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    • 24. 发明授权
    • Resistance measurements of a helical coil
    • 螺旋线圈的电阻测量
    • US07741133B2
    • 2010-06-22
    • US11957484
    • 2007-12-17
    • Edward Hin Pong LeeJennifer Ai-Ming Leung
    • Edward Hin Pong LeeJennifer Ai-Ming Leung
    • H01L21/00H01F30/12G01R1/00
    • G01R31/06
    • Test methods and components are disclosed for testing resistances of helical coils formed in magnetic recording heads. Helical coils in magnetic recording heads include a bottom coil structure, a top coil structure, and connecting structures that electrically connect the top and bottom coil structures. A test component is fabricated on the wafer along with the magnetic recording heads. The test component includes a bottom coil structure connected in series, and includes a top coil structure connected in series which is electrically disconnected from the bottom coil structure. Resistances of the top and bottom coil structures are measured in the test component. A total resistance of a helical coil is also measured. The resistance of the connecting structures in the helical coil may then be determined based on the resistance of the bottom coil structure, the resistance of the top coil structure, and the total resistance of the helical coil.
    • 公开了用于测试形成在磁记录头中的螺旋线圈的电阻的测试方法和部件。 磁记录头中的螺旋线圈包括底部线圈结构,顶部线圈结构以及将顶部和底部线圈结构电连接的连接结构。 测试部件与磁记录头一起制造在晶片上。 测试部件包括串联连接的底部线圈结构,并且包括与底部线圈结构电气断开的串联连接的顶部线圈结构。 在测试部件中测量顶部和底部线圈结构的电阻。 还测量螺旋线圈的总电阻。 然后可以基于底部线圈结构的电阻,顶部线圈结构的电阻和螺旋线圈​​的总电阻来确定螺旋线圈中的连接结构的电阻。
    • 30. 发明授权
    • Method of manufacturing a magnetic head having short pole yoke length
    • 具有短磁轭长度的磁头的制造方法
    • US07322097B2
    • 2008-01-29
    • US10758428
    • 2004-01-16
    • Richard HsiaoEdward Hin Pong Lee
    • Richard HsiaoEdward Hin Pong Lee
    • G11B5/17G11B5/187
    • G11B5/3133G11B5/3163Y10T29/49021Y10T29/49032Y10T29/49043Y10T29/4906Y10T29/49062
    • The induction coil of the magnetic head of the present invention is fabricated in a patterned electrical insulation material, preferably utilizing reactive ion etch (RIE) techniques. The electrical insulation material is particularly patterned such that it is formed away from the ABS surface and in the location of the induction coil. A fill layer is deposited around the patterned electrical insulation material layer, such that the fill layer is disposed at the ABS surface. In a preferred embodiment, the patterned electrical insulation material is initially fabricated from hard baked photoresist and subsequent to the deposition of the fill layer the hard baked photoresist material is removed and replaced by SiO2. The SiO2 is thereby located away from the ABS surface and the induction coil is subsequently fabricated within the SiO2 material.
    • 本发明的磁头的感应线圈以图案化的电绝缘材料制成,优选利用反应离子蚀刻(RIE)技术。 电绝缘材料被特别图案化,使得其形成为远离ABS表面并且在感应线圈的位置。 填充层沉积在图案化的电绝缘材料层周围,使得填充层设置在ABS表面。 在优选实施例中,图案化电绝缘材料最初由硬烘焙光致抗蚀剂制造,并且在沉积填充层之后,去除硬烘烤的光致抗蚀剂材料并用SiO 2替代。 因此,SiO 2 2位于离开ABS表面的位置,随后在SiO 2材料内制造感应线圈。