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    • 23. 发明申请
    • METHOD AND SYSTEM OF USING NANOTUBE FABRICS AS JOULE HEATING ELEMENTS FOR MEMORIES AND OTHER APPLICATIONS
    • 使用纳米管织物作为记忆元件和其他应用的加热元件的方法和系统
    • US20100327247A1
    • 2010-12-30
    • US12066053
    • 2006-09-06
    • Jonathan W. WardThomas RueckesMitchell MeinholdBrent M. Segal
    • Jonathan W. WardThomas RueckesMitchell MeinholdBrent M. Segal
    • H01L45/00H01L21/02H05B1/00
    • H01L45/1286B82Y10/00G11C13/0004G11C13/025G11C2213/81H01L27/2436H01L45/06H01L45/1226H01L45/1233H01L45/144
    • Methods and systems of using nanotube elements as joule heating elements for memories and other applications. Under one aspect, a method includes providing an electrical stimulus, regulated by a drive circuit, through a nanotube element in order to heat an adjacent article. Further, a detection circuit electrically gauges the state of the article. The article heated by the nanotube element is, in preferred embodiments, a phase changing material, hi memory applications, the invention may be used as a small-scale CRAM capable of employing small amounts of current to induce rapid, large temperature changes in a chalcogenide material. Under various embodiments of the disclosed invention, the nanotube element is composed of a non-woven nanotube fabric which is either suspended from supports and positioned adjacent to the phase change material or is disposed on a substrate and in direct contact with the phase change material. A plurality of designs using various geometric orientations of nanotube fabrics, phase change materials, and drive and detection circuitry is disclosed. Additionally, methods of fabricating nanotube heat emitters are disclosed.
    • 使用纳米管元件作为焦耳加热元件用于存储器和其他应用的方法和系统。 在一个方面,一种方法包括通过纳米管元件提供由驱动电路调节的电刺激,以加热邻近的物品。 此外,检测电路电测量物品的状态。 在优选实施例中,由纳米管元​​件加热的物品是相变材料。在记忆应用中,本发明可以用作能够使用少量电流以在硫族化物中快速,大的温度变化的小规模CRAM 材料。 在所公开的发明的各种实施例中,纳米管元件由无纺布纳米管织物组成,该无纺布纳米管织物从支撑物悬挂并且邻近相变材料定位,或者设置在基底上并与相变材料直接接触。 公开了使用纳米管织物,相变材料以及驱动和检测电路的各种几何取向的多个设计。 另外,公开了制造纳米管热发射体的方法。
    • 27. 发明授权
    • Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
    • 使用薄金属层制造碳纳米管薄膜,层,织物,丝带,元件和制品的方法
    • US07560136B2
    • 2009-07-14
    • US10341055
    • 2003-01-13
    • Jonathan W. WardThomas RueckesBrent M. Segal
    • Jonathan W. WardThomas RueckesBrent M. Segal
    • C23C16/22C23C16/00
    • H01L21/3146B82Y10/00H01L29/43Y10S977/742Y10S977/75Y10S977/751
    • Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
    • 公开了使用薄金属层制造碳纳米管薄膜,层,织物,丝带,元件和制品的方法。 将碳纳米管生长催化剂施加到基材的表面,包括一层或多层薄金属层。 对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。 根据限定的图案选择性地去除无纺织物的部分以产生制品。 碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。 对基板进行化学气相沉积的含碳气体,使碳纳米管的无纺织物接触并覆盖晶片的表面,其中织物的密度基本上均匀。
    • 29. 发明授权
    • Devices having horizontally-disposed nanofabric articles and methods of making the same
    • 具有水平布置的纳米制品的装置及其制造方法
    • US07304357B2
    • 2007-12-04
    • US11193795
    • 2005-07-29
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • H01L29/84
    • G11C13/025B81B2203/0338B81B2203/04B81C1/00142B81C2201/0109B82Y10/00B82Y30/00B82Y40/00C01B32/162C01B2202/02C01B2202/22G11C11/56G11C23/00G11C2213/16G11C2213/77G11C2213/81H01H1/0094H01L21/76838H01L51/0048H01L2221/1094Y10S977/724Y10S977/734Y10S977/742
    • New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electro-mechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.
    • 描述了具有水平布置的纳米制品的新器件及其制造方法。 分立的机电装置包括具有导电迹线的结构。 定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。 在第一状态下,纳米管制品相对于迹线具有间隔的关系,并且在第二状态下,纳米管制品与痕迹接触。 低电阻信号路径与所定义的纳米片段电连通。 在某些实施例中,该结构包括限定的导电迹线设置的间隙。 限定的间隙具有限定的宽度,并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。 在某些实施例中,夹具设置在纳米管织物片段的两端中的每一个处,并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。 在某些实施例中,夹具由导电材料制成。 在某些实施方案中,纳米管贴片和迹线之间的接触是非挥发性状态。 在某些实施方案中,纳米管贴片和迹线之间的接触是挥发性状态。 在某些实施例中,至少一个导电迹线具有界面材料,以改变纳米管织物片段和导电迹线之间的吸引力。
    • 30. 发明授权
    • Devices having horizontally-disposed nanofabric articles and methods of making the same
    • 具有水平布置的纳米制品的装置及其制造方法
    • US07259410B2
    • 2007-08-21
    • US10776059
    • 2004-02-11
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • Venkatachalam C. JaiprakashJonathan W. WardThomas RueckesBrent M. Segal
    • H01L27/10
    • G11C13/025B81B2203/0338B81B2203/04B81C1/00142B81C2201/0109B82Y10/00B82Y30/00B82Y40/00C01B32/162C01B2202/02C01B2202/22G11C11/56G11C23/00G11C2213/16G11C2213/77G11C2213/81H01H1/0094H01L21/76838H01L51/0048H01L2221/1094Y10S977/724Y10S977/734Y10S977/742
    • New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electromechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.
    • 描述了具有水平布置的纳米制品的新器件及其制造方法。 分立的机电装置包括具有导电迹线的结构。 定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。 在第一状态下,纳米管制品相对于迹线具有间隔的关系,并且在第二状态下,纳米管制品与痕迹接触。 低电阻信号路径与所定义的纳米片段电连通。 在某些实施例中,该结构包括限定的导电迹线设置的间隙。 限定的间隙具有限定的宽度,并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。 在某些实施例中,夹具设置在纳米管织物片段的两端中的每一个处,并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。 在某些实施例中,夹具由导电材料制成。 在某些实施方案中,纳米管贴片和迹线之间的接触是非挥发性状态。 在某些实施方案中,纳米管贴片和迹线之间的接触是挥发性状态。 在某些实施例中,至少一个导电迹线具有界面材料,以改变纳米管织物片段和导电迹线之间的吸引力。