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    • 217. 发明授权
    • Light-emitting apparatus
    • 发光装置
    • US07268487B2
    • 2007-09-11
    • US10662357
    • 2003-09-16
    • Shunpei YamazakiToru TakayamaTakuya TsurumeYuugo Goto
    • Shunpei YamazakiToru TakayamaTakuya TsurumeYuugo Goto
    • H05B33/12
    • H01L51/529H01L27/3244H01L51/5246H01L51/5253
    • The present invention is to solve the problems of heat release and a metal material corrosion due to fluorine that are arisen in the case of using a film containing fluoroplastics (Teflon®) as a protective film for a light-emitting device. In the present invention, an inorganic film is formed after forming a light-emitting device, and a film containing fluoroplastics is formed thereon for avoiding contact with a metal material for forming the light-emitting device, as a result, a metal material corrosion due to fluorine in the film containing fluoroplastics can be prevented. In addition, the inorganic insulating film has a function of preventing fluorine in the film containing fluoroplastics from reacting to the metal material (barrier property), in addition, the inorganic insulating film is formed of a material having high heat conductivity for releasing heat generated in a light-emitting device.
    • 本发明是为了解决在使用含有氟塑料(Teflon)的膜作为发光元件的保护膜的情况下产生的放热和金属材料腐蚀的问题。 在本发明中,在形成发光装置之后形成无机膜,并且在其上形成含有氟塑料的膜,以避免与用于形成发光装置的金属材料接触,结果导致金属材料腐蚀 可以防止含氟塑料的膜中的氟。 此外,无机绝缘膜具有防止含氟塑料的膜与金属材料反应的氟(阻隔性)的功能,另外,无机绝缘膜由具有高导热性的材料形成,用于释放在 发光装置。
    • 220. 发明申请
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US20070158745A1
    • 2007-07-12
    • US11713606
    • 2007-03-05
    • Shunpei YamazakiToru TakayamaJunya MaruyamaYumiko Ohno
    • Shunpei YamazakiToru TakayamaJunya MaruyamaYumiko Ohno
    • H01L27/12H01L27/01
    • H01L27/1218H01L23/291H01L27/1214H01L27/1266H01L27/3244H01L29/66757H01L29/78603H01L51/0002H01L51/0021H01L51/0024H01L51/003H01L2221/68368H01L2924/0002Y10S438/928Y10S438/982H01L2924/00
    • (Object) It is an object of the present invention to provide a peeling method that causes no damage to a layer to be peeled and to allow not only a layer to be peeled with a small surface area but also a layer to be peeled with a large surface area to be peeled entirely. Further, it is also an object of the present invention to bond a layer to be peeled to various base materials to provide a lighter semiconductor device and a manufacturing method thereof. Particularly, it is an object to bond various elements typified by a TFT, (a thin film diode, a photoelectric conversion element comprising a PIN junction of silicon, or a silicon resistance element) to a flexible film to provide a lighter semiconductor device and a manufacturing method thereof. (Solving Means) When a metal layer 11 is provided over a substrate, an oxide layer 12 is provided in contact with the metal layer 11, a layer to be peeled 13 is formed, and the metal layer 11 is irradiated with a laser beam to perform oxidization and form a metal oxide layer 16, a clear separation is possible with a physical means within the metal oxide layer 12 or at an interface between the metal oxide layer 16 and the oxide layer 12.
    • (对象)本发明的目的是提供一种不会对被剥离层造成损害的剥离方法,并且不仅允许以小的表面积剥离层,而且还可以使用剥离层 大的表面积要完全剥离。 此外,本发明的另一个目的是将要剥离的层粘合到各种基材上以提供更轻的半导体器件及其制造方法。 特别地,目的是将由TFT表示的各种元素(薄膜二极管,包含硅的PIN结的光电转换元件或硅电阻元件)粘合到柔性膜上以提供更轻的半导体器件和 其制造方法。 (解决方案)当在基板上设置金属层11时,设置与金属层11接触的氧化物层12,形成被剥离层13,并且用激光束照射金属层11 进行氧化并形成金属氧化物层16,通过金属氧化物层12内的物理手段或金属氧化物层16与氧化物层12之间的界面,可以进行清晰的分离。