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    • 21. 发明授权
    • Pnictide trap for vacuum systems
    • 用于真空系统的Pnictide陷阱
    • US4613485A
    • 1986-09-23
    • US581101
    • 1984-02-17
    • Robert W. ParryJohn A. BaumannRozalie Schachter
    • Robert W. ParryJohn A. BaumannRozalie Schachter
    • B01D8/00F04B37/16F01N3/10
    • B01D8/00B01J2219/0894
    • The present invention provides a trap for a vapor species, particularly a pnictide.sub.4 vapor species, for a vacuum system of the type including a vacuum chamber communicating with a forepump through a vacuum line. The trap may be positioned within the vacuum chamber itself, or in the alternative, the trap may be located between the vacuum chamber and the forepump. The trap includes a housing for a cracker, which may be a heated filament or a plasma, which cracks the pnictide vapor species into pnictide.sub.2. The walls of the housing are cooled so that the trapped pnictide species readily forms a film and adheres to the walls of the housing. The pnictide.sub.4 vapor species, which may be harmful to the operation of a forepump, is prevented from entering the forepump. A removable sleeve can be positioned in the housing so that the cracked species adheres to it. The sleeve may be removed from the housing for maintenance and replacement purposes. When the trap is located within the vacuum chamber itself, it also functions to reduce background pnictide.sub.4 pressure in that chamber.
    • 本发明提供了一种用于真空系统的蒸汽种类,特别是pnictide4蒸气物质的捕集阱,该真空系统包括通过真空管道与前级泵通过的真空室。 捕集器可以定位在真空室本身内,或者可选地,阱可以位于真空室和前级泵之间。 捕集器包括用于裂化器的壳体,其可以是加热的细丝或等离子体,其将pnictide蒸气物质裂解成pnictide2。 壳体的壁被冷却,使得被捕获的pnictide物质容易形成膜并粘附到壳体的壁上。 可能对前排泵的操作有害的pnictide4蒸汽物质被阻止进入前级泵。 可拆卸的套筒可以被定位在壳体中,使得裂纹物质附着在其上。 套管可以从外壳上取下来进行维护和更换。 当陷阱位于真空室本身内时,它也起到减小该室内的背景影响4的作用。