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    • 25. 发明申请
    • STACKABLE MULTI-PORT GAS NOZZLES
    • 可堆叠多口气体喷嘴
    • US20150176127A1
    • 2015-06-25
    • US14637337
    • 2015-03-03
    • Silevo, Inc.
    • Steve PoppeYan RozenzonPeijun Ding
    • C23C16/455
    • C23C16/45576C23C16/4412C23C16/45521C23C16/4587
    • One embodiment provides a reactor for material deposition. The reactor includes a chamber and at least one gas nozzle. The chamber includes a pair of susceptors, each having a front side and a back side. The front side mounts a number of substrates. The susceptors are positioned vertically so that the front sides of the susceptors face each other, and the vertical edges of the susceptors are in contact with each other, thereby forming a substantially enclosed narrow channel between the substrates mounted on different susceptors. The gas nozzle includes a gas-inlet component situated in the center and a detachable gas-outlet component stacked around the gas-inlet component. The gas-inlet component includes at least one opening coupled to the chamber, and is configured to inject precursor gases into the chamber. The detachable gas-outlet component includes at least one opening coupled to the chamber, and is configured to output exhaust gases from the chamber.
    • 一个实施方案提供了用于材料沉积的反应器。 反应器包括室和至少一个气体喷嘴。 该室包括一对基座,每个基座具有前侧和后侧。 前面安装了许多基板。 基座垂直定位,使得基座的前侧彼此面对,并且基座的垂直边缘彼此接触,从而在安装在不同的基座上的基板之间形成基本封闭的窄通道。 气体喷嘴包括位于中心的气体入口部件和在气体入口部件周围堆叠的可拆卸气体出口部件。 气体入口部件包括至少一个连接到腔室的开口,并且被构造成将前体气体注入到腔室中。 可拆卸的气体出口部件包括至少一个连接到该腔室的开口,并且构造成输出来自腔室的废气。