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    • 21. 发明授权
    • Process for determining the crystal orientation in a wafer
    • 用于确定晶片中的晶体取向的方法
    • US06177285B1
    • 2001-01-23
    • US09142124
    • 1999-02-05
    • Gabriele JantkeArno SteckenbornThoralf Winkler
    • Gabriele JantkeArno SteckenbornThoralf Winkler
    • G01R3126
    • H01L22/12Y10S438/973
    • A method for determining the crystal orientation of a wafer using anisotropic etching in which an etching mask having mask openings such as circle scale marks arranged one beside the other is applied in relation to a preexisting marking of the wafer. Mask openings are configured in a double-T shape and are arranged one beside the other so that their first, transversely extending segments and the second transversely extending segments are situated at a predetermined distance apart and the areas connecting the segments are situated equidistant. The crystal orientation is determined with the distance of the two particular adjacent mask openings, the intervening space of which is least undercut, from the preexisting marking.
    • 使用各向异性蚀刻来确定晶片的晶体取向的方法,其中相对于晶片的预先存在的标记施加具有诸如圆形刻度标记的掩模开口的蚀刻掩模相对于晶片预先存在的标记。 掩模开口被构造成双T形并且彼此相邻布置,使得它们的第一横向延伸的段和第二横向延伸的段位于预定距离处,并且连接段的区域等距。 晶体取向由两个特定的相邻掩模开口的距离与其预先存在的标记距离最小而确定。
    • 22. 发明申请
    • FORCE TRANSDUCER FORMING A LOAD CELL
    • 强制传感器形成负载电池
    • US20140102218A1
    • 2014-04-17
    • US14118179
    • 2012-05-11
    • Dirk ScheibnerArno Steckenborn
    • Dirk ScheibnerArno Steckenborn
    • G01L1/08
    • G01L1/086G01G3/12G01G3/1416
    • A force transducer, in particular a weighing cell, includes a spring body, which deforms under the action of a force or load to be measured, and a sensor that includes two separate sensor parts mounted at different locations of the spring body and that generates a sensor signal which is dependent on the relative position of the sensor parts with respect to each other. In order to improve the adaptation of the sensor to the spring body, one of the sensor parts is attached to the spring body with interposition of an electromechanical actuator and a control device is present, which controls the actuator dependent on the sensor signal in the direction of a reduction in the positional difference of the sensor parts.
    • 力传感器,特别是称重传感器,包括在待测量的力或负载的作用下变形的弹簧体,以及包括安装在弹簧体的不同位置处的两个分开的传感器部件的传感器, 传感器信号取决于传感器部件相对于彼此的相对位置。 为了改善传感器对弹簧体的适应性,其中一个传感器部件通过插入机电致动器而连接到弹簧体,并且存在控制装置,该控制装置根据传感器信号在方向上控制致动器 降低传感器部件的位置差异。
    • 27. 发明申请
    • PRESSURE TRANSMITTER HAVING A PRESSURE SENSOR OF MICROMECHANICAL DESIGN
    • 具有微机械设计压力传感器的压力变送器
    • US20060144151A1
    • 2006-07-06
    • US10619582
    • 2003-07-16
    • Peter KrauseArno Steckenborn
    • Peter KrauseArno Steckenborn
    • G01L7/08
    • G01L19/0645G01L9/0027G01L19/146
    • A pressure transmitter has a housing (11) on which a pressure sensor (12) is fastened. There is provided in the housing a region, produced micromechanically, with reduced wall thickness that forms a separating diaphragm (22) such that the fluid located in a channel (16) does not act on the pressure sensor (12). The pressure sensor (12) is connected with a sensor diaphragm (24) directly to the separating diaphragm via a connecting layer (23), thereby rendering possible a highly space-saving design of the pressure transmitter. Consequently, the pressure transmitter can be formed, for example, by the pressure sensor and a channel structure, for example a microreactor, produced in a micromechanical design. A small dead volume in the channel structure is thereby produced in the region of the pressure transmitter.
    • 压力变送器具有紧固有压力传感器(12)的壳体(11)。 在壳体中设置有微机械制造的壁,其具有减小的壁厚,形成分隔膜(22),使得位于通道(16)中的流体不会作用在压力传感器(12)上。 压力传感器(12)通过连接层(23)与传感器隔膜(24)直接连接到分离膜片上,从而可以实现压力变送器的高度节省空间的设计。 因此,压力变送器可以由例如由微机械设计生产的压力传感器和通道结构(例如微反应器)形成。 因此,在压力变送器的区域中产生了通道结构中的小的死体积。
    • 28. 发明授权
    • Gas flow switching device
    • 气流开关装置
    • US06447581B2
    • 2002-09-10
    • US09816474
    • 2001-03-26
    • Udo GellertFriedhelm MuellerArno Steckenborn
    • Udo GellertFriedhelm MuellerArno Steckenborn
    • B01D1508
    • G01N30/32G01N30/10G01N30/465G01N2030/324
    • To switch gas flows between gas sources and gas sinks, a gas flow switching device includes gas passages, which communicate with one another and which have connecting points for the gas sources and the gas sinks. Furthermore, the gas flow switching device has a device for setting different pressures. To simplify the construction of the gas flow switching device and to achieve precisely defined pressure and flow conditions without the need for calibration, the gas flow switching device has two plates (9, 10), which are positioned on top of one another and joined together. The two plates (9, 10) have congruent channels (11) on their respective sides that face one another. These channels (11) have semicircular cross sections and form gas passages (4 to 8). In addition, at their lateral exit points from the plates (9, 10), the channels (11) form connecting points (12 to 17).
    • 为了切换气源和气槽之间的气流,气流切换装置包括彼此连通且具有用于气源和气槽的连接点的气体通道。 此外,气体流动切换装置具有用于设定不同压力的装置。 为了简化气流切换装置的结构并且在不需要校准的情况下实现精确定义的压力和流动条件,气流切换装置具有两个彼此顶部并联接在一起的板(9,10) 。 两个板(9,10)在它们各自相对的面上具有相同的通道(11)。 这些通道(11)具有半圆形横截面并形成气体通道(4至8)。 此外,在板(9,10)的侧向出口点处,通道(11)形成连接点(12至17)。