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    • 21. 发明授权
    • Probe with electrostatic actuation and capacitive sensor
    • 探头带有静电驱动和电容传感器
    • US07898266B2
    • 2011-03-01
    • US12132665
    • 2008-06-04
    • Wayne Allen BoninDadi SetiadiLance Eugene Stover
    • Wayne Allen BoninDadi SetiadiLance Eugene Stover
    • G01R27/26G01B5/28
    • G01R1/06794
    • A supported probe device that has a probe tip and probe body, the probe body having a sample facing surface and an opposing surface. The probe tip and a first electrode are on the sample facing surface. A second electrode is present on the probe body opposing surface. A third electrode is spaced from the second electrode, so that the second electrode is between the third electrode and the probe body. A first DC voltage source is electrically coupled to the first electrode, as is a first sensing circuit. A second DC voltage source is electrically coupled to the second electrode, and an AC voltage source electrically coupled to the third electrode. The probe body may be cantilevered.
    • 支撑的探针装置,其具有探针尖端和探针主体,探针主体具有面向样品的表面和相对的表面。 探针尖端和第一电极位于面向样品的表面上。 第二电极存在于探针体相对表面上。 第三电极与第二电极间隔开,使得第二电极位于第三电极和探针体之间。 第一直流电压源电耦合到第一电极,如第一感测电路一样。 第二DC电压源电耦合到第二电极,以及电耦合到第三电极的AC电压源。 探针体可以是悬臂的。