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    • 25. 发明申请
    • Rocking Actuator and Laser Machining Apparatus
    • 摇动执行器和激光加工设备
    • US20080036309A1
    • 2008-02-14
    • US11833695
    • 2007-08-03
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • Souichi ToyamaKounosuke KitamuraAkira DoiHiromu HiraiKenta SekiYoshiaki Kano
    • H02K33/00
    • H02K26/00H02K33/16
    • A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
    • 可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。 即使通过快速连续的运动来定位可转向的镜子,也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。 提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。 在线圈中产生的热量通过传热旁路单元引入壳体。 因此,线圈的温度上升被抑制。 在与线圈相对的永磁体中设置有径向槽,以防止其中出现涡流。 凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。