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    • 22. 发明授权
    • Ion beam measuring method and ion implanting apparatus
    • 离子束测量方法和离子注入装置
    • US07655929B2
    • 2010-02-02
    • US11583830
    • 2006-10-20
    • Sei UmisedoNariaki HamamotoTadashi IkejiriKohei Tanaka
    • Sei UmisedoNariaki HamamotoTadashi IkejiriKohei Tanaka
    • G21K5/10H01J37/08
    • H01J37/3171H01J37/244H01J37/304H01J2237/24405H01J2237/24507H01J2237/24535H01J2237/24564H01J2237/24578H01J2237/3045H01J2237/30483H01J2237/31703
    • A change of a beam current of an ion beam which passes an outside of the side of a forestage beam restricting shutter, and which is incident on a forestage multipoints Faraday is measured while the forestage beam restricting shutter is driven in a y direction by a forestage shutter driving apparatus in order to obtain a beam current density distribution in the y direction of the ion beam at a position of the forestage beam restricting shutter. A change of a beam current of the ion beam which passes an outside of the side of a poststage beam restricting shutter, and which is incident on a poststage multipoints Faraday is measured while the poststage beam restricting shutter is driven in the y direction by a poststage shutter driving apparatus in order to obtain a beam current density distribution in the y direction of the ion beam at a position of the poststage beam restricting shutter. By using these results, an angle deviation, a diverging angle, and/or a beam size in the y direction of the ion beam can be obtained.
    • 测量通过森林梁限制快门侧的外侧并入射在森林多点法拉第的离子束的射束电流的变化,同时森林光束限制快门通过森林遮挡板在ay方向上驱动 驱动装置,以便在森林光束限制快门的位置处获得离子束的y方向上的束电流密度分布。 在后级光束限制快门通过后台沿y方向驱动时,测量通过舞台前限制快门侧的外侧并且入射到后台多点法拉第的离子束的束电流的变化 快门驱动装置,以便在后级束限制快门的位置处获得离子束的y方向上的束电流密度分布。 通过使用这些结果,可以获得离子束的y方向上的角度偏差,发散角度和/或光束尺寸。
    • 28. 发明授权
    • Wafer handling method and ion implanter
    • 晶圆处理方法和离子注入机
    • US08519363B2
    • 2013-08-27
    • US12938856
    • 2010-11-03
    • Kohei TanakaTakashi NogamiMasayoshi Hino
    • Kohei TanakaTakashi NogamiMasayoshi Hino
    • H01J37/22H01J37/20H01J37/317
    • H01J37/3171H01J37/20H01J2237/204H01J2237/2482H01L21/67259H01L21/681H01L21/68742
    • An ion implanter performs ion implantation by irradiating a wafer having a notch at its outer peripheral region by an ion beam. In ion implanter, a twist angle adjustment mechanism is configured to adjust a twist angle, an aligner is configured to adjust an alignment angle, a wafer transfer device is configured to transfer the wafer between the aligner and the twist angle adjustment mechanism, an image processing device is configured to detect the twist angle of the wafer on the twist angle adjustment mechanism, and a control device is configured to carry out a twist control in which the wafer is rotated by the twist angle adjustment mechanism by an angle obtained from a first difference between the detected twist angle and the alignment angle and a second difference between the alignment angle and a target twist angle given as one of ion implantation conditions.
    • 离子注入机通过离子束在其外周区域照射具有凹口的晶片来进行离子注入。 在离子注入机中,扭转角度调节机构被配置为调节扭曲角度,对准器被配置为调整对准角度,晶片传送装置构造成在对准器和扭转角调节机构之间传送晶片,图像处理 装置被配置为检测扭转角度调节机构上的晶片的扭曲角度,并且控制装置被配置为执行扭转控制,其中晶片由扭转角调节机构旋转角度从第一差异 在检测到的扭转角和对准角之间,以及作为离子注入条件之一给出的对准角和目标扭转角之间的第二差。
    • 29. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20130120331A1
    • 2013-05-16
    • US13810773
    • 2011-07-26
    • Kaoru YamamotoYasuhiro SugitaKohei Tanaka
    • Kaoru YamamotoYasuhiro SugitaKohei Tanaka
    • G06F3/03
    • G06F3/0304G06F3/0412G06F3/0416G06F3/042G09G3/3406G09G2310/0237G09G2360/145
    • A sensor pixel circuit (9) includes: a light receiving element (PD); a first node Vsig that retains charges corresponding to an amount of light incident on the light receiving element; and a second node Vint that receives charges from the first nodeVsig and retains the charges. Under control by a driving circuit (7), during one of a detection period while a light source (3) for sensors is in an ON state and a detection period while the light source (3) for sensors is in an OFF state, charges corresponding to an amount of light incident on the light receiving element (PD) during this detection period are accumulated in the first node Vsig. The charges accumulated are transferred from the first node Vsig to the second node Vint. During the other one of the detection period while the light source for sensors is in the ON state and the detection period while the light source for sensors is in the OFF state, charges corresponding to an amount of light incident on the light receiving element (PD) during this detection period are accumulated in the first node Vsig, and the charges accumulated are transferred from the first node Vsig to the second node Vint. By doing so, a value of a difference between the amount of light accumulated while the light source for sensors is in the ON state and the amount of light accumulated while the light source for sensors is in the OFF state is determined in the second node Vint.
    • 传感器像素电路(9)包括:光接收元件(PD); 保持对应于入射在光接收元件上的光量的电荷的第一节点Vsig; 以及从第一节点Vsig接收电荷并保持电荷的第二节点Vint。 在驱动电路(7)的控制下,在用于传感器的光源(3)处于接通状态的检测期间和传感器的光源(3)处于关闭状态的检测期间的一个中, 对应于在该检测期间入射到受光元件(PD)上的光量在第一节点Vsig中被累积。 累积的电荷从第一节点Vsig传送到第二节点Vint。 在传感器的光源处于接通状态的检测期间的另一个中,以及传感器的光源处于截止状态的检测期间,对应于入射到受光元件(PD)上的光量 )累积在第一节点Vsig中,并且积累的电荷从第一节点Vsig传送到第二节点Vint。 通过这样做,在第二节点Vint中确定在传感器的光源处于ON状态时累积的光量与传感器的光源之间的累积光量处于OFF状态之间的差值 。
    • 30. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20130063407A1
    • 2013-03-14
    • US13698749
    • 2011-05-12
    • Naru UsukuraYasuhiro SugitaKohei TanakaHiromi KatohTadashi Nemoto
    • Naru UsukuraYasuhiro SugitaKohei TanakaHiromi KatohTadashi Nemoto
    • G06F3/038
    • G06F3/0416G06F3/0412G06F3/042
    • Disclosed is a display device that can compensate for variations of light-detecting element while securing a wide dynamic range of light sensors. This is a display device equipped with light sensors having operation modes for one frame period, which are: a sensor driving mode for obtaining sensor signals, a first correction data acquisition mode for obtaining a first correction data, and a second correction data acquisition mode for obtaining a second correction data. This display device further includes a memory that stores light sensor signal levels obtained, under a controlled ambient environmental condition, by driving the light sensors in the above-mentioned three modes as offset elimination data. A signal-processing circuit uses the first correction data and the second correction data, and the light sensor signal level corrected with the offset elimination data to correct the light sensor signal obtained in the sensor driving mode.
    • 公开了一种显示装置,其可以在确保宽动态范围的光传感器的同时补偿光检测元件的变化。 这是配备有具有一个帧周期的操作模式的光传感器的显示装置,它们是:用于获得传感器信号的传感器驱动模式,用于获得第一校正数据的第一校正数据获取模式和用于获取第一校正数据的第二校正数据获取模式 获得第二校正数据。 该显示装置还包括存储器,其存储在受控的环境环境条件下通过以上述三种模式驱动光传感器获得的光传感器信号电平作为偏移消除数据。 信号处理电路使用第一校正数据和第二校正数据,以及利用偏移消除数据校正的光传感器信号电平来校正在传感器驱动模式中获得的光传感器信号。