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21. 发明申请

US20090049909A1 Hydraulic Controller 审中-公开
标题翻译：液压控制器
公开(公告)号：US20090049909A1
公开(公告)日：2009-02-26
申请号：US12191600
申请日：2008-08-14
申请人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
发明人： Masahiro Matsumoto , Yasushi Okada , Hisao Sonobe , Heewon Jeong
IPC分类号： G01C19/00
CPC分类号： B60T8/3675 , G01C19/5719
摘要： A hydraulic controller including a cabinet, a hydraulic pipe block having a passage, a linearly driving actuator having a piston to open and close the passage in the hydraulic pipe block, a printed wiring board having a circuit for driving the linearly driving actuator, and a vibrating angular velocity sensor having two vibrators which can move in a Coriolis force detection direction orthogonal to vibration directions, wherein the vibrating angular velocity sensor is disposed on the printed wiring board in order that the vibration directions of the vibrators may be substantially parallel to a driving direction of the piston, and that the Coriolis force detection direction may be substantially orthogonal to the driving direction of the piston.
摘要翻译：一种液压控制器，包括机壳，具有通道的液压管块，具有用于打开和关闭液压管块中的通道的活塞的线性驱动致动器，具有用于驱动线性驱动致动器的电路的印刷线路板，以及具有两个振动器的振动角速度传感器，所述两个振动器能够以与振动方向正交的科里奥利力检测方向移动，其中振动角速度传感器设置在印刷线路板上，以使得振动器的振动方向可基本上平行于驱动活塞的方向，科里奥利力检测方向可以与活塞的驱动方向基本正交。

22. 发明授权

US09182421B2 Inertia sensor 有权
标题翻译：惯性传感器
公开(公告)号：US09182421B2
公开(公告)日：2015-11-10
申请号：US13807284
申请日：2011-05-25
申请人： Heewon Jeong , Munenori Degawa , Masahide Hayashi
发明人： Heewon Jeong , Munenori Degawa , Masahide Hayashi
IPC分类号： G01C19/56 , G01C19/5719 , G01C19/5747 , G01C19/574
CPC分类号： G01P9/04 , G01C19/5719 , G01C19/574 , G01C19/5747
摘要： This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).
摘要翻译：本发明涉及提供即使在存在振动扰动的环境中也能维持SNR的高性能惯性传感器。振动型惯性传感器包括：两个绞车（2,3）; 意味着用于在反相中移位两个死重的（C1，C2，C3，C4，+ vd，-vd）两组电极（C5，C6，C7，C8），用于随着电容的变化检测两个死重的位移; 以及用于将电极的电容变化转换为电信号的C / V转换单元（53）。在振动型惯性传感器中，在两个死重（2,3）以反相位移的情况下，一组电极（例如，C5和C8）电连接在一起，这些电极在静电电容之间呈现增加的静电电容并且在上述情况下在其间显示减小的静电电容的一组电极（例如，C6和C7）彼此电连接，并且这些电极组还连接到C / V转换器单位（53）。

23. 发明授权

US09086427B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US09086427B2
公开(公告)日：2015-07-21
申请号：US14001634
申请日：2012-01-11
申请人： Daisuke Maeda , Heewon Jeong , Masahide Hayashi , Makoto Yamamoto
发明人： Daisuke Maeda , Heewon Jeong , Masahide Hayashi , Makoto Yamamoto
IPC分类号： G01P15/00 , G01C19/5776 , B60W50/00
CPC分类号： G01P15/00 , B60W2050/0055 , B60W2050/0056 , G01C19/5776
摘要： An object of the invention is to provide an inertial sensor with small delay and high accuracy. An inertial sensor 1 includes an acceleration detecting element 2 that detects an acceleration of at least one axis of a vehicle; a first filter 6 that limits a detection signal of the acceleration to a first band; a second filter 7 that limits a detection signal of the acceleration to a second band; a vehicle control variable calculation section 8 that calculates a vehicle control variable Gxc on the basis of the detection signal of the acceleration limited to the second band; and a sensor signal output section 9 that outputs the detection signal of the acceleration limited to the first band and the vehicle control variable.
摘要翻译：本发明的目的是提供一种具有小延迟和高精度的惯性传感器。惯性传感器1包括检测车辆的至少一个轴的加速度的加速度检测元件2; 第一滤波器6，其将加速度的检测信号限制到第一频带; 第二滤波器7，其将加速度的检测信号限制到第二频带; 基于限于第二频带的加速度的检测信号计算车辆控制变量Gxc的车辆控制变量运算部8; 以及传感器信号输出部9，其输出限制在第一频带的加速度的检测信号和车辆控制变量。

24. 发明授权

US08250916B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US08250916B2
公开(公告)日：2012-08-28
申请号：US12189920
申请日：2008-08-12
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01P15/00
CPC分类号： G01P15/097 , G01C19/5719 , G01P15/125
摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
摘要翻译：一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测位移量与电容变化相同，从而检测驱动方向上的加速度。

25. 发明授权

US07919814B2 Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode 有权
标题翻译：具有集成电路的半导体器件通过通孔与MEMS传感器电连接
公开(公告)号：US07919814B2
公开(公告)日：2011-04-05
申请号：US12270463
申请日：2008-11-13
申请人： Yasushi Goto , Tsukasa Fujimori , Heewon Jeong , Kiyoko Yamanaka
发明人： Yasushi Goto , Tsukasa Fujimori , Heewon Jeong , Kiyoko Yamanaka
IPC分类号： H01L27/12
CPC分类号： B81C1/00246 , B81B2201/0235 , B81C2203/0728 , B81C2203/0735 , B81C2203/0778 , H01L21/76898 , H01L23/481 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： As well as achieving both downsizing and thickness reduction and sensitivity improvement of a semiconductor device that has: a MEMS sensor formed by bulk micromachining technique such as an acceleration sensor and an angular rate sensor; and an LSI circuit, a packaging structure of the semiconductor device having the MEMS sensor and the LSI circuit can be simplified. An integrated circuit having MISFETs and wirings is formed on a silicon layer of an SOI substrate, and the MEMS sensor containing a structure inside is formed by processing a substrate layer of the SOI substrate. In other words, by using both surfaces of the SOI substrate, the integrated circuit and the MEMS sensor are mounted on one SOI substrate. The integrated circuit and the MEMS sensor are electrically connected to each other by a through-electrode provided in the SOI substrate.
摘要翻译：以及实现半导体器件的小型化和厚度降低以及灵敏度提高，其具有：通过体积微加工技术（例如加速度传感器和角速度传感器）形成的MEMS传感器; 和LSI电路，可以简化具有MEMS传感器和LSI电路的半导体器件的封装结构。在SOI衬底的硅层上形成具有MISFET和布线的集成电路，并且通过处理SOI衬底的衬底层来形成包含内部结构的MEMS传感器。换句话说，通过使用SOI衬底的两个表面，集成电路和MEMS传感器安装在一个SOI衬底上。集成电路和MEMS传感器通过设置在SOI衬底中的通孔电连接。

26. 发明申请

US20110048129A1 Inertial Sensor and Method of Manufacturing the Same 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20110048129A1
公开(公告)日：2011-03-03
申请号：US12867472
申请日：2009-04-17
申请人： Kiyoko Yamanaka , Heewon Jeong , Takashi Hattori , Yasushi Goto
发明人： Kiyoko Yamanaka , Heewon Jeong , Takashi Hattori , Yasushi Goto
IPC分类号： G01C19/56 , B32B37/02
CPC分类号： G01P15/0802 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , G01C19/5733 , G01C19/5769 , G01P15/125 , G01P2015/0814 , Y10T156/10
摘要： An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means of making an inertial sensor including a substrate, a movable portion on the substrate, a cap member which seals the movable portion so as to cover the movable portion, wherein a gas-generating material is applied to the movable portion side of the cap.
摘要翻译：提供一种惯性传感器，其能够使诸如加速度传感器的惯性传感器的空间的压力高于密封步骤期间的空间，并提高可靠性。惯性传感器可以通过制造包括基板的惯性传感器，基板上的可移动部分，密封可动部分以覆盖可动部分的盖构件来实现，其中气体发生材料被施加到帽的可动部分侧。

27. 发明申请

US20100269589A1 ANGULAR VELOCITY DETECTING DEVICE 有权
标题翻译：角速度检测装置
公开(公告)号：US20100269589A1
公开(公告)日：2010-10-28
申请号：US12832965
申请日：2010-07-08
申请人： Heewon Jeong , Yasushi Goto
发明人： Heewon Jeong , Yasushi Goto
IPC分类号： G01C19/56
CPC分类号： G01P3/22 , G01C19/5747 , G01C19/5762
摘要： A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
摘要翻译：提供了一种高性能角速率检测装置。包括驱动框架和科里奥利框架的驱动部分由共享固定端并且沿与驱动方向正交的方向延伸的至少两个固定梁而缓冲，从而使驱动部分振动。即使当通过安装或热波动使基板变形时，产生到固定梁和支撑梁的内应力也小，从而保持振动状态，例如共振频率和振动幅度恒定。因此，可以获得对安装环境变化坚固的高性能角速度检测装置。

28. 发明申请

US20100037691A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20100037691A1
公开(公告)日：2010-02-18
申请号：US12189920
申请日：2008-08-12
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01C19/56 , G01P15/125
CPC分类号： G01P15/097 , G01C19/5719 , G01P15/125
摘要： One inertial sensor detects an acceleration in a driving direction as well as an angular rate about one axis and an acceleration in a detecting direction at the same time. A driving-direction acceleration detecting unit is provided to members vibrating in mass members on the left and right via an elastic body. In this manner, when an acceleration is applied in the driving direction, the mass members on the left and right normally vibrated with a same amplitude and in opposite phases have displacement amounts in a same phase, and the driving-direction acceleration detecting unit detects the displacement amounts in the same phase as a capacitance change, thereby detecting the acceleration in the driving direction.
摘要翻译：一个惯性传感器同时检测驱动方向上的加速度以及围绕一个轴的角速度和检测方向上的加速度。驱动方向加速度检测单元经由弹性体向左右的质量构件振动的构件设置。以这种方式，当在驱动方向上施加加速度时，左右的质量构件以相同的振幅和相反的相位正常地振动，具有相同相位的位移量，并且驱动方向加速度检测单元检测位移量与电容变化相同，从而检测驱动方向上的加速度。

29. 发明授权

US07513155B2 Inertial sensor 有权
标题翻译：惯性传感器
公开(公告)号：US07513155B2
公开(公告)日：2009-04-07
申请号：US11566399
申请日：2006-12-04
申请人： Heewon Jeong , Hiroshi Fukuda
发明人： Heewon Jeong , Hiroshi Fukuda
IPC分类号： G01C19/00
CPC分类号： G01C19/5747
摘要： Four sensor units (SUA1 to SUA4) are disposed symmetrically about a point, on both top and bottom and left and right centering around one point of a support (15e). Furthermore, four sensor units (SUA1 to SUA4) are designed so that all the components are fully in tuning-fork structure. Drive frames (5, 5) of the sensor units (SUA1, SUA2) disposed adjacent to each other in a first direction (Y) are vibrated in mutually inverted phases, and drive frames of the other sensor units (SUA3, SUA4) disposed adjacent to each other in a second direction (X) are vibrated in mutually inverted phases as well. Moreover, the drive frames of the sensor units (SUA1, SUA2) and the drive frames of the other sensor units (SUA3, SUA4) are operated in synchronization in the state in which phases are shifted by 90 degrees. Whereby, it is possible to reduce or prevent vibration coupling in the driving direction and in the detection direction, and the leakage (loss) of excitation energy and Coriolis force. Thereby, performance of an inertial sensor is improved.
摘要翻译：四个传感器单元（SUA1至SUA4）围绕位于顶部和底部以及围绕支撑件（15e）的一个点的中心的左右对称地布置。此外，四个传感器单元（SUA1至SUA4）被设计成使得所有组件完全处于音叉结构中。在第一方向（Y）上彼此相邻设置的传感器单元（SUA1，SUA2）的驱动框架（5,5）以相互反相的方式振动，并且相邻设置的其它传感器单元（SUA3，SUA4）的驱动框架在第二方向（X）上彼此相反地相互振动。此外，传感器单元（SUA1，SUA2）的驱动框架和其他传感器单元（SUA3，SUA4）的驱动框架在相位偏移90度的状态下同步地操作。由此，可以减少或防止在驱动方向和检测方向上的振动耦合，以及激发能和科里奥利力的泄漏（损失）。由此，提高了惯性传感器的性能。

30. 发明申请

US20150096373A1 ANGULAR VELOCITY SENSOR 有权
标题翻译：角速度传感器
公开(公告)号：US20150096373A1
公开(公告)日：2015-04-09
申请号：US14383335
申请日：2012-03-19
申请人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
发明人： Heewon Jeong , Masahide Hayashi , Kiyoko Yamanaka
IPC分类号： G01C19/02 , G01C19/5719
CPC分类号： G01P9/02 , G01C19/5719 , G01C19/5726 , G01C19/5762
摘要： Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.
摘要翻译：提供了一种角速度传感器，其包括多个角速度检测单元，每个角速度检测单元输出不同的检测结果，并且包括用于驱动角速度检测单元的公共驱动电路。本发明的角速度传感器的角速度检测单元被配置为当由相同频率的驱动信号驱动时具有不同的驱动振幅。

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