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    • 24. 发明授权
    • CMOS device for reducing charge sharing effect and fabrication method thereof
    • 用于降低电荷共享效应的CMOS器件及其制造方法
    • US08652929B2
    • 2014-02-18
    • US13582034
    • 2012-04-16
    • Ru HuangFei TanXia AnQianqian HuangDong YangXing Zhang
    • Ru HuangFei TanXia AnQianqian HuangDong YangXing Zhang
    • H01L21/00H01L21/02H01L21/3063H01L21/84
    • H01L21/02203H01L21/02216H01L21/3063H01L21/823878H01L27/0921
    • The present invention discloses a CMOS device of reducing charge sharing effect and a fabrication method thereof. The present invention has an additional isolation for trapping carriers disposed right below an isolation region. the material of the additional isolation region is porous silicon. Since porous silicon is a functional material of spongy structure by electrochemistry anodic oxidizing monocrystalline silicon wafer, there are a large number of microvoids and dangling bonds on the surface layer of the porous silicon. These defects may form defect states in a center of forbidden band of the porous silicon, the defect states may trap carriers so as to cause an increased resistance. And with an increase of density of corrosion current, porosity increases, and defects in the porous silicon increase. The present invention can reduce the charge sharing effect due to heavy ions by using a feature that the defect states in the porous silicon trap carriers, the formation of a shallow trench isolation (STI) region and a isolation region underneath only needs one time photolithography, and the process is simple, so that radioresistance performance of an integrated circuit may be greatly increased.
    • 本发明公开了一种降低电荷共享效应的CMOS器件及其制造方法。 本发明对于设置在隔离区域正下方的捕获载体具有额外的隔离。 附加隔离区的材料是多孔硅。 由于多孔硅是通过电化学阳极氧化单晶硅晶片的海绵结构的功能材料,因此在多孔硅的表面层上存在大量微孔和悬挂键。 这些缺陷可能在多孔硅的禁带的中心形成缺陷状态,缺陷状态可能会捕获载体以引起增加的电阻。 随着腐蚀电流密度的增加,孔隙率增加,多孔硅中的缺陷增加。 本发明可以通过使用多孔硅捕集载体中的缺陷状态,浅沟槽隔离(STI)区域的形成和下面的隔离区域仅需要一次光刻来降低由于重离子引起的电荷共享效应, 并且该工艺简单,从而可以大大提高集成电路的射电阻性能。
    • 25. 发明授权
    • Heat dissipation structure of SOI field effect transistor
    • SOI场效应晶体管的散热结构
    • US08598636B2
    • 2013-12-03
    • US13582624
    • 2011-08-17
    • Ru HuangXin HuangShoubin XueYujie Ai
    • Ru HuangXin HuangShoubin XueYujie Ai
    • H01L29/80
    • H01L23/38H01L27/16H01L2924/0002H01L2924/00
    • The present invention discloses a heat dissipation structure for a SOI field effect transistor having a schottky source/drain, which relates to a field of microelectronics. The heat dissipation structure includes two holes connected with a drain terminal or with both a source terminal and a drain terminal, which are filled with an N-type material with high thermoelectric coefficient and a P-type material with high thermoelectric coefficient respectively. A metal wire for the N-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a high potential with respect to the drain terminal, and a metal wire for the P-type material with high thermoelectric coefficient in the vicinity of the drain terminal is applied a low potential with respect to the drain terminal. A metal wire for the N-type material with high thermoelectric coefficient in the vicinity of the source terminal is applied a high potential with respect to the source terminal, and a metal wire for the P-type material in the vicinity of the source terminal is applied a lower potential with respect to the source terminal. By way of a Peltier effect, in the present invention heat can be absorbed at a contact portion between the thermoelectric material and the source/drain, and at the same time dissipated at a connection portion between the thermoelectric material and a bottom electrode metal, so that the heat generated in an active region of the device is effectively transferred to the substrate and dissipated through a heat sink.
    • 本发明公开了一种具有肖特基源极/漏极的SOI场效应晶体管的散热结构,涉及微电子领域。 散热结构包括与漏极端子或者源极端子和漏极端子连接的两个孔,其分别填充有高热电系数的N型材料和具有高热电系数的P型材料。 在漏极端子附近,用于具有高热电系数的N型材料的金属线相对于漏极端子施加高电位,并且用于具有高热电系数的P型材料的金属线 漏极端子相对于漏极端子施加低电位。 在源极端子附近具有高热电系数的N型材料的金属线相对于源极端子施加高电位,并且在源极端子附近的用于P型材料的金属线是 相对于源极端子施加较低的电位。 通过珀耳帖效应,在本发明中,热量可以在热电材料和源极/漏极之间的接触部分处被吸收,并且同时在热电材料和底部电极金属之间的连接部分消散,因此 在器件的有源区域中产生的热量有效地传递到衬底并通过散热器散发。
    • 27. 发明授权
    • I-shape floating gate for flash memory device and fabricating the same
    • 用于闪存器件的I形浮动栅极和制造它们
    • US08536639B2
    • 2013-09-17
    • US13498585
    • 2011-11-30
    • Yimao CaiSong MeiRu Huang
    • Yimao CaiSong MeiRu Huang
    • H01L29/788H01L21/336H01L21/3205H01L21/4763
    • H01L21/28273
    • The present invention discloses a floating gate structure of a flash memory device and a method for fabricating the same, which relates to a nonvolatile memory in a manufacturing technology of an ultra-large-scaled integrated circuit. In the invention, by modifying a manufacturing of a floating gate in the a standard process for the flash memory, that is, by adding three steps of deposition, two steps of etching and one step of CMP, an -shaped floating gate is formed. In addition to these steps, all the other steps are the same as those of the standard process for the flash memory process. By the invention, a coupling ratio may be improved effectively and a crosstalk between adjacent devices may be lowered, without adding additional photomasks and barely increasing a process complexity, which are very important to improve programming speed and reliability.
    • 本发明公开了一种闪存器件的浮动栅极结构及其制造方法,涉及超大规模集成电路的制造技术中的非易失性存储器。 在本发明中,通过在闪速存储器的标准处理中,即通过添加三个步骤的沉积,两个步骤的蚀刻和CMP的一个步骤来修改浮动栅极的制造,形成一个形状的浮动栅极。 除了这些步骤之外,所有其他步骤与闪存过程的标准过程相同。 通过本发明,可以有效地改善耦合比,并且可以降低相邻器件之间的串扰,而不增加额外的光掩模,并且几乎不增加工艺复杂性,这对于提高编程速度和可靠性非常重要。
    • 28. 发明授权
    • Flash memory and fabrication method and operation method for the same
    • 闪存及其制作方法及操作方法相同
    • US08526242B2
    • 2013-09-03
    • US13321120
    • 2011-03-07
    • Ru HuangYimao CaiShiqiang QinQianqian HuangPoren TangYu TangGengyu Yang
    • Ru HuangYimao CaiShiqiang QinQianqian HuangPoren TangYu TangGengyu Yang
    • G11C11/34
    • H01L27/11556H01L29/7391H01L29/7889H01L29/8616
    • The present invention discloses a flash memory and the fabrication method and the operation method for the same. The flash memory comprises two memory cells of vertical channels, wherein a lightly-doped N type (or P type) silicon is used as a substrate; a P+ region (or an N+ region) is provided on each of the both ends of the silicon surface, and two channel regions perpendicular to the surface are provided therebetween; an N+ region (or a P+ region) shared by two channels is provided over the channels; a tunneling oxide layer, a polysilicon floating gate, a block oxide layer and a polysilicon control gate are provided sequentially on the outer sides of each channel from inside to outside; and the polysilicon floating gate and the polysilicon control gate are isolated from the P+ region by a sidewall oxide layer. The whole device is a two-bit TFET type flash memory with vertical channels which has better compatibility with prior-art standard CMOS process. As compared with a conventional MOSFET-based flash memory, the flash memory according to the present invention possesses various advantages such as high programming efficiency, low power consumption, effective inhibition of punch-through effect, and high density, etc.
    • 本发明公开了一种闪存及其制作方法及其操作方法。 闪速存储器包括两个垂直通道的存储单元,其中使用轻掺杂N型(或P型)硅作为衬底; 在硅表面的两端分别设置有P +区域(或N +区域),并且在两面之间设置与该表面垂直的2个沟道区域。 在通道上设置由两个通道共享的N +区域(或P +区域); 隧道氧化物层,多晶硅浮置栅极,块状氧化物层和多晶硅控制栅极,从内向外依次设置在每个沟道的外侧上; 并且多晶硅浮置栅极和多晶硅控制栅极通过侧壁氧化物层与P +区域隔离。 整个器件是具有垂直通道的两位TFET型闪存,与现有的标准CMOS工艺具有更好的兼容性。 与传统的基于MOSFET的闪存相比,根据本发明的闪速存储器具有诸如编程效率高,功耗低,穿透效果有效抑制和高密度等各种优点。
    • 30. 发明申请
    • DIRECTIONAL COUPLER INTEGRATED BY CMOS PROCESS
    • CMOS工艺集成的方向耦合器
    • US20130141183A1
    • 2013-06-06
    • US13641647
    • 2012-04-16
    • Le YeJiayi WangHuailin LiaoRu Huang
    • Le YeJiayi WangHuailin LiaoRu Huang
    • H01P5/16
    • H01P5/184H01P5/187
    • A directional coupler is disclosed integrated on a single chip and an integrated circuit based on a standard CMOS process and relates to a field of radio frequency communication. In exemplary implementations, by using a standard CMOS process technology, the directional coupler integrated by a CMOS process is formed by a coil winded by a upper layer of metal lines, a coil winded by a lower layer of metal lines, two tuning capacitor array, and a matching resistor. Two terminals of the coil are a direct terminal and an input terminal; two terminals of the coil are a coupled terminal and an isolation terminal; the terminals of the coils and are intersected at 90°; the coil is winded by an upper metal layer and the coil is winded by a lower metal layer. Further, the insertion loss is low and the isolation degree is large.
    • 公开了一种集成在单个芯片上的定向耦合器和基于标准CMOS工艺的集成电路,涉及射频通信领域。 在示例性实施方案中,通过使用标准CMOS工艺技术,由CMOS工艺集成的定向耦合器由金属线上层缠绕的线圈,由金属线下层缠绕的线圈,两个调谐电容器阵列, 和匹配电阻。 线圈的两个端子是直接端子和输入端子; 线圈的两个端子是耦合端子和隔离端子; 线圈的端子和90°相交; 线圈被上金属层缠绕,线圈被下金属层缠绕。 此外,插入损耗低,隔离度大。