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1. 发明授权

US07629714B2 Rocking actuator and laser machining apparatus 有权
标题翻译：摇摆执行器和激光加工设备
公开(公告)号：US07629714B2
公开(公告)日：2009-12-08
申请号：US11833695
申请日：2007-08-03
申请人： Souichi Toyama , Kounosuke Kitamura , Akira Doi , Hiromu Hirai , Kenta Seki , Yoshiaki Kano
发明人： Souichi Toyama , Kounosuke Kitamura , Akira Doi , Hiromu Hirai , Kenta Seki , Yoshiaki Kano
IPC分类号： H02K33/00
CPC分类号： H02K26/00 , H02K33/16
摘要： A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
摘要翻译：可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。即使通过快速连续的运动来定位可转向的镜子，也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。在线圈中产生的热量通过传热旁路单元引入壳体。因此，线圈的温度上升被抑制。在与线圈相对的永磁体中设置有径向槽，以防止其中出现涡流。凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。

2. 发明申请

US20080036309A1 Rocking Actuator and Laser Machining Apparatus 有权
标题翻译：摇动执行器和激光加工设备
公开(公告)号：US20080036309A1
公开(公告)日：2008-02-14
申请号：US11833695
申请日：2007-08-03
申请人： Souichi Toyama , Kounosuke Kitamura , Akira Doi , Hiromu Hirai , Kenta Seki , Yoshiaki Kano
发明人： Souichi Toyama , Kounosuke Kitamura , Akira Doi , Hiromu Hirai , Kenta Seki , Yoshiaki Kano
IPC分类号： H02K33/00
CPC分类号： H02K26/00 , H02K33/16
摘要： A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.
摘要翻译：可以抑制移动磁体致动器中的永磁体的温度升高的摆动致动器和激光加工装置。即使通过快速连续的运动来定位可转向的镜子，也可以在不降低加工吞吐量或孔位置精度的情况下执行高度可靠的加工。提供了用于冷却壳体的冷却套和与线圈和壳体接触的传热单元。在线圈中产生的热量通过传热旁路单元引入壳体。因此，线圈的温度上升被抑制。在与线圈相对的永磁体中设置有径向槽，以防止其中出现涡流。凹槽深度不小于由永磁体的体积电阻率和磁导率函数表示的皮肤深度以及施加到线圈的电流的基频。

3. 发明授权

US07768225B2 Servo control system for movable body, and laser drilling machine 有权
标题翻译：移动体伺服控制系统，激光钻孔机
公开(公告)号：US07768225B2
公开(公告)日：2010-08-03
申请号：US11049706
申请日：2005-02-04
申请人： Souichi Toyama , Yaichi Okubo , Hiromu Hirai , Makoto Iwasaki , Motohiro Kawafuku , Noriaki Hirose
发明人： Souichi Toyama , Yaichi Okubo , Hiromu Hirai , Makoto Iwasaki , Motohiro Kawafuku , Noriaki Hirose
IPC分类号： G06F19/00 , B23K26/04
CPC分类号： B23K26/10 , B23K26/382 , B23K2103/50
摘要： A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.
摘要翻译：通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起，以定位移动体。假设例如可移动体是可转向反射镜，数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。为了更高的有效性，每当接收到角度（位置）命令数据时，数字滤波器的内部状态变量可期望地被清除为零。

4. 发明授权

US08872064B2 Positioning control system for moving element and laser drilling machine 有权
标题翻译：移动元件和激光钻孔机定位控制系统
公开(公告)号：US08872064B2
公开(公告)日：2014-10-28
申请号：US11707153
申请日：2007-02-16
申请人： Takashi Ono , Souichi Toyama , Yaichi Okubo , Hiromu Hirai
发明人： Takashi Ono , Souichi Toyama , Yaichi Okubo , Hiromu Hirai
IPC分类号： B23K26/00 , G05B13/02 , G05B11/18 , G05B19/23
CPC分类号： G05B19/231 , G05B2219/41029 , G05B2219/41127 , G05B2219/45139
摘要： A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.
摘要翻译：基于位置指令数据定位移动元件的定位控制系统具有反馈回路。该系统还设置有环路增益修正器，用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益，在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。第一和第二公差可以优选地具有相同的绝对值。移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。还公开了一种包括该系统的激光钻孔机。

5. 发明申请

US20070227773A1 Positioning control system for moving element and laser drilling machine 有权
标题翻译：移动元件和激光钻孔机定位控制系统
公开(公告)号：US20070227773A1
公开(公告)日：2007-10-04
申请号：US11707153
申请日：2007-02-16
申请人： Takashi Ono , Souichi Toyama , Yaichi Okubo , Hiromu Hirai
发明人： Takashi Ono , Souichi Toyama , Yaichi Okubo , Hiromu Hirai
IPC分类号： E21B44/00 , G05B13/02
CPC分类号： G05B19/231 , G05B2219/41029 , G05B2219/41127 , G05B2219/45139
摘要： A positioning control system for positioning a moving element on a basis of position command data is provided with a feedback loop. The system is also provided with a loop gain modifier for determining a loop gain, which is to be used in a following positioning operation, on a basis of a difference between an amount of overshoot measured in a current positioning operation and a predetermined tolerance or on a basis of a difference between an amount of overshoot measured in a current positioning operation and a first predetermined tolerance and a difference between an amount of undershoot measured in the current positioning operation and a second predetermined tolerance. The first and second tolerances may preferably be the same in absolute value. The moving element may specifically be a steerable mirror for drilling holes in a work by reflecting a laser beam. Also disclosed is a laser drilling machine including the system.
摘要翻译：基于位置指令数据定位移动元件的定位控制系统具有反馈回路。该系统还设置有环路增益修正器，用于基于在当前定位操作中测量的过冲量与预定公差之间的差异或者在预定公差上基于在随后的定位操作中使用的环路增益来确定环路增益，在当前定位操作中测量的过冲量与第一预定公差之间的差异与在当前定位操作中测量的下冲量之差与第二预定公差之间的差的基础。第一和第二公差可以优选地具有相同的绝对值。移动元件可以具体地是用于通过反射激光束在工件中钻孔的可操纵镜。还公开了一种包括该系统的激光钻孔机。

6. 发明申请

US20050187650A1 Servo control system for movable body, and laser drilling machine 有权
标题翻译：移动体伺服控制系统，激光钻孔机
公开(公告)号：US20050187650A1
公开(公告)日：2005-08-25
申请号：US11049706
申请日：2005-02-04
申请人： Souichi Toyama , Yaichi Okubo , Hiromu Hirai , Makoto Iwasaki , Motohiro Kawafuku , Noriaki Hirose
发明人： Souichi Toyama , Yaichi Okubo , Hiromu Hirai , Makoto Iwasaki , Motohiro Kawafuku , Noriaki Hirose
IPC分类号： G02B26/10 , B23K26/08 , B23K26/10 , B23K26/38 , G05B13/02 , G05D3/12 , G06F19/00
CPC分类号： B23K26/10 , B23K26/382 , B23K2103/50
摘要： A difference between each position command data outputted in a form of a step signal from a high-level controller and its corresponding detected position data of a movable body is integrated by an integral compensator to position the movable body. Assuming, for example, that the movable body is a steerable mirror, digital filters are arranged to compensate the value of an initial state of an angular displacement and the value of an initial state of an angular velocity, respectively, and respective impulse responses of the digital filters as additional input elements are added to an output terminal of the integral compensator. For higher effectiveness, internal state variables of the digital filters can desirably be cleared to zero whenever an angle (position) command data is received.
摘要翻译：通过积分补偿器将来自高级别控制器的步进信号输出的每个位置指令数据和可移动体的对应检测位置数据之间的差积分在一起，以定位移动体。假设例如可移动体是可转向反射镜，数字滤波器被布置成分别补偿角位移的初始状态的值和角速度的初始状态的值以及相应的脉冲响应作为附加输入元件的数字滤波器被添加到积分补偿器的输出端子。为了更高的有效性，每当接收到角度（位置）命令数据时，数字滤波器的内部状态变量可期望地被清除为零。

7. 发明申请

US20110087340A1 MOVING OBJECT FEED-FORWARD CONTROL METHOD 失效
标题翻译：移动物体进给前向控制方法
公开(公告)号：US20110087340A1
公开(公告)日：2011-04-14
申请号：US12920385
申请日：2009-02-26
申请人： Noriaki Hirose , Hiromu Hirai , Kenta Seki
发明人： Noriaki Hirose , Hiromu Hirai , Kenta Seki
IPC分类号： G05B13/02
CPC分类号： G05B11/36 , G05B19/19 , G05B2219/43178
摘要： In a case where a position command path for a control position of a load 5 that is equivalent to a moving object is set by issuing a position command Rc(z), a gain for one of a high-frequency component, a specified frequency, and a specified frequency width is constrained. This means that a resonant frequency can be constrained, and that after the position command Rc(z) arrives at a target position, a position detection signal Y(z) can also arrive at the target position in a set number of steps. It is therefore possible to perform positioning at high speed and with high precision by constraining a resonance mode of a mechanism that includes the moving object, and a feed-forward control can be performed that meets target positioning times that are set for various types of operating patterns.
摘要翻译：在通过发出位置指令Rc（z）来设定与运动物体相当的载荷5的控制位置的位置指令路径的情况下，将高频分量，规定频率，并且限制了指定的频率宽度。这意味着可以限制谐振频率，并且在位置指令Rc（z）到达目标位置之后，位置检测信号Y（z）也可以以设定的步数到达目标位置。因此，可以通过约束包括移动体的机构的共振模式，以高速，高精度地进行定位，并且可以执行前馈控制，该前馈控制满足针对各种操作设定的目标定位时间模式。

8. 发明授权

US08452424B2 Moving object feed-forward control method 失效
标题翻译：移动物体前馈控制方法
公开(公告)号：US08452424B2
公开(公告)日：2013-05-28
申请号：US12920385
申请日：2009-02-26
申请人： Noriaki Hirose , Hiromu Hirai , Kenta Seki
发明人： Noriaki Hirose , Hiromu Hirai , Kenta Seki
IPC分类号： G05B13/02 , G05B19/18 , B60K6/36 , H02K7/10 , H02K41/00
CPC分类号： G05B11/36 , G05B19/19 , G05B2219/43178
摘要： In a case where a position command path for a control position of a load 5 that is equivalent to a moving object is set by issuing a position command Rc(z), a gain for one of a high-frequency component, a specified frequency, and a specified frequency width is constrained. This means that a resonant frequency can be constrained, and that after the position command Rc(z) arrives at a target position, a position detection signal Y(z) can also arrive at the target position in a set number of steps. It is therefore possible to perform positioning at high speed and with high precision by constraining a resonance mode of a mechanism that includes the moving object, and a feed-forward control can be performed that meets target positioning times that are set for various types of operating patterns.
摘要翻译：在通过发出位置指令Rc（z）来设定与运动物体相当的载荷5的控制位置的位置指令路径的情况下，将高频分量，规定频率，并且限制了指定的频率宽度。这意味着可以限制谐振频率，并且在位置指令Rc（z）到达目标位置之后，位置检测信号Y（z）也可以以设定的步数到达目标位置。因此，可以通过约束包括移动体的机构的共振模式，以高速，高精度地进行定位，并且可以执行前馈控制，该前馈控制满足针对各种操作设定的目标定位时间模式。

9. 发明授权

US5189578A Disk system with sub-actuators for fine head displacement 失效
标题翻译：具有用于精头位移的副致动器的磁盘系统
公开(公告)号：US5189578A
公开(公告)日：1993-02-23
申请号：US543425
申请日：1990-06-26
申请人： Kenji Mori , Hiromu Hirai , Haruaki Otsuki , Tsuyoshi Takahashi , Jun Naruse , Yuji Nishimura , Muneo Kawamoto
发明人： Kenji Mori , Hiromu Hirai , Haruaki Otsuki , Tsuyoshi Takahashi , Jun Naruse , Yuji Nishimura , Muneo Kawamoto
IPC分类号： G11B5/55 , G11B5/58 , G11B7/085 , G11B7/09 , G11B7/12 , G11B11/105 , G11B19/20 , G11B21/08 , G11B21/10
CPC分类号： G11B19/20 , G11B11/10552 , G11B11/10567 , G11B11/10576 , G11B11/1058 , G11B21/08 , G11B21/106 , G11B5/5552 , G11B5/5565 , G11B5/58 , G11B7/0857 , G11B7/0946 , G11B7/122 , G11B5/4873
摘要： A magnetic disk system utilizes both of voice coil motor and a piezoelectric element provided on a head supporting arm to precisely position a head to a predetermined position on a disk. The piezoelectric element is built in the distal end portion of the head supporting arm and is restricted in respect of its movement by a resilient mechanism which has low rigidity in the driving direction of the piezoelectric element and high rigidity in the other directions. The resilient mechanism is formed by pairs of doubled parallel leaf springs so arranged that each pair is disposed on either side of the piezoelectric element.
摘要翻译：磁盘系统利用设置在头部支撑臂上的音圈电动机和压电元件来精确地将磁头定位在盘上的预定位置。压电元件内置在头部支撑臂的远端部分中，并且通过弹性机构限制其运动，该弹性机构在压电元件的驱动方向上具有低刚度并且在其它方向上具有高刚度。弹性机构由成对的双平行板簧形成，使得每一对布置在压电元件的任一侧上。

10. 发明授权

US5164931A Method and apparatus for control of positioning 失效
标题翻译：用于控制定位的方法和装置
公开(公告)号：US5164931A
公开(公告)日：1992-11-17
申请号：US682262
申请日：1991-04-08
申请人： Takashi Yamaguchi , Souichi Tohyama , Hiromu Hirai
发明人： Takashi Yamaguchi , Souichi Tohyama , Hiromu Hirai
IPC分类号： G11B21/10 , G05B19/23 , G05D3/12 , G11B7/085 , G11B21/08
CPC分类号： G05B19/232 , G11B21/083 , G11B7/08517 , G05B2219/42104
摘要： Method and apparatus for control of positioning of a recording/playback head or other controlled object. When a controlled object reaches the vicinity of a target position, the control system is switched from operation as a velocity control system to operation as a position control system. By using state variables of the controlled object at that time, coefficients corresponding to the detected state variables are determined from characteristics of the controlled object which are determined in advance. By using the determined coefficient values, initial values upon start of position control of the position control system are set, and positioning control is then carried out.
摘要翻译：用于控制记录/重放头或其它受控对象的定位的方法和装置。当受控对象到达目标位置附近时，控制系统作为速度控制系统从作为位置控制系统的操作切换。通过使用该时刻的受控对象的状态变量，根据预先确定的受控对象的特性来确定与检测到的状态变量对应的系数。通过使用确定的系数值，设置位置控制系统的位置控制开始时的初始值，然后进行定位控制。

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