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21. 发明申请

US20100243438A1 SPUTTERING APPARATUS 有权
标题翻译：溅射装置
公开(公告)号：US20100243438A1
公开(公告)日：2010-09-30
申请号：US12787506
申请日：2010-05-26
申请人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
发明人： Nobuo Yamaguchi , Kazuaki Matsuo , Susumu Akiyama , Yukihiro Kobayashi
IPC分类号： C23C14/34
CPC分类号： C23C14/564 , C23C14/34 , H01J37/34 , H01J37/3447
摘要： A sputtering apparatus includes a target holder which is placed in a vacuum vessel and can hold a target configured to deposit a film on a substrate, a substrate holder which can mount the substrate, a first shield member which is disposed in a vicinity of the substrate holder, and configured to form a closed state in which the substrate holder and the target holder are shielded from each other, or an open state in which the substrate holder and the target holder are opened to each other, a first opening/closing driving unit adapted to open/close the first shield member to enter the open state or the closed state, a second shield member, having an annular-shaped, disposed on the surface of the substrate holder and an outer peripheral portion of the substrate, and a driving unit adapted to move the substrate holder in order to bring the substrate holder, on which the second shield member is disposed, close to the first shield member in the closed state. The first shield member has at least one annular-shaped, first protruding portion formed on it to extend in the direction of the second shield member. The second shield member has at least one annular-shaped, second protruding portion formed on it to extend in the direction of the first shield member. The first protruding portion and the second protruding portion fit together in a non-contact state at the position up to which the driving unit brings the substrate holder close to the first shield member.
摘要翻译：溅射装置包括放置在真空容器中的靶保持器，并且可以将被配置为在基板上沉积膜的靶材，能够安装基板的基板保持器，设置在基板附近的第一屏蔽部件并且构造成形成其中基板保持器和目标保持器彼此屏蔽的关闭状态或其中基板保持器和目标保持器彼此打开的打开状态;第一打开/关闭驱动单元适于打开/关闭第一屏蔽构件以进入打开状态或关闭状态，具有环形的第二屏蔽构件，设置在基板保持器的表面和基板的外周部分上，驱动适于移动衬底保持器的单元，以便使处于关闭状态的第二屏蔽构件所设置的衬底保持器靠近第一屏蔽构件。第一屏蔽构件具有形成在其上的至少一个环形的第一突出部分，以在第二屏蔽构件的方向上延伸。第二屏蔽构件具有形成在其上的至少一个环形的第二突出部分，以在第一屏蔽构件的方向上延伸。第一突出部分和第二突出部分在驱动单元使基板保持器靠近第一屏蔽构件的位置处以非接触状态配合在一起。

22. 发明授权

US06726954B2 Method and system for forming copper thin film 有权
标题翻译：形成铜薄膜的方法和系统
公开(公告)号：US06726954B2
公开(公告)日：2004-04-27
申请号：US09874066
申请日：2001-06-06
申请人： Minjuan Zhang , Akiko Kobayashi , Toshiaki Sasaki , Susumu Akiyama , Atsushi Sekiguchi
发明人： Minjuan Zhang , Akiko Kobayashi , Toshiaki Sasaki , Susumu Akiyama , Atsushi Sekiguchi
IPC分类号： C23C1618
CPC分类号： C23C16/45523 , C23C16/18 , C23C16/4402 , H01L21/28556
摘要： In a method and a system for forming a copper thin film in which a raw material gas is introduced into a substrate processing chamber storing a substrate and being under a reduced pressure to form a copper thin film on the substrate, an addition gas is introduced into the substrate processing chamber in addition to the raw material gas at the initial stage of deposition. Thereafter, the introduction of the addition gas is stopped, while the introduction of the raw material gas is continued. Alternatively, an addition gas is introduced into the substrate processing chamber before the start of the deposition process, and the addition gas is introduced into the substrate processing chamber in addition to the raw material gas at the initial stage of deposition. Thereafter, the introduction of the addition gas is stopped, while the introduction of the raw material gas is continued.
摘要翻译：在形成铜薄膜的方法和系统中，其中原料气体被引入存储基板并在减压下的基板处理室中，以在基板上形成铜薄膜，将加成气体引入基板处理室除了在沉积的初始阶段的原料气体之外。此后，停止引入加料气体，同时继续引入原料气体。或者，在开始沉积处理之前，将添加气体引入到基板处理室中，并且在沉积的初始阶段除了原料气体之外还将添加气体引入基板处理室。此后，停止引入加料气体，同时继续引入原料气体。

23. 发明授权

US4949083A Communication system 失效
标题翻译：通讯系统
公开(公告)号：US4949083A
公开(公告)日：1990-08-14
申请号：US195624
申请日：1988-05-18
申请人： Yuji Hirabayashi , Yoshihisa Sato , Susumu Akiyama , Katsonori Ito , Takao Saito , Tetsuo Tanigawa
发明人： Yuji Hirabayashi , Yoshihisa Sato , Susumu Akiyama , Katsonori Ito , Takao Saito , Tetsuo Tanigawa
IPC分类号： H04L12/417
CPC分类号： H04L12/417
摘要： A communication system includes a plurality of separate transmission units. A common signal line connects the units. A token is transferred from a first of the units to a second of the units during one sequence. The token is a right to output data to the common signal line. When the token is rejected by the second unit, the token is retransferred from the first unit at maximum a predetermined number of times during that sequence to the second unit. When the retransferred token is rejected by the second unit, the token may be transferred from the first unit to a third of the units during that sequence. In a next sequence, said predetermined maximum number of times said token is retransmitted to said second unit is then reduced.
摘要翻译：通信系统包括多个单独的传输单元。公共信号线连接这些单元。令牌在一个序列中从第一个单元传送到第二个单元。令牌是将数据输出到公共信号线的权利。当令牌被第二单元拒绝时，令牌在该序列期间以最大预定次数从第一单元重传到第二单元。当转发令牌被第二单元拒绝时，令牌可以在该序列期间从第一单元传送到三分之一的单元。在下一个序列中，然后减少所述令牌被重传到所述第二单元的所述预定的最大次数。

24. 发明授权

US4736302A Control system for determining the quantity of intake air of an internal combustion engine 失效
标题翻译：用于确定内燃机的进气量的控制系统
公开(公告)号：US4736302A
公开(公告)日：1988-04-05
申请号：US742524
申请日：1985-06-07
申请人： Masumi Kinugawa , Norio Omori , Tomoaki Abe , Katsunori Ito , Susumu Akiyama , Yuzi Hirabayashi
发明人： Masumi Kinugawa , Norio Omori , Tomoaki Abe , Katsunori Ito , Susumu Akiyama , Yuzi Hirabayashi
IPC分类号： F02D41/00 , F02D41/18 , F02D41/24 , F02D41/26 , F02D45/00 , H01L21/302 , F02M51/00 , G01F1/68
CPC分类号： F02D41/187 , F02D41/263
摘要： A system for controlling the operating condition of an engine in which a temperature sensing element constitutes an airflow measuring device disposed in an intake air passage of the engine. The temperature sensing element is supplied with a heating current in response to a start pulse signal produced with every one-half period of each combustion cycle of the engine. A comparator delivers an output signal when a reference temperature set on the basis of the air temperature measured by an auxiliary temperature sensing element is reached by the temperature of the temperature sensing element. A pulse signal indicative of the time interval between the generation of the start pulse signal and a rise in the output signal of the comparator is delivered as an airflow measurement signal. The average airflow quantity responsive to one combustion cycle of the engine is detected, and a correction factor K is calculated from the difference between two airflow rate data measured in each combustion cycle and the average airflow quantity. Based on the correction factor K, the injection quantity, injection timing and the like are calculated.
摘要翻译：一种用于控制发动机的操作状态的系统，其中温度感测元件构成设置在发动机的进气通道中的气流测量装置。响应于在发动机的每个燃烧循环的每半个周期产生的起动脉冲信号，向温度感测元件供应加热电流。当基于由辅助温度感测元件测量的空气温度设定的参考温度达到温度感测元件的温度时，比较器输出输出信号。指示起始脉冲信号的产生和比较器的输出信号的上升之间的时间间隔的脉冲信号作为气流测量信号被输送。检测响应于发动机的一个燃烧循环的平均气流量，并且根据在每个燃烧循环中测量的两个气流速率数据与平均气流量之间的差计算校正因子K. 基于校正因子K，计算喷射量，喷射正时等。

25. 发明授权

US4730255A Engine control apparatus 失效
标题翻译：发动机控制装置
公开(公告)号：US4730255A
公开(公告)日：1988-03-08
申请号：US737088
申请日：1985-05-23
申请人： Susumu Akiyama , Ito Katsunori , Yuzi Hirabayashi , Masumi Kinugawa , Norio Omori
发明人： Susumu Akiyama , Ito Katsunori , Yuzi Hirabayashi , Masumi Kinugawa , Norio Omori
IPC分类号： F02D41/00 , F02D41/18 , F02D41/24 , F02D41/34 , G01F1/68 , F02D5/00
CPC分类号： F02D41/2422 , F02D41/187
摘要： An engine control apparatus for controlling the quantity of fuel injected into the engine is equipped with an intake air flow rate measuring device for detecting the operating state of the engine. This measuring device has a heat sensitive element, which is located in the intake pipe, and outputs a pulse signal having a pulse width T corresponding to the intake fuel amount. Engine control apparatus has a plurality of map memory means in which a plurality of functions f.sub.1 (N), f.sub.2 (N), f.sub.3 (N), which express the polynomial approximation ##EQU1## for expressing the air flow rate G/N per engine revolution, are stored as the parameters of the number of engine rotations N. These functions are read out from the maps and, based on the number of engine rotations N, the fuel injection amount corresponding to the pulse width T of the air flow rate is calculated.
摘要翻译：用于控制喷射到发动机中的燃料量的发动机控制装置配备有用于检测发动机的运行状态的进气流量测量装置。该测量装置具有位于进气管中的热敏元件，并输出与进气量对应的脉冲宽度T的脉冲信号。发动机控制装置具有多个地图存储装置，其中表示用于表示每个发动机的空气流量G / N的多项式近似值“IMAGE”的多个函数f1（N），f2（N），f3（N）旋转数据被存储为发动机转数N的参数。这些功能从图中读出，并且基于发动机转数N，与空气流量的脉冲宽度T对应的燃料喷射量是计算。

26. 发明授权

US4558417A Computer based engine control with lower priority interrupt requests generated in selected higher priority interrupt routines 失效
标题翻译：基于计算机的发动机控制，在选定的较高优先级中断程序中产生较低优先级的中断请求
公开(公告)号：US4558417A
公开(公告)日：1985-12-10
申请号：US614243
申请日：1984-05-25
申请人： Susumu Akiyama , Kenzo Ito , Hiroyasu Fukaya , Haruhiko Ogiso , Yuji Hirabayashi , Takahide Kawamura
发明人： Susumu Akiyama , Kenzo Ito , Hiroyasu Fukaya , Haruhiko Ogiso , Yuji Hirabayashi , Takahide Kawamura
IPC分类号： F01P11/16 , F02D21/08 , F02D41/26 , F02P3/045 , F02P5/15 , G05B15/02 , G06F9/46
CPC分类号： F02P5/1502 , F02D41/26 , F02P3/0456 , F01P11/16 , Y02T10/46
摘要： An engine control method and apparatus generally applicable to those control systems of the engine such as an ignition system, fuel injection system, etc., which are controlled to optimum operation in accordance with the engine operating conditions. A plurality of angular pulses are generated during each rotation of the engine and these pulses are counted. In response to each pulse, an angular interrupt request is generated and the interrupt is performed in response thereto. The angular interrupt routines are of the highest priority and are executed irrespective of the execution status of the central processing unit to control an electric device associated with the engine in accordance with control data calculated by the central processing unit. Program interrupt requests are generated during selected angular interrupt routines when the counted number of angular pulses reaches a predetermined value. Program interrupt routines of lower priority than the angular interrupt routines are then executed to calculate the control data for the electric device.
摘要翻译：通常可应用于发动机的这些控制系统的发动机控制方法和装置，例如点火系统，燃料喷射系统等，其被控制为根据发动机操作条件进行最佳操作。在发动机的每次旋转期间产生多个角脉冲，并且对这些脉冲进行计数。响应于每个脉冲，产生角度中断请求并响应于此执行中断。角中断程序具有最高优先级，并且与中央处理单元的执行状态无关地执行，以根据由中央处理单元计算的控制数据来控制与发动机相关联的电气设备。当计数的角脉冲数达到预定值时，在选定的角度中断程序期间产生程序中断请求。然后执行比角中断程序优先级低的程序中断程序，以计算电气设备的控制数据。

27. 发明授权

US4467765A Method and system for operating an engine at maximum torque with variable amount of dither 失效
标题翻译：以可变量的抖动以最大扭矩操作发动机的方法和系统
公开(公告)号：US4467765A
公开(公告)日：1984-08-28
申请号：US352563
申请日：1981-02-26
申请人： Atsushi Suzuki , Masakazu Ninomiya , Hiroyasu Fukaya , Susumu Akiyama
发明人： Atsushi Suzuki , Masakazu Ninomiya , Hiroyasu Fukaya , Susumu Akiyama
IPC分类号： F02D41/14 , F02P5/145 , F02P5/15 , F02P5/08
CPC分类号： F02P5/1455 , F02D41/1408 , F02P5/151 , Y02T10/46
摘要： Spark ignition timing of an internal combustion engine is oscillated on each side of a variable reference setting during successive ignition phases and the resultant engine speed is detected during at least three successive phases. The detected engine speed values are compared one against each other to determine whether they satisfy one of two specified conditions. The variable reference is adjusted in a direction toward an optimum position depending on which one of the conditions is satisfied. At least one of controlled parameters including the magnitude of the oscillated setting with respect to the variable reference, the length of the ignition phase and the amount of the adjusted reference setting, is varied as a function of an engine operating parameter.
摘要翻译：在连续点火阶段期间，内燃机的火花点火正时在可变参考设定的每一侧振荡，并且在至少三个连续相位期间检测到所得到的发动机转速。将检测到的发动机速度值彼此进行比较以确定它们是否满足两个指定条件之一。根据满足条件中的哪一个，可变参考在朝向最佳位置的方向上被调整。受控参数中的至少一个，其包括相对于可变参考值的振荡设置的大小，点火阶段的长度和调整的参考设置的量，作为发动机操作参数的函数而变化。

28. 发明授权

US06629032B2 Vehicular communication system for communicating information among electronic devices installed in vehicle 有权
公开(公告)号：US06629032B2
公开(公告)日：2003-09-30
申请号：US10189628
申请日：2002-07-08
申请人： Susumu Akiyama
发明人： Susumu Akiyama
IPC分类号： G05B100
CPC分类号： B60R16/0315
摘要： A vehicular communication system communicates information among a plurality of ECUs installed in a vehicle. The communication system includes a plurality of transceiver circuits for communicating information, and each transceiver circuit is provided in an associated one of the ECUs. The transceiver circuits are divided into groups of transceiver circuits. Each transceiver circuit of a given group communicates with the transceiver circuits of the same group using one of a predetermined communication frequency and a predetermined code, which is allocated to the given group and is different from that of any other group.

29. 发明授权

US4894781A Communication control system 失效
标题翻译：通讯控制系统
公开(公告)号：US4894781A
公开(公告)日：1990-01-16
申请号：US103271
申请日：1987-10-01
申请人： Yoshihisa Sato , Susumu Akiyama , Yuji Hirabayashi , Katsuhiro Ina , Katsunori Ito , Takao Saito , Tetsuo Tanigawa
发明人： Yoshihisa Sato , Susumu Akiyama , Yuji Hirabayashi , Katsuhiro Ina , Katsunori Ito , Takao Saito , Tetsuo Tanigawa
IPC分类号： H04L29/14 , B60R16/02 , F02D41/26 , G05B19/042
CPC分类号： G05B19/0421 , F02D41/266 , G05B2219/2214 , G05B2219/23032
摘要： A plurality of control units are connected via a common signal line through which they communicate. Each control unit is operative to control an apparatus according to certain information the control unit normally receives directly through an exclusive signal line by operation of a directly-inputting device. A check is made to determine whether the directly-inputting device is operating normally. If not, then the required information is inputted from its source indirectly through another control unit by way of the common signal line.
摘要翻译：多个控制单元通过它们通信的公共信号线连接。每个控制单元可操作以根据控制单元通过直接输入设备的操作通过专用信号线直接接收的特定信息来控制设备。进行检查以确定直接输入设备是否正常运行。如果不是，则通过公共信号线通过另一个控制单元间接地从其源输入所需的信息。

30. 发明授权

US4835671A Communication control unit providing isolation of failure condition of electronic control unit 失效
标题翻译：通信控制单元提供电子控制单元的故障状态隔离
公开(公告)号：US4835671A
公开(公告)日：1989-05-30
申请号：US098048
申请日：1987-09-17
申请人： Yoshihisa Sato , Yugi Hirabayashi , Katsuhiro Ina , Katsunori Ito , Susumu Akiyama , Takao Saito , Tetsuo Tanigawa
发明人： Yoshihisa Sato , Yugi Hirabayashi , Katsuhiro Ina , Katsunori Ito , Susumu Akiyama , Takao Saito , Tetsuo Tanigawa
IPC分类号： H04L29/14 , B60R16/02 , B60R16/03 , G05B23/02 , G06F11/00 , G06F11/14 , G06F11/267
CPC分类号： G05B23/0291 , G06F11/0757 , G06F11/142 , B60R16/0315 , G06F11/2221
摘要： A communication control unit for controlling communication between an electronic control unit and other equipment or other electronic control units, the communication control unit functioning to judge whether or not the operation of the electronic control unit is normal and, if it is judged that the electronic control unit is operating abnormally, the communication control unit acts to reset the electronic control unit to an initial operating status in order to attempt recovery from the abnormal condition, while halting transmission by the electronic control unit until it is judged that the electronic control unit has commenced to operate normally.
摘要翻译：一种通信控制单元，用于控制电子控制单元和其他设备或其他电子控制单元之间的通信，所述通信控制单元用于判断电子控制单元的操作是否正常，并且如果判断为电子控制单元工作异常时，通信控制单元将电子控制单元复位为初始操作状态，以便尝试从异常状态恢复，同时停止电子控制单元的传输，直到电子控制单元已经开始正常运行

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