105
    • A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
    • 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转地驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明,通过存在椭圆形邻接部分,可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。
    • 9. 发明授权
    • Optical scanner and laser image projector using the same
    • 光学扫描仪和激光图像投影机使用相同
    • US07369298B2
    • 2008-05-06
    • US11147344
    • 2005-06-08
    • Jin-ho LeeYoung-chul KoHyun-ku Jeong
    • Jin-ho LeeYoung-chul KoHyun-ku Jeong
    • A61B26/00A61B26/08
    • G02B26/105G02B26/0841H04N9/3129
    • Provided are an optical scanner including a micro-mirror having an improved a driving angle by using a micro-electro-mechanical system (MEMS) technique and a laser image projector using the same are provided. The optical scanner includes: a substrate; a mirror unit suspended over the substrate and spaced apart from the substrate by a predetermined distance; a supporter situated on the substrate and supporting both ends of the mirror unit so that the mirror unit is suspended over the substrate; a supporting axis connected between both ends of the mirror unit and the supporter so that the mirror unit can be rotatably supported by the supporter; a plurality of movable comb electrodes vertically formed on both sides of the mirror unit; and a plurality of static comb electrodes vertically formed on the substrate in such a way that the static comb electrodes alternate with the movable comb electrodes, wherein the static comb electrode is a two-layer structured electrode.
    • 提供了一种包括通过使用微机电系统(MEMS)技术具有改进的驱动角度的微反射镜的光学扫描器,并且提供了使用其的激光图像投影仪。 光学扫描器包括:基板; 镜子单元悬挂在基板上并与基板隔开预定距离; 支撑体,其位于所述基板上并且支撑所述反射镜单元的两端,使得所述反射镜单元悬挂在所述基板上; 连接在反射镜单元的两端和支撑体之间的支撑轴,使得反射镜单元能够被支撑件可旋转地支撑; 多个可动梳状电极,垂直地形成在反射镜单元的两侧; 以及多个静电梳电极,其以所述静电梳电极与所述可动梳电极交替的方式垂直地形成在所述基板上,其中所述静电梳电极为双层结构电极。
    • 10. 发明授权
    • Optical scanner with curved mirror and method of manufacturing the same
    • 具有曲面镜的光学扫描仪及其制造方法
    • US07149022B2
    • 2006-12-12
    • US10872480
    • 2004-06-22
    • Yong-kweun MunJu-hyun LeeYoung-chul KoJin-ho Lee
    • Yong-kweun MunJu-hyun LeeYoung-chul KoJin-ho Lee
    • G02B26/08
    • G02B26/0841
    • An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.
    • 提供了一种光学扫描器及其制造方法。 光学扫描器包括矩形框架,H形台阶,其在垂直于框架内的中心轴线的第一方向的第二方向上线性地驱动,并且包括位于中心轴线的方向上的中心区域和四个延伸的 从平行于中心轴线的中心区域的相对侧延伸的区域,设置在中心区域上并沿着第二方向扫描入射在其表面上的激光束的圆柱形反射镜,扭矩杆设置在 中心轴并且通过连接框架和平台的中心区域来支撑平台,以及台架驱动结构,其包括形成在舞台的两个长边处的驱动梳电极和形成在框架的相应侧的固定梳电极, 平行于第一个方向。