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21. 发明授权

US06688838B2 Cleanroom lift having an articulated arm 失效
标题翻译：洁净室电梯具有铰接臂
公开(公告)号：US06688838B2
公开(公告)日：2004-02-10
申请号：US10091686
申请日：2002-03-04
申请人： Ilya Lavitsky , Michael Rosenstein
发明人： Ilya Lavitsky , Michael Rosenstein
IPC分类号： B66C2300
CPC分类号： B25J5/007 , B25J9/042 , B25J18/04
摘要： A cleanroom lift for maneuvering large objects such as turbomolecular pumps utilized in semiconductor processing applications is provided. In one embodiment, the lift includes a vertically movable carriage coupled to a linkage assembly. The linkage assembly has a first link and a second link. Each link has one piece construction to minimize deflection under load. The first link is coupled to the carriage by a carriage shaft assembly and to the second link by a linkage shaft assembly. The second link is coupled to the linkage shaft assembly and a gripper assembly. Optionally, a third link and second shaft assembly may be disposed between the gripper assembly and the second link to minimize the weight of the links to facilitate assembly in cleanroom environments.
摘要翻译：提供了用于操纵诸如用于半导体加工应用中的涡轮分子泵的大型物体的洁净室升降机。在一个实施例中，升降机包括联接到连杆组件的可垂直移动的滑架。连杆组件具有第一连杆和第二连杆。每个连杆都有一件结构，以减少负载下的挠度。第一连杆通过滑架轴组件联接到滑架，并通过连杆轴组件连接到第二连杆。第二连杆联接到连杆轴组件和夹具组件。可选地，第三连杆和第二轴组件可以设置在夹具组件和第二连杆之间，以最小化连杆的重量，以便于在洁净室环境中组装。

22. 发明授权

US06669829B2 Shutter disk and blade alignment sensor 有权
标题翻译：快门盘和刀片对准传感器
公开(公告)号：US06669829B2
公开(公告)日：2003-12-30
申请号：US10082480
申请日：2002-02-20
申请人： Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
发明人： Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
IPC分类号： C23C1400
CPC分类号： C23C14/566
摘要： The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.
摘要翻译：本发明通常提供物理气相沉积室和用于检测物理气相沉积室内的快门盘的位置的方法。在一个实施例中，物理气相沉积室包括其中设置有快门盘机构的室主体。壳体密封地联接到室主体的侧壁并且通过穿过侧壁形成的槽与其连通。至少第一传感器被布置成与壳体相邻并且被定向以检测壳体内的快门盘机构的存在。在一个实施例中，用于检测具有基板支撑件的物理气相沉积室内的快门盘的位置的方法通常包括将快门盘移离基板支撑件，并且响应于第一传感器的位置改变第一传感器的状态边缘快门盘。

23. 发明授权

US06221221B1 Apparatus for providing RF return current path control in a semiconductor wafer processing system 有权
标题翻译：用于在半导体晶片处理系统中提供RF返回电流路径控制的装置
公开(公告)号：US06221221B1
公开(公告)日：2001-04-24
申请号：US09192872
申请日：1998-11-16
申请人： Ayad Al-Shaikh , Michael Rosenstein , Bradley O. Stimson , Jianming Fu , Praburam Gopalraja
发明人： Ayad Al-Shaikh , Michael Rosenstein , Bradley O. Stimson , Jianming Fu , Praburam Gopalraja
IPC分类号： C23C1434
CPC分类号： H01J37/32577
摘要： Apparatus providing a low impedance RF return current path between a shield member and a pedestal in a semiconductor wafer processing chamber. The return path reduces RF voltage drop between the shield member and the pedestal during processing. The return path comprises a conductive strap connected to the pedestal and a conductive bar attached to the strap. A toroidal spring makes multiple parallel electrical connections between the conductive bar and the shield member. A support assembly, attached to a collar on the chamber wall, supports the conductive bar.
摘要翻译：一种在半导体晶片处理室中提供屏蔽构件和基座之间的低阻抗RF返回电流路径的装置。返回路径在处理期间降低了屏蔽构件和基座之间的RF电压降。返回路径包括连接到基座的导电带和附接到带的导电条。环形弹簧在导电棒和屏蔽构件之间形成多个平行的电连接。附接到室壁上的套环的支撑组件支撑导电棒。

24. 发明授权

US5690795A Screwless shield assembly for vacuum processing chambers 失效
标题翻译：用于真空处理室的无螺纹屏蔽组件
公开(公告)号：US5690795A
公开(公告)日：1997-11-25
申请号：US463463
申请日：1995-06-05
申请人： Michael Rosenstein , Howard Grunes , Stephen Bruce Brodsky
发明人： Michael Rosenstein , Howard Grunes , Stephen Bruce Brodsky
IPC分类号： C23C14/00 , C23C14/56 , H01L21/00 , H01L21/203 , H01L21/302 , H01L21/3065 , C23C14/34 , C23C16/00 , C23F1/02
CPC分类号： H01L21/67017 , C23C14/564 , Y10S156/916
摘要： A structure and method is described for securing an overspray shield in processing chambers in the wall sandwich of the chamber or using a dimensionally compliant floating spacer ring to elastically clamp the overspray shield in position in a vacuum substrate processing chamber without the use of removable fasteners. The configuration uses the differential pressures between the inside and outside of the chamber to clamp the overspray shield along with its shield clamping assembly components at a spacer position in the chamber. The spacer position is generally interior to vacuum sealing limits of the chamber. The arrangement is such that if misalignment occurs a good vacuum-type seal cannot be achieved unless the parts are moved to correct alignment. When correctly aligned the overspray shield is tightly held to the processing chamber wall and electrical continuity between the processing chamber wall and the overspray shield is assured throughout expected process conditions.
摘要翻译：描述了一种结构和方法，用于将过喷屏蔽件固定在室的壁三明治中的处理腔室中，或者使用尺寸合适的浮动间隔环来弹性地将超喷射屏蔽件弹性地夹紧在真空基板处理室中的适当位置，而不使用可移除的紧固件。该配置使用腔室内部和外部之间的压差将过喷面罩与其屏蔽夹紧组件部件一起夹在腔室中的间隔件位置。间隔件位置通常在腔室的真空密封极限内部。这种布置使得如果发生不对准，则不能实现良好的真空型密封，除非将部件移动到正确的对准。当正确对准时，超喷射屏蔽被紧紧地保持在处理室壁上，并且在预期的工艺条件下确保了处理室壁和过喷面罩之间的电连续性。

25. 发明授权

US09014848B2 Mobile robot system 有权
标题翻译：移动机器人系统
公开(公告)号：US09014848B2
公开(公告)日：2015-04-21
申请号：US13032406
申请日：2011-02-22
申请人： Timothy S. Farlow , Michael Rosenstein , Michael Halloran , Chikyung Won , Steven V. Shamlian , Mark Chiappetta
发明人： Timothy S. Farlow , Michael Rosenstein , Michael Halloran , Chikyung Won , Steven V. Shamlian , Mark Chiappetta
IPC分类号： G05D1/02 , B25J5/00 , B25J11/00 , G05D1/00 , B25J13/00 , B25J19/02
CPC分类号： B25J9/1697 , B25J5/007 , B25J11/009 , B25J19/023 , G05D1/0011 , G05D1/0022 , G05D1/0038 , G05D1/0227 , G05D1/024 , G05D1/0242 , G05D1/0246 , G05D1/0255 , G05D1/027 , G05D1/0272 , G05D1/0274 , G05D2201/0206 , G05D2201/0211 , H04N7/142 , H04N7/144 , Y10S901/01 , Y10S901/47
摘要： A robot system includes a mobile robot having a controller executing a control system for controlling operation of the robot, a cloud computing service in communication with the controller of the robot, and a remote computing device in communication with the cloud computing service. The remote computing device communicates with the robot through the cloud computing service.
摘要翻译：机器人系统包括具有执行用于控制机器人的操作的控制系统的控制器的移动机器人，与机器人的控制器通信的云计算服务以及与云计算服务通信的远程计算设备。远程计算设备通过云计算服务与机器人进行通信。

26. 发明申请

US20110288684A1 Mobile Robot System 有权
标题翻译：移动机器人系统
公开(公告)号：US20110288684A1
公开(公告)日：2011-11-24
申请号：US13032406
申请日：2011-02-22
申请人： Tim S. Farlow , Michael Rosenstein , Michael Halloran , Chikyung Won , Steven V. Shamlian , Mark Chiappetta
发明人： Tim S. Farlow , Michael Rosenstein , Michael Halloran , Chikyung Won , Steven V. Shamlian , Mark Chiappetta
IPC分类号： B25J13/08
CPC分类号： B25J9/1697 , B25J5/007 , B25J11/009 , B25J19/023 , G05D1/0011 , G05D1/0022 , G05D1/0038 , G05D1/0227 , G05D1/024 , G05D1/0242 , G05D1/0246 , G05D1/0255 , G05D1/027 , G05D1/0272 , G05D1/0274 , G05D2201/0206 , G05D2201/0211 , H04N7/142 , H04N7/144 , Y10S901/01 , Y10S901/47
摘要： A robot system includes a mobile robot having a controller executing a control system for controlling operation of the robot, a cloud computing service in communication with the controller of the robot, and a remote computing device in communication with the cloud computing service. The remote computing device communicates with the robot through the cloud computing service.
摘要翻译：机器人系统包括具有执行用于控制机器人的操作的控制系统的控制器的移动机器人，与机器人的控制器通信的云计算服务以及与云计算服务通信的远程计算设备。远程计算设备通过云计算服务与机器人进行通信。

27. 发明授权

US07674360B2 Mechanism for varying the spacing between sputter magnetron and target 有权
标题翻译：改变溅射磁控管与靶材间距的机理
公开(公告)号：US07674360B2
公开(公告)日：2010-03-09
申请号：US10942273
申请日：2004-09-16
申请人： Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
发明人： Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
IPC分类号： C25B9/00 , C25B11/00 , C25B13/00 , C23C14/00
CPC分类号： C23C14/3407 , C23C14/35 , C23C14/54 , H01J37/3408 , H01J37/3455
摘要： A lift mechanism for and a corresponding use of a magnetron in a plasma sputter reactor. A magnetron rotating about the target axis is controllably lifted away from the back of the target to compensate for sputter erosion, thereby maintaining a constant magnetic field and resultant plasma density at the sputtered surface, which is particularly important for stable operation with a small magnetron, for example, one executing circular or planetary motion about the target axis. The lift mechanism can include a lead screw axially fixed to the magnetron support shaft and a lead nut engaged therewith to raise the magnetron as the lead nut is turned. Alternatively, the support shaft is axially fixed to a vertically moving slider. The amount of lift may be controlled according a recipe based on accumulated power applied to the target or by monitoring electrical characteristics of the target.
摘要翻译：用于等离子体溅射反应器中的磁控管的升降机构和相应的使用。围绕目标轴旋转的磁控管被可控地从目标的背面提升，以补偿溅射侵蚀，从而在溅射表面保持恒定的磁场和合成的等离子体密度，这对于使用小的磁控管的稳定操作特别重要，例如，一个执行关于目标轴的圆形或行星运动。升降机构可以包括轴向固定到磁控管支撑轴的导螺杆和与其接合的导螺母，以在导螺母转动时升高磁控管。或者，支撑轴轴向固定到垂直移动的滑块。可以根据基于施加到目标的累积功率的配方或通过监视目标的电气特性来控制升力量。

28. 发明申请

US20060151306A1 Build-in loto device on equipment breaker panel 有权
标题翻译：设备断路器面板上的内置loto设备
公开(公告)号：US20060151306A1
公开(公告)日：2006-07-13
申请号：US11312235
申请日：2005-12-20
申请人： Allen Lau , Michael Rosenstein , Carl Johnson , Sharon Niehoff
发明人： Allen Lau , Michael Rosenstein , Carl Johnson , Sharon Niehoff
IPC分类号： H01H9/28
CPC分类号： H01H9/282
摘要： An apparatus for a lock out/tag out device that is a permanent attachment to a standard breaker box is disclosed. The device is designed to prevent movement of an electrical breaker handle to a closed position when the device is in use. The device also prevents locking a breaker in an on position, thereby lowering safety concerns. When the device is not in use, the device will not interfere with the operation of the breakers and stays conveniently attached to the breaker box. The device also allows storage of locking devices when not in use, thereby enabling personnel to perform a service procedure more efficiently.
摘要翻译：公开了一种用于锁定/标签输出装置的装置，其是与标准断路器盒的永久附件。该设备被设计成当设备使用时防止电气断路器手柄移动到关闭位置。该装置还防止将断路器锁定在接通位置，从而降低安全性。当设备不使用时，设备不会干扰断路器的操作并且保持方便地连接到断路器盒。该装置还允许在不使用时存储锁定装置，从而使人员能够更有效地执行服务程序。

29. 发明授权

US06827825B2 Method for detecting the position of a shutter disk in a physical vapor deposition chamber 有权
公开(公告)号：US06827825B2
公开(公告)日：2004-12-07
申请号：US10702230
申请日：2003-11-06
申请人： Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
发明人： Michael Feltsman , Allen Lau , Michael Rosenstein , Marc O. Schweitzer
IPC分类号： C23C1434
CPC分类号： C23C14/566
摘要： The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.

30. 外观设计

USD442853S1 Rounded overlap coil 失效
标题翻译：圆形重叠线圈
公开(公告)号：USD442853S1
公开(公告)日：2001-05-29
申请号：US29109893
申请日：1999-08-24
申请人： Praburam Gopalraja , John C. Forster , Michael Rosenstein
设计人： Praburam Gopalraja , John C. Forster , Michael Rosenstein

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