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    • 21. 发明授权
    • Method of fabricating cell of flash memory device
    • US06573139B2
    • 2003-06-03
    • US09903977
    • 2001-07-12
    • Seong-soo LeeJoon KimKang-ill Seo
    • Seong-soo LeeJoon KimKang-ill Seo
    • H01L21336
    • H01L27/11521H01L27/115
    • A method of forming a floating gate electrode of a cell of a flash memory device having an interval less than a critical dimension (CD) in a conventional photolithographic process, in which the reliability of a dielectric layer does not deteriorate and damage to a floating gate electrode during etching is prevented, is provided. According to the present invention, a protective layer formed of a material having a high etching selectivity with respect to a device isolation layer and a doped polysilicon layer is formed on the upper surface of the doped polysilicon layer forming the floating gate electrode. The protective layer is partially etched and includes a recess. Next, a material layer for forming a spacer, which is formed of a material having a high etching selectivity with respect to the device isolation layer and the doped polysilicon layer, is formed on the upper surface of the protective layer and is etched back, thus forming the spacer. Damage to the doped polysilicon layer during etching is prevented by the protective layer containing the recess. The floating gate electrode, which is arranged at an interval less than a limit value in a photolithographic process, can be formed by the spacer. The spacer and the protective layer are removed, and a step difference does not occur at edges of the floating gate electrode. Thus deterioration of the reliability of a dielectric layer formed on top of the floating gate electrode can be prevented.
    • 22. 发明申请
    • METHOD OF FORMING FINE PATTERN AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • 形成精细图案的方法和制造半导体器件的方法
    • US20120329224A1
    • 2012-12-27
    • US13495510
    • 2012-06-13
    • Yoo-chul KongJin-kwan LeeGyung-jin MinSeong-soo Lee
    • Yoo-chul KongJin-kwan LeeGyung-jin MinSeong-soo Lee
    • H01L21/308H01L21/336
    • H01L21/31144H01L21/0332H01L27/11556H01L27/11582
    • A method of forming a fine pattern and a method of manufacturing a semiconductor device. The method of forming a fine pattern includes: forming a hard mask layer on a to-be-etched layer; forming on the hard mask layer a first mask pattern including a plurality of elongated openings that are arranged at predetermined intervals in a first direction and a second direction different from the first direction and are offset from each other in adjacent columns in the second direction; forming on the hard mask layer a second mask pattern including at least two linear openings that each pass through the elongated openings in the adjacent columns and extend in the first direction; forming a hard mask pattern by etching the hard mask layer by using the second mask pattern as an etch mask; and etching the to-be-etched layer by using the hard mask pattern.
    • 形成精细图案的方法和制造半导体器件的方法。 形成精细图案的方法包括:在被蚀刻层上形成硬掩模层; 在所述硬掩模层上形成第一掩模图案,所述第一掩模图案包括多个细长开口,所述第一掩模图案沿着第一方向以不同于第一方向的第二方向以预定间隔布置,并且在相邻列中沿第二方向彼此偏移; 在所述硬掩模层上形成包括至少两个线性开口的第二掩模图案,每个所述至少两个线性开口穿过所述相邻列中的所述细长开口并在所述第一方向上延伸; 通过使用第二掩模图案作为蚀刻掩模来蚀刻硬掩模层来形成硬掩模图案; 并通过使用硬掩膜图案蚀刻被蚀刻层。
    • 25. 发明授权
    • Method of transmitting information with the help of chaotic signals
    • 借助混沌信号传输信息的方法
    • US07839939B2
    • 2010-11-23
    • US10996048
    • 2004-11-24
    • Seong-soo LeeYoung-hwan KimAlexander S. Dmitriev
    • Seong-soo LeeYoung-hwan KimAlexander S. Dmitriev
    • H04L27/00H04B1/707
    • H04L27/001H04B1/69
    • Spread spectrum transmission of information is performed using chaotic signals. Direct chaotic communication systems in which information is input to chaotic signal generated directly in information transmission frequency band, are achieved by forming broadband information carrier necessary for transmission and using a chaotic dynamic system whose structure is synthesized in advance in accordance with predetermined characteristics of broadband information carrier to cause chaotic dynamic system to provide operation of forming the broadband information carrier in form of a chaotic information carrier having prescribed spectral characteristics. Modulating the chaotic information carrier is carried out by forming chaotic radio or optic chaotic pulses from chaotic information carrier, with predetermined time intervals between pulses in accordance with the transmitted information signal, and the reception and demodulation at the receiving side is carried out using a dynamic system matched, in behavior, with chaotic dynamic system of transmitting side.
    • 使用混沌信号进行信息的扩频传输。 将信息输入到信息发送频带中直接生成的混沌信号的直接混沌通信系统通过形成传输所需的宽带信息载体并使用根据宽带信息的预定特性预先合成其结构的混沌动态系统来实现 导致混沌动态系统以具有规定频谱特性的混沌信息载体的形式提供形成宽带信息载体的操作。 混沌信息载体的调制是通过根据发送的信息信号,在脉冲之间以预定的时间间隔从混沌信息载体形成混沌无线电或光混沌脉冲,并且使用动态的方式来进行接收侧的接收和解调 系统匹配,在行为上,与发送方的混沌动态系统。
    • 26. 发明授权
    • Wireless communication system for reducing ranging time
    • 无线通信系统,减少测距时间
    • US07787516B2
    • 2010-08-31
    • US11501829
    • 2006-08-10
    • Jae-hyon KimYoung-hwan KimSeong-soo LeeJoonhyuk KangJaehwan KimYungil Kim
    • Jae-hyon KimYoung-hwan KimSeong-soo LeeJoonhyuk KangJaehwan KimYungil Kim
    • H04B1/00
    • H04B1/7183H04B1/692H04B1/71637H04B2001/6908
    • A wireless communication system and a method for reducing a ranging time. The communication system includes a main synchronization block group which processes the transceived signal and determines whether the transceived signal is a signal desired by a transmitting device when a receiving device re-transmits the transceived signal to the transmitting device; a ranging block which measures a distance between the transmitting device and the receiving device using a ranging signal when the transceived signal is the desired signal of the transmitting device based on the determination of the main synchronization block group and when the transceived signal is the ranging signal; and a symbol synchronization block which detects a start point and an end point of a symbol forming the signal when the transceived signal from the receiving device is a data communication signal. Accordingly, the fast ranging is feasible and channel occupation time can be shortened.
    • 一种无线通信系统和减少测距时间的方法。 所述通信系统包括:主同步块组,其处理所述收发信号,并且当接收设备将所述收发信号重新发送到所述发送设备时,确定所述收发信号是否为发送设备所期望的信号; 测距块,其基于主同步块组的确定以及当发送的信号是测距信号时,当发送信号是发送设备的期望信号时,使用测距信号来测量发送设备和接收设备之间的距离 ; 以及符号同步块,其当来自接收装置的收发信号是数据通信信号时,检测形成信号的符号的起始点和终点。 因此,快速测距是可行的,可以缩短通道占用时间。
    • 27. 发明授权
    • Apparatus and method for generation of noise signal
    • 用于产生噪声信号的装置和方法
    • US07786815B2
    • 2010-08-31
    • US11344067
    • 2006-02-01
    • Seong-soo LeeOleg Popov
    • Seong-soo LeeOleg Popov
    • H03B29/00
    • H03B29/00H03B21/01
    • An apparatus and method for generation of a noise signal are provided. The apparatus includes a noise synthesizing module and a noise signal transfer module. The noise synthesizing module includes a voltage controlled oscillator, a phase frequency detector, a phase locked loop filter, and a reference generator which form a phase locked loop. An output signal of the reference generator is provided to a first phase-frequency input of the phase-frequency detector, and an output signal of the voltage controlled oscillator is provided to a second input of the phase-frequency detector. An output signal of the phase-frequency detector is provided to an input of the phase locked loop filter, and an output of the phase locked loop filter is provided to a frequency control input of the voltage controlled oscillator. The noise signal transfer module includes a sinusoidal generator and a frequency mixer having a first input which is provided with an output signal of the phase frequency detector and a second input which is provided with an output signal of the sinusoidal.
    • 提供了一种用于产生噪声信号的装置和方法。 该装置包括噪声合成模块和噪声信号传送模块。 噪声合成模块包括形成锁相环的压控振荡器,相位频率检测器,锁相环滤波器和参考发生器。 参考发生器的输出信号被提供给相位频率检测器的第一相位频率输入,并且压控振荡器的输出信号被提供给相位频率检测器的第二输入端。 将相位频率检测器的输出信号提供给锁相环滤波器的输入,并将锁相环滤波器的输出提供给压控振荡器的频率控制输入端。 噪声信号传送模块包括正弦发生器和具有第一输入的混频器,第一输入端设置有相位频率检测器的输出信号,第二输入端设有正弦波输出信号。